Ariens; Andreas B. G.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ariens; Andreas B. G..The latest application filed is for "position measuring device, position measuring system, lithographic apparatus, and device manufacturing method".
- Ariens; Andreas B. G. - Utrecht NL
| Patent | Date |
|---|---|
| Object positioning method for a lithographic projection apparatus Grant 7,397,940 - Willems van Dijk , et al. July 8, 2 | 2008-07-08 |
| Position measuring system for use in lithographic apparatus Grant 6,894,261 - Castenmiller , et al. May 17, 2 | 2005-05-17 |
| Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method Grant 6,875,992 - Castenmiller , et al. April 5, 2 | 2005-04-05 |
| Position measuring device, position measuring system, lithographic apparatus, and device manufacturing method App 20040211921 - Castenmiller, Thomas J.M. ; et al. | 2004-10-28 |
| Object positioning method for a lithographic projection apparatus App 20010014170 - Willems van Dijk, Marcus J.H. ; et al. | 2001-08-16 |
| Position detection system for use in lithographic apparatus App 20010011712 - Castenmiller, Thomas J.M. ; et al. | 2001-08-09 |
| Crash prevention in positioning apparatus for use in lithographic projection apparatus App 20010004105 - Kwan, Yim Bun P. ; et al. | 2001-06-21 |
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