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Method for designing mask set, recording medium, template, and method for manufacturing template
Grant 11,106,128 - Nakagawa , et al. August 31, 2 | 2021-08-31 |
Imprint Method And Template
App 20210114284 - ASANO; Masafumi | 2021-04-22 |
Method For Designing Mask Set, Recording Medium, Template, And Method For Manufacturing Template
App 20190033712 - NAKAGAWA; Shinichiro ; et al. | 2019-01-31 |
Method for designing mask set, recording medium, template, and method for manufacturing template
Grant 10,114,284 - Nakagawa , et al. October 30, 2 | 2018-10-30 |
Imprint Method And Template
App 20180264712 - ASANO; Masafumi | 2018-09-20 |
Mold and mold manufacturing method
Grant 10,040,219 - Takekawa , et al. August 7, 2 | 2018-08-07 |
Pattern forming method, processing method, and processing apparatus
Grant RE46,390 - Asano , et al. May 2, 2 | 2017-05-02 |
Pattern inspection method, pattern formation control method, and pattern inspection apparatus
Grant 9,433,967 - Asano September 6, 2 | 2016-09-06 |
Pattern Data Generation Method, Pattern Data Generation Device, And Pattern Data Generation Program
App 20150261904 - KOBAYASHI; Sachiko ; et al. | 2015-09-17 |
Pattern Inspection Method, Pattern Formation Control Method, And Pattern Inspection Apparatus
App 20150235911 - ASANO; Masafumi | 2015-08-20 |
Pattern Inspection Member, Pattern Inspection Method, And Pattern Inspection Apparatus
App 20150224702 - ASANO; MASAFUMI ; et al. | 2015-08-13 |
Imprint Template And Method For Manufacturing The Same
App 20150217504 - Nakagawa; Shinichiro ; et al. | 2015-08-06 |
Method For Designing Mask Set, Recording Medium, Template, And Method For Manufacturing Template
App 20150037713 - NAKAGAWA; Shinichiro ; et al. | 2015-02-05 |
Pattern Inspection Method And Pattern Inspection Apparatus
App 20140354799 - OJIMA; Tomoko ; et al. | 2014-12-04 |
Pattern Formation Device, Method For Pattern Formation, And Program For Pattern Formation
App 20140346701 - KOBAYASHI; Sachiko ; et al. | 2014-11-27 |
Mask pattern creation method, recording medium, and semiconductor device manufacturing method
Grant 8,871,408 - Takekawa , et al. October 28, 2 | 2014-10-28 |
Mold And Mold Manufacturing Method
App 20140284846 - TAKEKAWA; Yoko ; et al. | 2014-09-25 |
Pattern forming method, mold and data processing method
Grant 8,722,535 - Asano May 13, 2 | 2014-05-13 |
Pattern Forming Method, Mold And Data Processing Method
App 20130323925 - ASANO; Masafumi | 2013-12-05 |
Mask Pattern Creation Method, Recording Medium, And Semiconductor Device Manufacturing Method
App 20130224635 - TAKEKAWA; Yoko ; et al. | 2013-08-29 |
Pattern forming method, processing method, and processing apparatus
Grant 8,420,422 - Asano , et al. April 16, 2 | 2013-04-16 |
Pattern Formation Device, Method For Pattern Formation, And Program For Pattern Formation
App 20130069278 - Kobayashi; Sachiko ; et al. | 2013-03-21 |
Simulation model creating method, computer program product, and method of manufacturing a semiconductor device
Grant 8,381,138 - Matsunawa , et al. February 19, 2 | 2013-02-19 |
Simulation Model Creating Method, Computer Program Product, And Method Of Manufacturing A Semiconductor Device
App 20120324407 - MATSUNAWA; Tetsuaki ; et al. | 2012-12-20 |
Pattern Formation Method, Method For Manufacturing Electronic Device, And Electronic Device
App 20120318561 - TAKAHATA; Kazuhiro ; et al. | 2012-12-20 |
Template, Template Manufacturing Method, And Template Manufacturing Apparatus
App 20120315349 - ZHANG; Yingkang ; et al. | 2012-12-13 |
Imprint Apparatus, Imprint Method, and Process Condition Selection Method
App 20120205782 - ASANO; Masafumi | 2012-08-16 |
Pattern Formation Method
App 20120009791 - ZHANG; Yingkang ; et al. | 2012-01-12 |
Template, Manufacturing Method, And Processing Method
App 20110315077 - ASANO; Masafumi | 2011-12-29 |
Simulation model creating method, mask data creating method and semiconductor device manufacturing method
Grant 8,055,366 - Mimotogi , et al. November 8, 2 | 2011-11-08 |
Method and system for managing semiconductor manufacturing device
App 20110245956 - Matsushita; Hiroshi ; et al. | 2011-10-06 |
Pattern Forming Method, Processing Method, And Processing Apparatus
