Patent | Date |
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Light modulated electron source Grant 11,417,492 - Garcia Berrios , et al. August 16, 2 | 2022-08-16 |
Light Modulated Electron Source App 20210098222 - Garcia Berrios; Edgardo ;   et al. | 2021-04-01 |
193nm laser and inspection system Grant 10,439,355 - Chuang , et al. O | 2019-10-08 |
183NM laser and inspection system Grant 10,199,149 - Chuang , et al. Fe | 2019-02-05 |
Semiconductor inspection and metrology system using laser pulse multiplier Grant 10,193,293 - Chuang , et al. Ja | 2019-01-29 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier App 20180233872 - Chuang; Yung-Ho ;   et al. | 2018-08-16 |
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms Grant 10,044,164 - Chuang , et al. August 7, 2 | 2018-08-07 |
193nm Laser And Inspection System App 20180191126 - Chuang; Yung-Ho ;   et al. | 2018-07-05 |
Semiconductor inspection and metrology system using laser pulse multiplier Grant 9,972,959 - Chuang , et al. May 15, 2 | 2018-05-15 |
193nm laser and inspection system Grant 9,935,421 - Chuang , et al. April 3, 2 | 2018-04-03 |
183NM Laser And Inspection System App 20170323716 - Chuang; Yung-Ho Alex ;   et al. | 2017-11-09 |
Semiconductor inspection and metrology system using laser pulse multiplier Grant 9,793,673 - Chuang , et al. October 17, 2 | 2017-10-17 |
Semiconductor inspection and metrology system using laser pulse multiplier Grant 9,768,577 - Chuang , et al. September 19, 2 | 2017-09-19 |
High damage threshold frequency conversion system Grant 9,753,352 - Armstrong September 5, 2 | 2017-09-05 |
183NM laser and inspection system Grant 9,748,729 - Chuang , et al. August 29, 2 | 2017-08-29 |
Inspection System Using 193nm Laser App 20170229829 - Chuang; Yung-Ho Alex ;   et al. | 2017-08-10 |
193 nm laser and an inspection system using a 193 nm laser Grant 9,608,399 - Chuang , et al. March 28, 2 | 2017-03-28 |
193nm Laser And Inspection System App 20170063026 - Chuang; Yung-Ho ;   et al. | 2017-03-02 |
193nm laser and inspection system Grant 9,529,182 - Chuang , et al. December 27, 2 | 2016-12-27 |
Laser repetition rate multiplier and flat-top beam profile generators using mirrors and/or prisms Grant 9,525,265 - Chuang , et al. December 20, 2 | 2016-12-20 |
Inspection System Using 193nm Laser App 20160365693 - Chuang; Yung-Ho Alex ;   et al. | 2016-12-15 |
Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generators Using Mirrors And/or Prisms App 20160359292 - Chuang; Yung-Ho Alex ;   et al. | 2016-12-08 |
Low stray light beam dump with fiber delivery Grant 9,477,041 - Armstrong October 25, 2 | 2016-10-25 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier App 20160285223 - Chuang; Yung-Ho ;   et al. | 2016-09-29 |
Laser assembly and inspection system using monolithic bandwidth narrowing apparatus Grant 9,419,407 - Deng , et al. August 16, 2 | 2016-08-16 |
Multi-stage ramp-up annealing for frequency-conversion crystals Grant 9,413,134 - Dribinski , et al. August 9, 2 | 2016-08-09 |
External beam delivery system for laser dark-field illumination in a catadioptric optical system Grant 9,377,610 - Armstrong June 28, 2 | 2016-06-28 |
193nm laser and inspection system Grant 9,318,869 - Chuang , et al. April 19, 2 | 2016-04-19 |
183NM Laser And Inspection System App 20160099540 - Chuang; Yung-Ho Alex ;   et al. | 2016-04-07 |
Laser Assembly And Inspection System Using Monolithic Bandwidth Narrowing Apparatus App 20160094011 - Deng; Yujun ;   et al. | 2016-03-31 |
193nm Laser And An Inspection System Using A 193nm Laser App 20160056606 - Chuang; Yung-Ho ;   et al. | 2016-02-25 |
Laser Repetition Rate Multiplier And Flat-Top Beam Profile Generators Using Mirrors And/Or Prisms App 20150372446 - Chuang; Yung-Ho Alex ;   et al. | 2015-12-24 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier App 20150364895 - Chuang; Yung-Ho Alex ;   et al. | 2015-12-17 |
