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System and method for monitoring sensor linearity as part of a production process
Grant 11,378,426 - Schulze , et al. July 5, 2 | 2022-07-05 |
Anomaly Detection From Aggregate Statistics Using Neural Networks
App 20220019863 - Iskandar; Jimmy ; et al. | 2022-01-20 |
Semiconductor device search and classification
Grant 10,901,407 - Iskandar , et al. January 26, 2 | 2021-01-26 |
Process kit erosion and service life prediction
Grant 10,770,321 - Chiang , et al. Sep | 2020-09-08 |
Method and system for balancing the electrostatic chucking force on a substrate
Grant 10,541,169 - Jiang , et al. Ja | 2020-01-21 |
Topography prediction using system state information
Grant 10,303,812 - Iskandar , et al. | 2019-05-28 |
Process Kit Erosion And Service Life Prediction
App 20190148194 - CHIANG; Kang-Lie ; et al. | 2019-05-16 |
Process kit erosion and service life prediction
Grant 10,177,018 - Chiang , et al. J | 2019-01-08 |
Method And System For Balancing The Electrostatic Chucking Force On A Substrate
App 20180330977 - JIANG; Chong ; et al. | 2018-11-15 |
Process Kit Erosion And Service Life Prediction
App 20180047599 - CHIANG; Kang-Lie ; et al. | 2018-02-15 |
Semiconductor Device Search And Classification
App 20170343999 - ISKANDAR; Jimmy ; et al. | 2017-11-30 |
Topography Prediction Using System State Information
App 20170045573 - ISKANDAR; Jimmy ; et al. | 2017-02-16 |
System And Method For Monitoring Sensor Linearity As Part Of A Production Process
App 20150369640 - SCHULZE; BRADLEY D. ; et al. | 2015-12-24 |
Rotational Absorption Spectra For Semiconductor Manufacturing Process Monitoring And Control
App 20130309785 - SUI; ZHIFENG ; et al. | 2013-11-21 |
Method for fabricating interconnect structures for semiconductor devices
Grant 8,143,138 - Patz , et al. March 27, 2 | 2012-03-27 |
Methods For Etching Silicon-based Antireflective Layers
App 20110253670 - ZHOU; YIFENG ; et al. | 2011-10-20 |
Apparatus And Method For Low-k Dielectric Repair
App 20110151590 - Carducci; James D. ; et al. | 2011-06-23 |
Plasma for resist removal and facet control of underlying features
Grant 7,758,763 - Zhou , et al. July 20, 2 | 2010-07-20 |
Method For Fabricating Interconnect Structures For Semiconductor Devices
App 20100078825 - Patz; Ryan James ; et al. | 2010-04-01 |
Method Of Photoresist Removal In The Presence Of A Low-k Dielectric Layer
App 20100043821 - Li; Siyi ; et al. | 2010-02-25 |
Method For Plasma Etching Porous Low-k Dielectric Layers
App 20100022091 - LI; SIYI ; et al. | 2010-01-28 |
Method For Critical Dimension Shrink Using Conformal Pecvd Films
App 20090286402 - Xia; Li-Qun ; et al. | 2009-11-19 |
Etch depth control for dual damascene fabrication process
Grant 7,572,734 - Naik , et al. August 11, 2 | 2009-08-11 |
Method For Integrating Porous Low-k Dielectric Layers
App 20090140418 - LI; SIYI ; et al. | 2009-06-04 |
Etch Depth Control For Dual Damascene Fabrication Process
App 20080102638 - NAIK; MEHUL ; et al. | 2008-05-01 |
Plasma For Resist Removal And Facet Control Of Underlying Features
App 20080102645 - Zhou; Yifeng ; et al. | 2008-05-01 |
Method of forming a dual damascene structure utilizing a three layer hard mask structure
Grant 7,226,853 - Bekiaris , et al. June 5, 2 | 2007-06-05 |
Integrated equipment set for forming a low K dielectric interconnect on a substrate
App 20060246683 - Pan; Judon Tony ; et al. | 2006-11-02 |
Dielectric materials to prevent photoresist poisoning
Grant 7,115,534 - Nguyen , et al. October 3, 2 | 2006-10-03 |
Dielectric materials to prevent photoresist poisoning
App 20050014361 - Nguyen, Son Van ; et al. | 2005-01-20 |
Monitoring dimensions of features at different locations in the processing of substrates
Grant 6,829,056 - Barnes , et al. December 7, 2 | 2004-12-07 |
Integrated equipment set for forming a low K dielectric interconnect on a substrate
App 20040206621 - Li, Hongwen ; et al. | 2004-10-21 |
Airgap for semiconductor devices
Grant 6,780,753 - Latchford , et al. August 24, 2 | 2004-08-24 |
Metal-insulator-metal capacitor in copper
Grant 6,750,113 - Armacost , et al. June 15, 2 | 2004-06-15 |
Fine-pitch device lithography using a sacrificial hardmask
Grant 6,734,096 - Dalton , et al. May 11, 2 | 2004-05-11 |
Integrated equipment set for forming a low K dielectric interconnect on a substrate
App 20040007325 - Pan, Judon Tony ; et al. | 2004-01-15 |
Airgap For Semiconductor Devices
App 20030224591 - Latchford, Ian S. ; et al. | 2003-12-04 |
Selective nitride: oxide anisotropic etch process
Grant 6,656,375 - Armacost , et al. December 2, 2 | 2003-12-02 |
Fine-pitch device lithography using a sacrificial hardmask
App 20030134505 - Dalton, Timothy J. ; et al. | 2003-07-17 |
Method of forming a dual damascene structure
App 20030119307 - Bekiaris, Nikolaos ; et al. | 2003-06-26 |
High performance, low power vertical integrated CMOS devices
Grant 6,518,112 - Armacost , et al. February 11, 2 | 2003-02-11 |
Method of making silicon article having columns
Grant 6,489,005 - Armacost , et al. December 3, 2 | 2002-12-03 |
Metal-insulator-metal capacitor in copper
App 20020094656 - Armacost, Michael D. ; et al. | 2002-07-18 |
High performance, low power vertical integrated CMOS devices
App 20020008280 - Armacost, Michael D. ; et al. | 2002-01-24 |
High performance, low power vertical integrated CMOS devices
Grant 6,297,531 - Armacost , et al. October 2, 2 | 2001-10-02 |
High Performance, Low Power Vertical Integrated Cmos Devices
App 20010002715 - ARMACOST, MICHAEL D. ; et al. | 2001-06-07 |
Silicon article having columns and method of making
Grant 6,187,412 - Armacost , et al. February 13, 2 | 2001-02-13 |
Process of etching an oxide layer
Grant 5,811,357 - Armacost , et al. September 22, 1 | 1998-09-22 |
Method of making a disposable corner etch stop-spacer for borderless contacts
Grant 5,759,867 - Armacost , et al. June 2, 1 | 1998-06-02 |
Selective deposition process
Grant 5,618,379 - Armacost , et al. April 8, 1 | 1997-04-08 |
Plug strap process utilizing selective nitride and oxide etches
Grant 5,545,581 - Armacost , et al. August 13, 1 | 1996-08-13 |
Corner protected shallow trench isolation device
Grant 5,521,422 - Mandelman , et al. May 28, 1 | 1996-05-28 |
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