App 20110229988 - ASANO; Masafumi ; et al. | 2011-09-22 |
Evaluating Apparatus, Evaluating Method, And Computer Program Product
App 20110224934 - Miyoshi; Seiro ; et al. | 2011-09-15 |
System of testing semiconductor devices, a method for testing semiconductor devices, and a method for manufacturing semiconductor devices
Grant 7,982,155 - Asano July 19, 2 | 2011-07-19 |
Method and system for managing semiconductor manufacturing device
Grant 7,979,154 - Matsushita , et al. July 12, 2 | 2011-07-12 |
Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus
Grant 7,970,486 - Matsushita , et al. June 28, 2 | 2011-06-28 |
Method, apparatus, and computer readable medium for evaluating a sampling inspection
Grant 7,930,123 - Ikeda , et al. April 19, 2 | 2011-04-19 |
Method for evaluating lithography apparatus and method for controlling lithography apparatus
Grant 7,883,824 - Asano , et al. February 8, 2 | 2011-02-08 |
Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device
Grant 7,855,047 - Asano , et al. December 21, 2 | 2010-12-21 |
Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle
Grant 7,812,972 - Sato , et al. October 12, 2 | 2010-10-12 |
Measurement coordinate setting system and method
Grant 7,756,656 - Asano July 13, 2 | 2010-07-13 |
Feature-quantity Extracting Method, Designed-circuit-pattern Verifying Method, And Computer Program Product
App 20100166289 - SATAKE; Masaki ; et al. | 2010-07-01 |
Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same
Grant 7,742,834 - Matsushita , et al. June 22, 2 | 2010-06-22 |
Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device
App 20100112485 - Asano; Masafumi ; et al. | 2010-05-06 |
System of testing semiconductor devices, a method for testing semiconductor devices, and a method for manufacturing semiconductor devices
App 20100068833 - Asano; Masafumi | 2010-03-18 |
Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device
Grant 7,655,369 - Asano , et al. February 2, 2 | 2010-02-02 |
Pattern Data Creating Method, Photomask Fabricating Method, And Method Of Manufacturing Semiconductor Device
App 20090305148 - ASANO; Masafumi | 2009-12-10 |
System of testing semiconductor devices, a method for testing semiconductor devices, and a method for manufacturing semiconductor devices
Grant 7,629,550 - Asano December 8, 2 | 2009-12-08 |
Method For Evaluating Lithography Apparatus And Method For Controlling Lithography Apparatus
App 20090246654 - Asano; Masafumi ; et al. | 2009-10-01 |
Simulation Model Creating Method, Mask Data Creating Method And Semiconductor Device Manufacturing Method
App 20090240362 - Mimotogi; Shoji ; et al. | 2009-09-24 |
Sampling Estimating Method, Sampling Inspection Estimating Apparatus, And Computer Readable Medium Storing Sampling Inspection Estimating Program
App 20090192743 - IKEDA; Takahiro ; et al. | 2009-07-30 |
Evaluation of pattern formation process, photo masks for the evaluation, and fabrication method of a semiconductor device with the evaluation process
Grant 7,537,869 - Asano , et al. May 26, 2 | 2009-05-26 |
Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus
Grant 7,510,341 - Hayasaki , et al. March 31, 2 | 2009-03-31 |
Process control method, a method for forming monitor marks, a mask for process control, and a semiconductor device manufacturing method
Grant 7,476,473 - Asano January 13, 2 | 2009-01-13 |
Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle
App 20090009775 - Sato; Takashi ; et al. | 2009-01-08 |
Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle
Grant 7,432,021 - Sato , et al. October 7, 2 | 2008-10-07 |
Exposure control method and method of manufacturing a semiconductor device
Grant 7,396,621 - Fujisawa , et al. July 8, 2 | 2008-07-08 |
Method And System For Managing Semiconductor Manufacturing Device
App 20080147226 - MATSUSHITA; Hiroshi ; et al. | 2008-06-19 |
Simulation model making method
App 20080134131 - Asano; Masafumi ; et al. | 2008-06-05 |
Management system of semiconductor fabrication apparatus, abnormality factor extraction method of semiconductor fabrication apparatus, and management method of the same
App 20070276528 - Matsushita; Hiroshi ; et al. | 2007-11-29 |
Photomask, exposure control method and method of manufacturing a semiconductor device
