Patent | Date |
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Charged particle beam irradiation apparatus and control method Grant 11,424,100 - Aso , et al. August 23, 2 | 2022-08-23 |
Charged particle beam apparatus Grant 11,361,936 - Muraki , et al. June 14, 2 | 2022-06-14 |
Particle beam irradiation apparatus Grant 11,335,534 - Aso , et al. May 17, 2 | 2022-05-17 |
Charged particle beam apparatus and sample processing observation method Grant 11,282,672 - Suzuki , et al. March 22, 2 | 2022-03-22 |
Charged Particle Beam Apparatus And Control Method Thereof App 20220084785 - MURAKI; Ayana ;   et al. | 2022-03-17 |
Charged particle beam apparatus Grant 11,239,046 - Muraki , et al. February 1, 2 | 2022-02-01 |
Charged particle beam apparatus and control method thereof Grant 11,177,113 - Muraki , et al. November 16, 2 | 2021-11-16 |
Automatic Sample Preparation Apparatus App 20210341362 - Uemoto; Atsushi ;   et al. | 2021-11-04 |
Method For Observing Biological Tissue Sample App 20210293668 - MAN; Xin ;   et al. | 2021-09-23 |
Apparatus, method, and program for processing and observing cross section, and method of measuring shape Grant 11,114,276 - Man , et al. September 7, 2 | 2021-09-07 |
Automatic sample preparation apparatus and automatic sample preparation method Grant 11,073,453 - Uemoto , et al. July 27, 2 | 2021-07-27 |
Charged Particle Beam Apparatus App 20210090850 - MURAKI; Ayana ;   et al. | 2021-03-25 |
Focused Ion Beam Apparatus App 20210090849 - ISHII; Haruyuki ;   et al. | 2021-03-25 |
Charged Particle Beam Irradiation Apparatus And Control Method App 20210090855 - ASO; Takuma ;   et al. | 2021-03-25 |
Particle Beam Irradiation Apparatus App 20210090853 - ASO; Takuma ;   et al. | 2021-03-25 |
Charged Particle Beam Apparatus App 20210090851 - MURAKI; Ayana ;   et al. | 2021-03-25 |
Liquid Metal Ion Source And Focused Ion Beam Apparatus App 20210090842 - KOYAMA; Yoshihiro ;   et al. | 2021-03-25 |
Automatic Sample Preparation Apparatus And Automatic Sample Preparation Method App 20200355589 - Uemoto; Atsushi ;   et al. | 2020-11-12 |
Charged particle beam device Grant 10,832,890 - Suzuki , et al. November 10, 2 | 2020-11-10 |
Charged Particle Beam Apparatus And Control Method Thereof App 20200312617 - MURAKI; Ayana ;   et al. | 2020-10-01 |
Automatic Sample Preparation Apparatus App 20200278281 - Uemoto; Atsushi ;   et al. | 2020-09-03 |
Automatic sample preparation apparatus Grant 10,677,697 - Uemoto , et al. | 2020-06-09 |
Charged particle beam apparatus Grant 10,658,147 - Sato , et al. | 2020-05-19 |
Composite beam apparatus Grant 10,636,615 - Asahata | 2020-04-28 |
Charged Particle Beam Apparatus And Sample Processing Observation Method App 20200126755 - SUZUKI; Hidekazu ;   et al. | 2020-04-23 |
Charged particle beam apparatus Grant 10,629,411 - Tomimatsu , et al. | 2020-04-21 |
Charged particle beam apparatus and sample processing observation method Grant 10,622,187 - Yamamoto , et al. | 2020-04-14 |
Portable information terminal, beam irradiation system, and program Grant 10,485,087 - Aso , et al. Nov | 2019-11-19 |
Charged Particle Beam Device App 20190304745 - SUZUKI; Masato ;   et al. | 2019-10-03 |
Apparatus, Method, And Program For Processing And Observing Cross Section, And Method Of Measuring Shape App 20190279843 - MAN; Xin ;   et al. | 2019-09-12 |
Charged Particle Beam Apparatus And Sample Processing Observation Method App 20190259574 - YAMAMOTO; Yo ;   et al. | 2019-08-22 |
Composite Beam Apparatus App 20190189388 - ASAHATA; Tatsuya | 2019-06-20 |
Charged Particle Beam Apparatus App 20190157037 - TOMIMATSU; Satoshi ;   et al. | 2019-05-23 |
Charged particle beam apparatus Grant 10,236,159 - Tomimatsu , et al. | 2019-03-19 |
Composite beam apparatus Grant 10,204,759 - Asahata Feb | 2019-02-12 |
Automatic Sample Preparation Apparatus App 20190025167 - Uemoto; Atsushi ;   et al. | 2019-01-24 |
Cross-section processing-and-observation method and cross-section processing-and-observation apparatus Grant 10,096,449 - Man , et al. October 9, 2 | 2018-10-09 |
