Asada; Yasuo
Patent Applications and Registrations
Patent applications and USPTO patent grants for Asada; Yasuo.The latest application filed is for "etching method and substrate processing system".
- Asada; Yasuo - Yamanashi JP
- Asada; Yasuo - Nirasaki JP
- ASADA; Yasuo - Nirasaki City JP
| Patent | Date |
|---|---|
| Etching method and apparatus Grant 11,373,874 - Takahashi , et al. June 28, 2 | 2022-06-28 |
| Substrate processing method and storage medium Grant 11,342,192 - Takahashi , et al. May 24, 2 | 2022-05-24 |
| Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film Grant 11,189,498 - Orii , et al. November 30, 2 | 2021-11-30 |
| Etching method Grant 11,011,383 - Asada , et al. May 18, 2 | 2021-05-18 |
| Etching Method And Substrate Processing System App 20210082710 - TAKAHASHI; Nobuhiro ; et al. | 2021-03-18 |
| Etching Method And Apparatus App 20200312669 - TAKAHASHI; Nobuhiro ; et al. | 2020-10-01 |
| Etching Method and Etching Apparatus App 20200234974 - ASADA; Yasuo ; et al. | 2020-07-23 |
| Etching method and etching apparatus Grant 10,665,470 - Asada , et al. | 2020-05-26 |
| Substrate Processing Method And Storage Medium App 20200105539 - TAKAHASHI; Nobuhiro ; et al. | 2020-04-02 |
| Etching Method, Etching Apparatus, and Storage Medium App 20200098575 - TAKAHASHI; Nobuhiro ; et al. | 2020-03-26 |
| Method Of Etching Silicon-containing Film, Computer-readable Storage Medium, And Apparatus For Etching Silicon-containing Film App 20190355589 - ORII; Takehiko ; et al. | 2019-11-21 |
| Etching Method App 20190228981 - ASADA; Yasuo ; et al. | 2019-07-25 |
| Etching Method and Etching Apparatus App 20190221440 - ASADA; Yasuo ; et al. | 2019-07-18 |
| Etching Method And Etching Apparatus App 20190198349 - ASADA; Yasuo ; et al. | 2019-06-27 |
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