Reducing the spectral bandwidth of lasers Grant 9,209,589 - Armstrong December 8, 2 | 2015-12-08 |
Multi-Stage Ramp-Up Annealing For Frequency-Conversion Crystals App 20150299893 - Dribinski; Vladimir ;   et al. | 2015-10-22 |
High damage threshold frequency conversion system Grant 9,152,008 - Armstrong October 6, 2 | 2015-10-06 |
Semiconductor inspection and metrology system using laser pulse multiplier Grant 9,151,940 - Chuang , et al. October 6, 2 | 2015-10-06 |
Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal Grant 9,097,683 - Dribinski , et al. August 4, 2 | 2015-08-04 |
193NM Laser And Inspection System App 20150155680 - Chuang; Yung-Ho ;   et al. | 2015-06-04 |
Solid state illumination source and inspection system Grant 9,042,006 - Armstrong May 26, 2 | 2015-05-26 |
Reducing The Spectral Bandwidth Of Lasers App 20150139255 - Armstrong; J. Joseph | 2015-05-21 |
Reducing the spectral bandwidth of lasers Grant 8,964,798 - Armstrong February 24, 2 | 2015-02-24 |
Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal App 20150022805 - Dribinski; Vladimir ;   et al. | 2015-01-22 |
193NM laser and inspection system Grant 8,929,406 - Chuang , et al. January 6, 2 | 2015-01-06 |
External beam delivery system using catadioptric objective with aspheric surfaces Grant 8,896,917 - Armstrong November 25, 2 | 2014-11-25 |
Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal Grant 8,873,596 - Dribinski , et al. October 28, 2 | 2014-10-28 |
Measuring crystal site lifetime in a non-linear optical crystal Grant 8,824,514 - Armstrong September 2, 2 | 2014-09-02 |
193nm Laser And Inspection System App 20140226140 - Chuang; Yung-Ho ;   et al. | 2014-08-14 |
193NM Laser And Inspection System App 20140204963 - Chuang; Yung-Ho ;   et al. | 2014-07-24 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier App 20140153596 - Chuang; Yung-Ho Alex ;   et al. | 2014-06-05 |
High damage threshold frequency conversion system Grant 8,711,470 - Armstrong April 29, 2 | 2014-04-29 |
Dynamic wavefront control of a frequency converted laser system Grant 8,686,331 - Armstrong April 1, 2 | 2014-04-01 |
Catadioptric imaging system for broad band microscopy Grant 8,675,276 - Shafer , et al. March 18, 2 | 2014-03-18 |
Solid State Illumination Source And Inspection System App 20140071520 - Armstrong; J. Joseph | 2014-03-13 |
External beam delivery system for laser dark-field illumination in a catadioptric optical system Grant 8,665,536 - Armstrong March 4, 2 | 2014-03-04 |
Reducing The Spectral Bandwidth Of Lasers App 20140016655 - Armstrong; J. Joseph | 2014-01-16 |
Solid-State Laser And Inspection System Using 193nm Laser App 20130313440 - Chuang; Yung-Ho ;   et al. | 2013-11-28 |
Solid-State Laser And Inspection System Using 193nm Laser App 20130077086 - Chuang; Yung-Ho ;   et al. | 2013-03-28 |
Laser With High Quality, Stable Output Beam, And Long Life High Conversion Efficiency Non-Linear Crystal App 20130021602 - Dribinski; Vladimir ;   et al. | 2013-01-24 |
Semiconductor Inspection And Metrology System Using Laser Pulse Multiplier App 20120314286 - Chuang; Yung-Ho ;   et al. | 2012-12-13 |
Enclosure for controlling the environment of optical crystals Grant 8,298,335 - Armstrong October 30, 2 | 2012-10-30 |
Enclosure for controlling the environment of optical crystals App 20120160856 - Armstrong; J. Joseph | 2012-06-28 |
High Damage Threshold Frequency Conversion System App 20120120481 - Armstrong; J. Joseph | 2012-05-17 |
Measuring Crystal Site Lifetime In A Non-linear Optical Crystal App 20120113995 - Armstrong; J. Joseph | 2012-05-10 |
Dynamic Wavefront Control Of A Frequency Converted Laser System App 20120032065 - Armstrong; J. Joseph | 2012-02-09 |
Low Stray Light Beam Dump With Fiber Delivery App 20120026749 - Armstrong; J. Joseph | 2012-02-02 |
Split field inspection system using small catadioptric objectives Grant 7,957,066 - Armstrong , et al. June 7, 2 | 2011-06-07 |
