Aruga; Yoshiki
Patent Applications and Registrations
Patent applications and USPTO patent grants for Aruga; Yoshiki.The latest application filed is for "electrostatic chuck".
- Aruga; Yoshiki - Hachioji JP
- Aruga; Yoshiki - Tokyo JP
- ARUGA; Yoshiki - Hachioji-shi JP
- Aruga; Yoshiki - Tama JP
| Patent | Date |
|---|---|
| Electrostatic chuck Grant 7,944,677 - Aruga , et al. May 17, 2 | 2011-05-17 |
| Electrostatic Chuck App 20100284121 - Aruga; Yoshiki ; et al. | 2010-11-11 |
| Electrostatic Chuck App 20100096262 - ARUGA; Yoshiki ; et al. | 2010-04-22 |
| Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatus Grant 6,251,232 - Aruga , et al. June 26, 2 | 2001-06-26 |
| Compact in-line film deposition system Grant 6,027,618 - Aruga , et al. February 22, 2 | 2000-02-22 |
| In-line film deposition system Grant 5,846,328 - Aruga , et al. December 8, 1 | 1998-12-08 |
| Main valve Grant 5,560,586 - Aruga , et al. October 1, 1 | 1996-10-01 |
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