loadpatents
Patent applications and USPTO patent grants for Armour; Eric A..The latest application filed is for "alkyl push flow for vertical flow rotating disk reactors".
Patent | Date |
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Alkyl push flow for vertical flow rotating disk reactors Grant 10,364,509 - Murphy , et al. | 2019-07-30 |
Wafer processing with carrier extension Grant 10,167,554 - Mitrovic , et al. J | 2019-01-01 |
Alkyl Push Flow For Vertical Flow Rotating Disk Reactors App 20180237943 - Murphy; Michael ;   et al. | 2018-08-23 |
Wafer Processing With Carrier Extension App 20180230596 - Mitrovic; Bojan ;   et al. | 2018-08-16 |
Density-matching alkyl push flow for vertical flow rotating disk reactors Grant 9,982,362 - Mitrovic , et al. May 29, 2 | 2018-05-29 |
Methods of wafer processing with carrier extension Grant 9,938,621 - Mitrovic , et al. April 10, 2 | 2018-04-10 |
Heated wafer carrier profiling Grant 9,653,340 - Boguslavskiy , et al. May 16, 2 | 2017-05-16 |
Alkyl push flow for vertical flow rotating disk reactors Grant 9,593,434 - Murphy , et al. March 14, 2 | 2017-03-14 |
Wafer Processing With Carrier Extension App 20160251758 - Mitrovic; Bojan ;   et al. | 2016-09-01 |
Gas Injection System For Chemical Vapor Deposition Using Sequenced Valves App 20160168710 - Quinn; William E. ;   et al. | 2016-06-16 |
Linear Cluster Deposition System App 20160160387 - Quinn; William E. ;   et al. | 2016-06-09 |
Gas injection system for chemical vapor deposition using sequenced valves Grant 9,303,319 - Quinn , et al. April 5, 2 | 2016-04-05 |
Gas treatment systems Grant 9,273,395 - Mitrovic , et al. March 1, 2 | 2016-03-01 |
Density-matching Alkyl Push Flow For Vertical Flow Rotating Disk Reactors App 20150225875 - Mitrovic; Bojan ;   et al. | 2015-08-13 |
Density-matching alkyl push flow for vertical flow rotating disk reactors Grant 8,980,000 - Mitrovic , et al. March 17, 2 | 2015-03-17 |
Heated wafer carrier profiling Grant 8,958,061 - Boguslavskiy , et al. February 17, 2 | 2015-02-17 |
Chemical Vapor Deposition With Energy Input App 20140318453 - Mangum; Joshua ;   et al. | 2014-10-30 |
Chemical vapor deposition with energy input Grant 8,815,709 - Mangum , et al. August 26, 2 | 2014-08-26 |
Alkyl Push Flow For Vertical Flow Rotating Disk Reactors App 20140224178 - Murphy; Michael ;   et al. | 2014-08-14 |
System and method for varying wafer surface temperature via wafer-carrier temperature offset Grant 8,603,248 - Gurary , et al. December 10, 2 | 2013-12-10 |
Apparatus and method for batch non-contact material characterization Grant 8,441,653 - Lee , et al. May 14, 2 | 2013-05-14 |
Wafer Carrier With Thermal Features App 20130065403 - Paranjpe; Ajit ;   et al. | 2013-03-14 |
Heated Wafer Carrier Profiling App 20120304926 - Boguslavskiy; Vadim ;   et al. | 2012-12-06 |
Heated Wafer Carrier Profiling App 20120307233 - Boguslavskiy; Vadim ;   et al. | 2012-12-06 |
Gas treatment systems Grant 8,287,646 - Mitrovic , et al. October 16, 2 | 2012-10-16 |
Apparatus and Method for Batch Non-Contact Material Characterization App 20120248336 - Lee; Dong Seung ;   et al. | 2012-10-04 |
Wafer Processing With Carrier Extension App 20120171870 - Mitrovic; Bojan ;   et al. | 2012-07-05 |
Gas Injection System for Chemical Vapor Deposition Using Sequenced Valves App 20120156363 - Quinn; William E. ;   et al. | 2012-06-21 |
Apparatus and method for batch non-contact material characterization Grant 8,198,605 - Lee , et al. June 12, 2 | 2012-06-12 |
Gas treatment systems Grant 8,152,923 - Mitrovic , et al. April 10, 2 | 2012-04-10 |
Heater With Liquid Heating Element App 20120073502 - Volf; Boris ;   et al. | 2012-03-29 |
Movable Injectors In Rotating Disc Gas Reactors App 20120070916 - Sferlazzo; Piero ;   et al. | 2012-03-22 |
Linear Cluster Deposition System App 20120058630 - Quinn; William E. ;   et al. | 2012-03-08 |
Movable injectors in rotating disc gas reactors Grant 8,092,599 - Sferlazzo , et al. January 10, 2 | 2012-01-10 |
Apparatus And Method For Batch Non-contact Material Characterization App 20110297076 - Lee; Dong Seung ;   et al. | 2011-12-08 |
Apparatus And Method For Batch Non-contact Material Characterization App 20110300645 - Lee; Dong Seung ;   et al. | 2011-12-08 |
Multi-Chamber CVD Processing System App 20110290175 - Paranjpe; Ajit ;   et al. | 2011-12-01 |
Apparatus and method for batch non-contact material characterization Grant 8,022,372 - Lee , et al. September 20, 2 | 2011-09-20 |
Vapor Phase Epitaxy System App 20110174213 - Mangum; Joshua ;   et al. | 2011-07-21 |
Wafer Carrier With Hub App 20110114022 - Boguslavskiy; Vadim ;   et al. | 2011-05-19 |
Gas Treatment Systems App 20110088623 - Mitrovic; Bojan ;   et al. | 2011-04-21 |
Gas Treatment Systems App 20110091648 - Mitrovic; Bojan ;   et al. | 2011-04-21 |
Roll-to-Roll Chemical Vapor Deposition System App 20100310766 - Armour; Eric A. ;   et al. | 2010-12-09 |
Multi-gas Distribution Injector For Chemical Vapor Deposition Reactors App 20100300359 - Armour; Eric A. ;   et al. | 2010-12-02 |
Chemical vapor deposition with energy input App 20100087050 - Armour; Eric A. ;   et al. | 2010-04-08 |
Wafer Carrier With Varying Thermal Resistance App 20100055318 - Volf; Boris ;   et al. | 2010-03-04 |
Apparatus and Method for Batch Non-Contact Material Characterization App 20090224175 - Lee; Dong Seung ;   et al. | 2009-09-10 |
Movable injectors in rotating disc gas reactors App 20090017190 - Sferlazzo; Piero ;   et al. | 2009-01-15 |
Gas treatment systems App 20080173735 - Mitrovic; Bojan ;   et al. | 2008-07-24 |
System and method for varying wafer surface temperature via wafer-carrier temperature offset App 20070186853 - Gurary; Alex ;   et al. | 2007-08-16 |
Density-matching alkyl push flow for vertical flow rotating disk reactors App 20070134419 - Mitrovic; Bojan ;   et al. | 2007-06-14 |
Alkyl push flow for vertical flow rotating disk reactors App 20070071896 - Murphy; Michael ;   et al. | 2007-03-29 |
Multi-gas distribution injector for chemical vapor deposition reactors App 20060021574 - Armour; Eric A. ;   et al. | 2006-02-02 |
Wafer carriers for epitaxial growth processes Grant 6,001,183 - Gurary , et al. December 14, 1 | 1999-12-14 |
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