Fiber amplifier based light source for semiconductor inspection Grant 7,924,892 - Chuang , et al. April 12, 2 | 2011-04-12 |
Inspection system using back side illuminated linear sensor App 20110073982 - Armstrong; J. Joseph ;   et al. | 2011-03-31 |
External beam delivery system using catadioptric objective with aspheric surfaces App 20110075138 - Armstrong; J. Joseph | 2011-03-31 |
Catadioptric microscope objective employing immersion liquid for use in broad band microscopy Grant 7,884,998 - Armstrong February 8, 2 | 2011-02-08 |
Small ultra-high NA catadioptric objective using aspheric surfaces Grant 7,869,121 - Shafer , et al. January 11, 2 | 2011-01-11 |
Beam delivery system for laser dark-field illumination in a catadioptric optical system Grant 7,817,260 - Chuang , et al. October 19, 2 | 2010-10-19 |
External beam delivery system for laser dark-field illumination in a catadioptric optical system App 20100149662 - Armstrong; J. Joseph | 2010-06-17 |
Excimer laser inspection system Grant 7,728,968 - Tsai , et al. June 1, 2 | 2010-06-01 |
High performance catadioptric imaging system Grant 7,679,842 - Shafer , et al. March 16, 2 | 2010-03-16 |
Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth Grant 7,672,043 - Armstrong , et al. March 2, 2 | 2010-03-02 |
Small ultra-high NA catadioptric objective Grant 7,646,533 - Chuang , et al. January 12, 2 | 2010-01-12 |
Inspection system using small catadioptric objective Grant 7,639,419 - Chuang , et al. December 29, 2 | 2009-12-29 |
Catadioptric imaging system employing immersion liquid for use in broad band microscopy Grant 7,633,675 - Armstrong , et al. December 15, 2 | 2009-12-15 |
Non-critical phase matching in CLBO to generate sub-213nm wavelengths Grant 7,627,007 - Armstrong , et al. December 1, 2 | 2009-12-01 |
Reducing variations in energy reflected from a sample due to thin film interference Grant 7,609,373 - Chuang , et al. October 27, 2 | 2009-10-27 |
Split field inspection system using small catadioptric objectives App 20090180176 - Armstrong; J. Joseph ;   et al. | 2009-07-16 |
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system Grant 7,518,789 - Shafer , et al. April 14, 2 | 2009-04-14 |
Broad band objective having improved lateral color performance Grant 7,474,461 - Chuang , et al. January 6, 2 | 2009-01-06 |
System and method for sensing using adjustable modulation transfer function (MTF) with voltage variations relative to depletion depth at a pixel Grant 7,465,913 - Chuang , et al. December 16, 2 | 2008-12-16 |
High NA system for multiple mode imaging Grant 7,457,034 - Chuang , et al. November 25, 2 | 2008-11-25 |
Peak power and speckle contrast reduction for a single layer pulse Grant 7,449,673 - Chuang , et al. November 11, 2 | 2008-11-11 |
Catadioptric microscope objective employing immersion liquid for use in broad band microscopy App 20080247036 - Armstrong; J. Joseph | 2008-10-09 |
Catadioptric imaging system employing immersion liquid for use in broad band microscopy App 20080247035 - Armstrong; J. Joseph ;   et al. | 2008-10-09 |
Beam delivery system for laser dark-field illumination in a catadioptric optical system App 20080225282 - Chuang; Yung-Ho ;   et al. | 2008-09-18 |
Beam delivery system for laser dark-field illumination in a catadioptric optical system Grant 7,345,825 - Chuang , et al. March 18, 2 | 2008-03-18 |
Catadioptric imaging system employing immersion liquid for use in broad band microscopy Grant 7,307,783 - Armstrong , et al. December 11, 2 | 2007-12-11 |
Broad band objective having improved lateral color performance App 20070258154 - Chuang; Yung-Ho ;   et al. | 2007-11-08 |
Broad band objective having improved lateral color performance Grant 7,245,438 - Chuang , et al. July 17, 2 | 2007-07-17 |
Peak power and speckle contrast reduction for a single layer pulse App 20070153393 - Chuang; Yung-Ho ;   et al. | 2007-07-05 |
