Asanuma; Keita

Patent Applications and Registrations

Patent applications and USPTO patent grants for Asanuma; Keita.The latest application filed is for "exposure system, test mask for monitoring polarization, and method for monitoring polarization".

Company Profile

0.6.4

Asanuma; Keita - Oita JP
Asanuma; Keita - Oita-shi JP
Asanuma; Keita - Yokohama JP
Asanuma, Keita - Yokohama-shi JP
Asanuma; Keita - Yokkaichi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Exposure system, test mask for monitoring polarization, and method for monitoring polarization Grant 7,440,104 - Sato , et al. October 21, 2	2008-10-21
Apparatus for correcting a plurality of exposure tools, method for correcting a plurality of exposure tools, and method for manufacturing semiconductor device Grant 7,164,960 - Komine , et al. January 16, 2	2007-01-16
Exposure system, test mask for monitoring polarization, and method for monitoring polarization App 20060098183 - Sato; Takashi ; et al.	2006-05-11
Apparatus for correcting a plurality of exposure tools, method for correcting a plurality of exposure tools, and method for manufacturing semiconductor device App 20050125178 - Komine, Nobuhiro ; et al.	2005-06-09
Exposure method and method of manufacturing semiconductor device Grant 6,872,508 - Komine , et al. March 29, 2	2005-03-29
Exposing method Grant 6,842,230 - Takakuwa , et al. January 11, 2	2005-01-11
Exposing method App 20030117599 - Takakuwa, Manabu ; et al.	2003-06-26
Exposure method and method of manufacturing semiconductor device App 20030016341 - Komine, Nobuhiro ; et al.	2003-01-23
Method of electrical measurement of misregistration of patterns Grant 6,288,556 - Sato , et al. September 11, 2	2001-09-11
Exposure tool and method capable of correcting high (N-TH) order light exposure errors depending upon an interfield coordinate Grant 6,008,880 - Higashiki , et al. December 28, 1	1999-12-28

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