Portable Information Terminal, Beam Irradiation System, And Program App 20180288865 - ASO; Takuma ;   et al. | 2018-10-04 |
Automatic sample preparation apparatus Grant 10,088,401 - Uemoto , et al. October 2, 2 | 2018-10-02 |
Microsample stage and method of manufacturing the same Grant 10,014,155 - Asahata , et al. July 3, 2 | 2018-07-03 |
Cross-section processing and observation method and cross-section processing and observation apparatus Grant 9,966,226 - Uemoto , et al. May 8, 2 | 2018-05-08 |
Focused ion beam apparatus, method for observing cross-section of sample by using the same, and storage medium Grant 9,934,938 - Uemoto , et al. April 3, 2 | 2018-04-03 |
Composite Beam Apparatus App 20180076001 - ASAHATA; Tatsuya | 2018-03-15 |
Charged Particle Beam Apparatus App 20170278664 - SATO; Makoto ;   et al. | 2017-09-28 |
Charged particle beam apparatus Grant 9,741,535 - Torikawa , et al. August 22, 2 | 2017-08-22 |
Charged Particle Beam Apparatus App 20170178858 - TOMIMATSU; Satoshi ;   et al. | 2017-06-22 |
Automatic Sample Preparation Apparatus App 20170122852 - Uemoto; Atsushi ;   et al. | 2017-05-04 |
Charged particle beam apparatus Grant 9,620,333 - Tomimatsu , et al. April 11, 2 | 2017-04-11 |
Cross section processing method and cross section processing apparatus Grant 9,548,185 - Suzuki , et al. January 17, 2 | 2017-01-17 |
Microsample Stage And Method Of Manufacturing The Same App 20160372301 - ASAHATA; Tatsuya ;   et al. | 2016-12-22 |
Cross-section Processing-and-observation Method And Cross-section Processing-and-observation Apparatus App 20160343541 - MAN; Xin ;   et al. | 2016-11-24 |
Charged particle beam apparatus Grant 9,455,119 - Sato , et al. September 27, 2 | 2016-09-27 |
Charged particle beam device, control method for charged particle beam device, and cross-section processing observation apparatus Grant 9,368,323 - Uemoto , et al. June 14, 2 | 2016-06-14 |
Cross-section processing-and-observation method and cross-section processing-and-observation apparatus Grant 9,347,896 - Man , et al. May 24, 2 | 2016-05-24 |
Charged particle beam apparatus Grant 9,336,987 - Torikawa , et al. May 10, 2 | 2016-05-10 |
Charged particle beam apparatus Grant 9,318,303 - Man , et al. April 19, 2 | 2016-04-19 |
Charged Particle Beam Apparatus App 20160093467 - TORIKAWA; Shota ;   et al. | 2016-03-31 |
Charged Particle Beam Apparatus App 20160064187 - TOMIMATSU; Satoshi ;   et al. | 2016-03-03 |
Charged particle beam apparatus having needle probe that tracks target position changes Grant 9,275,827 - Uemoto , et al. March 1, 2 | 2016-03-01 |
Focused ion beam apparatus Grant 9,269,539 - Asahata , et al. February 23, 2 | 2016-02-23 |
Charged particle beam apparatus Grant 9,245,713 - Man , et al. January 26, 2 | 2016-01-26 |
Focused ion beam system, sample processing method using the same, and sample processing program using focused ion beam Grant 9,218,939 - Asahata , et al. December 22, 2 | 2015-12-22 |
Charged particle beam apparatus having improved needle movement control Grant 9,218,937 - Uemoto , et al. December 22, 2 | 2015-12-22 |
Composite charged particle beam apparatus Grant 9,214,316 - Yamamoto , et al. December 15, 2 | 2015-12-15 |
Charged particle beam apparatus and sample processing method using charged particle beam apparatus Grant 9,202,671 - Man , et al. December 1, 2 | 2015-12-01 |
Composite charged particle beam apparatus and thin sample processing method Grant 9,190,243 - Asahata , et al. November 17, 2 | 2015-11-17 |
Focused Ion Beam Apparatus App 20150270102 - ASAHATA; Tatsuya ;   et al. | 2015-09-24 |
Charged Particle Beam Apparatus App 20150270096 - SATO; Makoto ;   et al. | 2015-09-24 |
Cross-section Processing And Observation Method And Cross-section Processing And Observation Apparatus App 20150262788 - UEMOTO; Atsushi ;   et al. | 2015-09-17 |
Ion beam apparatus Grant 9,111,717 - Asahata , et al. August 18, 2 | 2015-08-18 |
Charged Particle Beam Apparatus App 20150228451 - UEMOTO; Atsushi ;   et al. | 2015-08-13 |
