Patent | Date |
---|
Processing instructing device, processing instructing method, computer program and processing device Grant 9,696,711 - Asakawa , et al. July 4, 2 | 2017-07-04 |
Operation limiting device, operation limiting method, and storage medium Grant 9,639,686 - Asakawa , et al. May 2, 2 | 2017-05-02 |
Production efficiency improving apparatus, production efficiency improving method, and computer program Grant 9,268,328 - Asakawa , et al. February 23, 2 | 2016-02-23 |
Operation Limiting Device, Operation Limiting Method, and Storage Medium App 20150332039 - ASAKAWA; Teruo ;   et al. | 2015-11-19 |
Processing Instructing Device, Processing Instructing Method, Computer Program And Processing Device App 20140358271 - Asakawa; Teruo ;   et al. | 2014-12-04 |
Production Efficiency Improving Apparatus, Production Efficiency Improving Method, And Computer Program App 20140018955 - Asakawa; Teruo ;   et al. | 2014-01-16 |
Carrying system, substrate treating device, and carrying method Grant 8,025,473 - Asakawa September 27, 2 | 2011-09-27 |
Semiconductor device manufacturing method and manufacturing line thereof Grant 7,566,665 - Inoue , et al. July 28, 2 | 2009-07-28 |
Carrying system, substrate treating device, and carrying method App 20090016859 - Asakawa; Teruo | 2009-01-15 |
Transfer apparatus Grant 6,988,867 - Saeki , et al. January 24, 2 | 2006-01-24 |
Semiconductor device manufacturing method and manufacturing line thereof App 20050260824 - Inoue, Junichi ;   et al. | 2005-11-24 |
Semiconductor device manufacturing method and manufacturing line thereof App 20050112889 - Inoue, Junichi ;   et al. | 2005-05-26 |
Method of manufacturing semiconductor device and manufacturing line thereof Grant 6,841,485 - Inoue , et al. January 11, 2 | 2005-01-11 |
Processing apparatus Grant 6,802,934 - Saeki , et al. October 12, 2 | 2004-10-12 |
Transfer apparatus App 20040062632 - Saeki, Hiroaki ;   et al. | 2004-04-01 |
Processing apparatus App 20030136515 - Saeki, Hiroaki ;   et al. | 2003-07-24 |
Processing apparatus App 20020020355 - Saeki, Hiroaki ;   et al. | 2002-02-21 |
Drive mechanism having a gas bearing operable under a negative pressure environment Grant 6,285,102 - Matsuoka , et al. September 4, 2 | 2001-09-04 |
Controlling gas in a multichamber processing system Grant 6,224,679 - Sasaki , et al. May 1, 2 | 2001-05-01 |
Wafer for carrying semiconductor wafers and method detecting wafers on carrier Grant 6,053,983 - Saeki , et al. April 25, 2 | 2000-04-25 |
Relay apparatus for relaying object to be treated Grant 6,013,112 - Iizuka , et al. January 11, 2 | 2000-01-11 |
Multi-chamber treatment system Grant 5,934,856 - Asakawa , et al. August 10, 1 | 1999-08-10 |
Apparatus and method for performing serial communication between master and slave devices Grant 5,754,780 - Asakawa , et al. May 19, 1 | 1998-05-19 |
Stage having electrostatic chuck and plasma processing apparatus using same Grant 5,460,684 - Saeki , et al. October 24, 1 | 1995-10-24 |
Load-lock unit and wafer transfer system Grant 5,435,683 - Oosawa , et al. * July 25, 1 | 1995-07-25 |
Load-lock unit and wafer transfer system Grant 5,405,230 - Ono , et al. April 11, 1 | 1995-04-11 |
Ion injection device Grant 5,382,803 - Asakawa January 17, 1 | 1995-01-17 |
Transfer device for transferring a substrate Grant 5,374,147 - Hiroki , et al. December 20, 1 | 1994-12-20 |
Processing method for wafers Grant 5,357,115 - Asakawa , et al. * October 18, 1 | 1994-10-18 |
Load-lock unit and wafer transfer system Grant 5,340,261 - Oosawa , et al. August 23, 1 | 1994-08-23 |
Processing system Grant 5,248,886 - Asakawa , et al. September 28, 1 | 1993-09-28 |
Handling apparatus for transferring carriers and a method of transferring carriers Grant 5,064,337 - Asakawa , et al. November 12, 1 | 1991-11-12 |
Stock unit for storing carriers Grant 4,986,715 - Asakawa January 22, 1 | 1991-01-22 |
Two-dimensional positioning device Grant 4,626,749 - Asakawa December 2, 1 | 1986-12-02 |
Two dimensional driving device for use in a positioning device in a semiconductor manufacturing apparatus Grant 4,555,650 - Asakawa November 26, 1 | 1985-11-26 |
Two-dimensional precise positioning device for use in a semiconductor manufacturing apparatus Grant 4,535,278 - Asakawa August 13, 1 | 1985-08-13 |
Positioning stage having a vibration suppressor Grant 4,525,659 - Imahashi , et al. June 25, 1 | 1985-06-25 |