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Patent applications and USPTO patent grants for Arita; Takehiko.The latest application filed is for "temperature control medium processing apparatus and temperature control medium processing method".
Patent | Date |
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Processing apparatus for processing target object Grant 11,404,251 - Yamaguchi , et al. August 2, 2 | 2022-08-02 |
Temperature control system including multiple valves and temperature control method Grant 11,237,577 - Kobayashi , et al. February 1, 2 | 2022-02-01 |
Temperature Control Medium Processing Apparatus And Temperature Control Medium Processing Method App 20210270508 - Sakai; Hayato ;   et al. | 2021-09-02 |
Valve Device App 20210262583 - Kobayashi; Kei ;   et al. | 2021-08-26 |
Substrate Processing Apparatus And Substrate Processing Method App 20210257235 - Kaneko; Haruka ;   et al. | 2021-08-19 |
Cooling system Grant 10,907,864 - Arita February 2, 2 | 2021-02-02 |
Control Method Of Heat Medium And Heat Medium Control Apparatus App 20200243353 - Kobayashi; Kei ;   et al. | 2020-07-30 |
Temperature Control System And Temperature Control Method App 20200117223 - KOBAYASHI; Kei ;   et al. | 2020-04-16 |
Flow Rate Control Method, Temperature Control Method, And Processing Apparatus App 20190310034 - KOBAYASHI; Kei ;   et al. | 2019-10-10 |
Cooling System App 20190301812 - Arita; Takehiko | 2019-10-03 |
Processing Apparatus For Processing Target Object App 20180218886 - Yamaguchi; Shin ;   et al. | 2018-08-02 |
Processing Apparatus For Processing Target Object App 20180218887 - Arita; Takehiko ;   et al. | 2018-08-02 |
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