Charged Particle Beam Apparatus App 20150228450 - UEMOTO; Atsushi ;   et al. | 2015-08-13 |
Charged Particle Beam Apparatus App 20150221473 - TORIKAWA; Shota ;   et al. | 2015-08-06 |
Charged Particle Beam Device, Control Method For Charged Particle Beam Device, And Cross-section Processing Observation Apparatus App 20150206702 - UEMOTO; Atsushi ;   et al. | 2015-07-23 |
Cross-section processing and observation method and cross-section processing and observation apparatus Grant 9,080,945 - Uemoto , et al. July 14, 2 | 2015-07-14 |
Composite charged particle beam apparatus Grant 9,024,280 - Uemoto , et al. May 5, 2 | 2015-05-05 |
Cross Section Processing Method And Cross Section Processing Apparatus App 20150115156 - SUZUKI; Hidekazu ;   et al. | 2015-04-30 |
Cross-section Processing-and-observation Method And Cross-section Processing-and-observation Apparatus App 20150060664 - MAN; Xin ;   et al. | 2015-03-05 |
Charged Particle Beam Apparatus App 20150060668 - MAN; Xin ;   et al. | 2015-03-05 |
Charged Particle Beam Apparatus App 20150060695 - MAN; Xin ;   et al. | 2015-03-05 |
Focused Ion Beam Apparatus, Method For Observing Cross-section Of Sample By Using The Same, And Storage Medium App 20140291508 - UEMOTO; Atsushi ;   et al. | 2014-10-02 |
Charged Particle Beam Apparatus And Sample Processing Method Using Charged Particle Beam Apparatus App 20140291511 - MAN; Xin ;   et al. | 2014-10-02 |
Focused Ion Beam System, Sample Processing Method Using The Same, And Sample Processing Program Using Focused Ion Beam App 20140284307 - ASAHATA; Tatsuya ;   et al. | 2014-09-25 |
Focused ion beam apparatus and method of adjusting ion beam optics Grant 8,822,911 - Sugiyama , et al. September 2, 2 | 2014-09-02 |
Cross-section Processing And Observation Method And Cross-section Processing And Observation Apparatus App 20140131575 - UEMOTO; Atsushi ;   et al. | 2014-05-15 |
Composite Charged Particle Beam Apparatus And Thin Sample Processing Method App 20140061159 - ASAHATA; Tatsuya ;   et al. | 2014-03-06 |
Composite charged particle beam apparatus Grant 8,642,980 - Man , et al. February 4, 2 | 2014-02-04 |
Cross-section processing and observation apparatus Grant 8,637,819 - Sato , et al. January 28, 2 | 2014-01-28 |
Composite Charged Particle Beam Apparatus App 20130248735 - MAN; Xin ;   et al. | 2013-09-26 |
Ion Beam Apparatus App 20130248732 - ASAHATA; Tatsuya ;   et al. | 2013-09-26 |
Cross-section Processing And Observation Apparatus App 20130248710 - SATO; Makoto ;   et al. | 2013-09-26 |
Focused Ion Beam Apparatus And Method Of Adjusting Ion Beam Optics App 20130240720 - SUGIYAMA; Yasuhiko ;   et al. | 2013-09-19 |
Composite Charged Particle Beam Apparatus App 20130082176 - YAMAMOTO; Yo ;   et al. | 2013-04-04 |
Composite Charged Particle Beam Apparatus App 20130075606 - UEMOTO; Atsushi ;   et al. | 2013-03-28 |
Method of preparing a transmission electron microscope sample and a sample piece for a transmission electron microscope Grant 8,191,168 - Man , et al. May 29, 2 | 2012-05-29 |
Method Of Preparing A Transmission Electron Microscope Sample And A Sample Piece For A Transmission Electron Microscope App 20090119807 - Man; Xin ;   et al. | 2009-05-07 |
Method and apparatus of measuring thin film sample and method and apparatus of fabricating thin film sample Grant 7,518,109 - Ikku , et al. April 14, 2 | 2009-04-14 |
Method of determining processing position in charged particle beam apparatus, and infrared microscope used in the method Grant 7,459,699 - Kiyohara , et al. December 2, 2 | 2008-12-02 |
Method and apparatus of measuring thin film sample and method and apparatus of fabricating thin film sample App 20080067384 - Ikku; Yutaka ;   et al. | 2008-03-20 |
Method of determining processing position in charged particle beam apparatus, and infrared microscope used in the method App 20060118733 - Kiyohara; Masahiro ;   et al. | 2006-06-08 |
Fine stencil structure correction device Grant 6,825,468 - Oi , et al. November 30, 2 | 2004-11-30 |
Fine stencil structure correction device App 20040031936 - Oi, Masamichi ;   et al. | 2004-02-19 |