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Method for manufacturing a semiconductor component and a semiconductor component, in particular a diaphragm sensor Grant 7,679,154 - Benzel , et al. March 16, 2 | 2010-03-16 |
Method for Manufacturing a Diaphragm on a Semiconductor Substrate and Micromechanical Component Having Such a Diaphragm App 20100025786 - Schmollngruber; Peter ;   et al. | 2010-02-04 |
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Method for producing a semiconductor component and a semiconductor component produced according to the method Grant 7,479,232 - Benzel , et al. January 20, 2 | 2009-01-20 |
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Method for manufacturing a semcoductor component and a semiconductor component, in particular a diaphragm sensor App 20080093694 - Benzel; Hubert ;   et al. | 2008-04-24 |
Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor Grant 7,306,966 - Benzel , et al. December 11, 2 | 2007-12-11 |
Micromechanical component, in particular a sensor element, having a stabilized membrane and a method of producing such a component Grant 7,276,277 - Artmann , et al. October 2, 2 | 2007-10-02 |
Sensor with at least one micromechanical structure, and method for producing it Grant 7,273,764 - Reichenbach , et al. September 25, 2 | 2007-09-25 |
Semiconductor component, particularly a micromechanical pressure sensor Grant 7,057,248 - Sautter , et al. June 6, 2 | 2006-06-06 |
Method for producing micromechanic sensors and sensors produced by said method Grant 7,045,382 - Benzel , et al. May 16, 2 | 2006-05-16 |
Flow sensor Grant 7,040,160 - Artmann , et al. May 9, 2 | 2006-05-09 |
Method for production of a semiconductor component and a semiconductor component produced by said method Grant 7,037,438 - Benzel , et al. May 2, 2 | 2006-05-02 |
Method for producing a semiconductor component and a semiconductor component produced according to the method App 20060014392 - Benzel; Hubert ;   et al. | 2006-01-19 |
Semiconductor component having a first earlier structure differing from a second earlier structure Grant 6,972,447 - Benzel , et al. December 6, 2 | 2005-12-06 |
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Micromechanical component having a diaphragm, and method for manufacturing such a component App 20050204821 - Fischer, Frank ;   et al. | 2005-09-22 |
Sensor with at least one micromechanical structure and method for production thereof Grant 6,936,902 - Reichenbach , et al. August 30, 2 | 2005-08-30 |
Micromechanical component Grant 6,906,392 - Benzel , et al. June 14, 2 | 2005-06-14 |
Method for producing a semiconductor component and a semiconductor component, especially a membrane sensor App 20040266050 - Benzel, Hubert ;   et al. | 2004-12-30 |
Micromechanical component with different doping types so that one type is anodized into porous silicon Grant 6,803,637 - Benzel , et al. October 12, 2 | 2004-10-12 |
Structural element having a porous region and its use as well as method for setting the thermal conductivity of a porous region App 20040188808 - Artmann, Hans ;   et al. | 2004-09-30 |
Method for producing optically transparent regions in a silicon substrate App 20040155010 - Benzel, Hubert ;   et al. | 2004-08-12 |
Method for producing micromechanic sensors and sensors produced by said method App 20040152228 - Benzel, Hubert ;   et al. | 2004-08-05 |
Method for producing diaphragm sensor unit and diaphragm sensor unit Grant 6,759,265 - Artmann , et al. July 6, 2 | 2004-07-06 |
Module, especially a wafer module App 20040084398 - Breitschwerdt, Klaus ;   et al. | 2004-05-06 |
Micromechanical component and corresponding production method App 20040080004 - Benzel, Hubert ;   et al. | 2004-04-29 |
Electrochemical etching cell Grant 6,726,815 - Artmann , et al. April 27, 2 | 2004-04-27 |
Flow sensor App 20040069626 - Artmann, Hans ;   et al. | 2004-04-15 |
Sensor with at least one micromechanical structure and method for production thereof App 20040065932 - Reichenbach, Frank ;   et al. | 2004-04-08 |
Semiconductor component and method App 20040048430 - Benzel, Hubert ;   et al. | 2004-03-11 |
Micromechanical component App 20040021184 - Benzel, Hubert ;   et al. | 2004-02-05 |
Method for manufacturing breakaway layers for detaching deposited layer systems Grant 6,677,249 - Laermer , et al. January 13, 2 | 2004-01-13 |
Integrated detonating or firing element, and use thereof App 20030183109 - Rudhard, Joachim ;   et al. | 2003-10-02 |
Semiconductor component, particularly a micromechanical pressure sensor App 20030146447 - Sautter, Helmut ;   et al. | 2003-08-07 |
Method for producing a diaphragm sensor unit and diaphragm sensor unit App 20030127699 - Artmann, Hans ;   et al. | 2003-07-10 |
Micromechanical component and corresponing production method App 20030116813 - Benzel, Hubert ;   et al. | 2003-06-26 |
Method for producing diaphragm sensor unit and diaphragm sensor unit App 20030110867 - Artmann, Hans ;   et al. | 2003-06-19 |
Method for production of a thin film and a thin-film solar cell, in particular, on a carrier substrate Grant 6,555,443 - Artmann , et al. April 29, 2 | 2003-04-29 |
Method for production of a semiconductor component and a semiconductor component produced by said method App 20020170875 - Benzel, Hubert ;   et al. | 2002-11-21 |
Micromechanical component, in particular a sensor element, having a stabilized membrane and a method of producing such a component App 20020094435 - Artmann, Hans ;   et al. | 2002-07-18 |
Method For Manufacturing Breakaway Layers For Detaching Deposited Laye App 20010055881 - LAERMER, FRANZ ;   et al. | 2001-12-27 |