Excimer laser inspection system App 20070121107 - Tsai; Bin-Ming Benjamin ;   et al. | 2007-05-31 |
Peak power and speckle contrast reduction for a single layer pulse Grant 7,187,500 - Chuang , et al. March 6, 2 | 2007-03-06 |
High performance catadioptric imaging system Grant 7,180,658 - Shafer , et al. February 20, 2 | 2007-02-20 |
High performance catadioptric imaging system App 20070024961 - Shafer; David R. ;   et al. | 2007-02-01 |
Beam delivery system for laser dark-field illumination in a catadioptric optical system App 20070002465 - Chuang; Yung-Ho ;   et al. | 2007-01-04 |
High NA system for multiple mode imaging App 20060279837 - Chuang; Yung-ho ;   et al. | 2006-12-14 |
Reducing variations in energy reflected from a sample due to thin film interference App 20060268265 - Chuang; Yung-Ho ;   et al. | 2006-11-30 |
System and method for sensing using adjustable modulation transfer function (MTF) App 20060266926 - Chuang; Yung-Ho ;   et al. | 2006-11-30 |
Broad band objective having improved lateral color performance App 20060262418 - Chuang; Yung-Ho ;   et al. | 2006-11-23 |
Excimer laser inspection system Grant 7,136,159 - Tsai , et al. November 14, 2 | 2006-11-14 |
Small ultra-high NA catadioptric objective using aspheric surfaces App 20060238856 - Shafer; David R. ;   et al. | 2006-10-26 |
System and method for sensing using adjustable modulation transfer function (MTF) Grant 7,126,100 - Chuang , et al. October 24, 2 | 2006-10-24 |
Small ultra-high NA catadioptric objective App 20060158720 - Chuang; Yung-Ho ;   et al. | 2006-07-20 |
High NA system for multiple mode imaging Grant 7,035,001 - Chuang , et al. April 25, 2 | 2006-04-25 |
Fiber amplifier based light source for semiconductor inspection App 20060045163 - Chuang; Yung-Ho ;   et al. | 2006-03-02 |
Catadioptric imaging system exhibiting enhanced deep ultraviolet spectral bandwidth App 20050259318 - Armstrong, J. Joseph ;   et al. | 2005-11-24 |
Catadioptric imaging system employing immersion liquid for use in broad band microscopy App 20050152027 - Armstrong, J. Joseph ;   et al. | 2005-07-14 |
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system App 20050111081 - Shafer, David R. ;   et al. | 2005-05-26 |
Catadioptric imaging system for broad band microscopy App 20040240047 - Shafer, David R. ;   et al. | 2004-12-02 |
Inspection system using small catadioptric objective App 20040218262 - Chuang, Yung-Ho ;   et al. | 2004-11-04 |
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system Grant 6,801,358 - Shafer , et al. October 5, 2 | 2004-10-05 |
High performance catadioptric imaging system App 20040165257 - Shafer, David R. ;   et al. | 2004-08-26 |
Peak power and speckle contrast reduction for a single layer pulse App 20040165621 - Chuang, Yung-Ho ;   et al. | 2004-08-26 |
Excimer laser inspection system App 20040095573 - Tsai, Bin-Ming Benjamin ;   et al. | 2004-05-20 |
Peak power and speckle contrast reduction for a single laser pulse Grant 6,693,930 - Chuang , et al. February 17, 2 | 2004-02-17 |
High NA system for multiple mode imaging App 20030197923 - Chuang, Yung-Ho ;   et al. | 2003-10-23 |
Broad band deep ultraviolet/vacuum ultraviolet catadioptric imaging system App 20030147128 - Shafer, David R. ;   et al. | 2003-08-07 |
Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system Grant 6,512,631 - Shafer , et al. January 28, 2 | 2003-01-28 |
High NA system for multiple mode imaging App 20030002147 - Chuang, Yung-Ho ;   et al. | 2003-01-02 |
Broad Band Deep Ultraviolet/vacuum Ultraviolet Catadioptric Imaging System App 20010040722 - SHAFER, DAVID R. ;   et al. | 2001-11-15 |
System and method for analyzing topological features on a surface Grant 6,137,570 - Chuang , et al. October 24, 2 | 2000-10-24 |
High NA system for multiple mode imaging Grant 6,064,517 - Chuang , et al. May 16, 2 | 2000-05-16 |