App 20070259280 - Fujisawa; Tadahito ; et al. | 2007-11-08 |
Measurement coordinate setting system and method
App 20070254386 - Asano; Masafumi | 2007-11-01 |
Method for controlling semiconductor manufacturing apparatus and control system of semiconductor manufacturing apparatus
App 20070225853 - Matsushita; Hiroshi ; et al. | 2007-09-27 |
System for adjusting manufacturing equipment, method for adjusting manufacturing equipment, and method for manufacturing semiconductor device
App 20070212801 - Kanno; Masahiro ; et al. | 2007-09-13 |
Focus monitor method and mask
Grant 7,250,235 - Izuha , et al. July 31, 2 | 2007-07-31 |
Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device
App 20070105028 - Asano; Masafumi ; et al. | 2007-05-10 |
Testing system, a computer implemented testing method and a method for manufacturing electronic devices
Grant 7,184,913 - Asano February 27, 2 | 2007-02-27 |
Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device
Grant 7,175,943 - Asano , et al. February 13, 2 | 2007-02-13 |
System of testing semiconductor devices, a method for testing semiconductor devices, and a method for manufacturing semiconductor devices
App 20060226053 - Asano; Masafumi | 2006-10-12 |
Testing system, a computer implemented testing method and a method for manufacturing electronic devices
Grant 7,103,503 - Asano September 5, 2 | 2006-09-05 |
Testing system, a computer implemented testing method and a method for manufacturing electronic devices
App 20060167653 - Asano; Masafumi | 2006-07-27 |
Testing system, a computer implemented testing method and a method for manufacturing electronic devices
App 20060161385 - Asano; Masafumi | 2006-07-20 |
Process control method, a method for forming monitor marks, a mask for process control, and a semiconductor device manufacturing method
App 20060035158 - Asano; Masafumi | 2006-02-16 |
Evaluation of pattern formation process, photo masks for the evaluation, and fabrication method of a semiconductor device with the evaluation process
App 20050244724 - Asano, Masafumi ; et al. | 2005-11-03 |
Dose monitoring method and manufacturing method of semiconductor device
Grant 6,919,153 - Fujisawa , et al. July 19, 2 | 2005-07-19 |
Monitoring method, exposure method, a manufacturing method for a semiconductor device, including an etching method and exposure processing unit
Grant 6,866,976 - Asano , et al. March 15, 2 | 2005-03-15 |
Reticle, apparatus for monitoring optical system, method for monitoring optical system, and method for manufacturing reticle
App 20050048378 - Sato, Takashi ; et al. | 2005-03-03 |
Photomask, exposure control method and method of manufacturing a semiconductor device
App 20050030502 - Fujisawa, Tadahito ; et al. | 2005-02-10 |
Temperature calibration method for baking processing apparatus, adjustment method for development processing apparatus, and method of manufacturing semiconductor apparatus
App 20050008979 - Hayasaki, Kei ; et al. | 2005-01-13 |
Focus monitor method and mask
App 20040224242 - Izuha, Kyoko ; et al. | 2004-11-11 |
Reticle set, method for designing a reticle set, exposure monitoring method, inspection method for reticle set and manufacturing method for a semiconductor device
App 20040219439 - Asano, Masafumi ; et al. | 2004-11-04 |
Exposure method and apparatus
Grant 6,813,001 - Fujisawa , et al. November 2, 2 | 2004-11-02 |
Exposure method, exposure system and recording medium
Grant 6,741,334 - Asano , et al. May 25, 2 | 2004-05-25 |
Dose monitoring method and manufacturing method of semiconductor device
App 20040058256 - Fujisawa, Tadahito ; et al. | 2004-03-25 |
Focus monitoring method, exposure apparatus, and exposure mask
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Monitoring method, exposure method, a manufacturing method for a semiconductor device, including an etching method and exposure processing unit
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Exposure method and apparatus
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Method of manufacturing semiconductor device
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Focus monitoring method, exposure apparatus, and exposure mask
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