loadpatents
Patent applications and USPTO patent grants for Asano; Takanobu.The latest application filed is for "semiconductor manufacturing plant".
Patent | Date |
---|---|
Semiconductor manufacturing plant Grant 8,387,559 - Hiraiwa , et al. March 5, 2 | 2013-03-05 |
Semiconductor Manufacturing Plant App 20100064969 - Hiraiwa; Jiro ;   et al. | 2010-03-18 |
Dry air-supplying apparatus and treating apparatus Grant 7,207,123 - Tanahashi , et al. April 24, 2 | 2007-04-24 |
Vacuum evacuation device and method, and substrate processing apparatus and method App 20070048145 - Ishii; Katsutoshi ;   et al. | 2007-03-01 |
Dry air-supplying apparatus and treating apparatus App 20050246918 - Tanahashi, Takashi ;   et al. | 2005-11-10 |
Thermal processing apparatus and a thermal processing method App 20050121142 - Nakao, Ken ;   et al. | 2005-06-09 |
Heat treatment system and method Grant 6,863,732 - Asano , et al. March 8, 2 | 2005-03-08 |
Heat treatment system and method App 20030106495 - Asano, Takanobu ;   et al. | 2003-06-12 |
Heat treatment system and method Grant 6,540,509 - Asano , et al. April 1, 2 | 2003-04-01 |
Heat treatment system and method App 20010049080 - Asano, Takanobu ;   et al. | 2001-12-06 |
Treatment apparatus Grant 5,829,939 - Iwai , et al. November 3, 1 | 1998-11-03 |
Treatment apparatus Grant 5,562,383 - Iwai , et al. October 8, 1 | 1996-10-08 |
Notch position aligning apparatus and process for using the apparatus to independently align individual wafers in a wafer cassette Grant 5,533,243 - Asano July 9, 1 | 1996-07-09 |
Clean air apparatus Grant 5,261,935 - Ishii , et al. November 16, 1 | 1993-11-16 |
Vertical heat treating apparatus Grant 5,236,181 - Ishii , et al. August 17, 1 | 1993-08-17 |
Wafer counter having device for aligning wafers Grant 5,183,378 - Asano , et al. February 2, 1 | 1993-02-02 |
Semiconductor wafer transferring apparatus and boat for thermal treatment of a semiconductor wafer Grant 5,131,799 - Nishi , et al. July 21, 1 | 1992-07-21 |
Wafers transfer device Grant 5,125,784 - Asano June 30, 1 | 1992-06-30 |
Vertical heat-treatment apparatus having a wafer transfer mechanism Grant 5,110,248 - Asano , et al. May 5, 1 | 1992-05-05 |
Method of loading and unloading wafer boat Grant 5,055,036 - Asano , et al. October 8, 1 | 1991-10-08 |
Pitch changing device for changing pitches of plate-like objects and method of changing pitches Grant 5,007,788 - Asano , et al. April 16, 1 | 1991-04-16 |
Wafer transfer method Grant 4,938,655 - Asano July 3, 1 | 1990-07-03 |
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