Patent | Date |
---|
Wavelength variable interference filter having substrate hydroxyl group concentration, electronic component, manufacturing method of electronic component, and electronic apparatus Grant 11,042,023 - Arakawa , et al. June 22, 2 | 2021-06-22 |
Wavelength Variable Interference Filter, Electronic Component, Manufacturing Method Of Electronic Component, And Electronic Apparatus App 20170199372 - ARAKAWA; Katsuji ;   et al. | 2017-07-13 |
Wavelength variable interference filter, manufacturing method of wavelength variable interference filter, optical filter device, optical module, and electronic apparatus Grant 9,372,337 - Arakawa June 21, 2 | 2016-06-21 |
Variable wavelength interference filter, optical module, optical analysis device, and method for manufacturing variable wavelength interference filter Grant 9,170,418 - Arakawa , et al. October 27, 2 | 2015-10-27 |
Interference Filter, Interference Filter Manufacturing Method, Optical Module, Electronic Apparatus, And Bonded Substrate App 20140268344 - ARAKAWA; Katsuji | 2014-09-18 |
Wavelength Variable Interference Filter, Manufacturing Method Of Wavelength Variable Interference Filter, Optical Filter Device, Optical Module, And Electronic Apparatus App 20140168775 - Arakawa; Katsuji | 2014-06-19 |
Nozzle plate, discharge head, method for producing the nozzle plate, method for producing the discharge head, and discharge device Grant 8,746,846 - Arakawa June 10, 2 | 2014-06-10 |
Nozzle plate, droplet discharge head, method for manufacturing the same and droplet discharge device Grant 8,485,640 - Oya , et al. July 16, 2 | 2013-07-16 |
Variable Wavelength Interference Filter, Optical Module, Optical Analysis Device, And Method For Manufacturing Variable Wavelength Interference Filter App 20130038876 - ARAKAWA; Katsuji ;   et al. | 2013-02-14 |
Nozzle Plate, Discharge Head, Method For Producing The Nozzle Plate, Method For Producing The Discharge Head, And Discharge Device App 20110134188 - ARAKAWA; Katsuji | 2011-06-09 |
Droplet discharging head, droplet discharging apparatus, method for manufacturing droplet discharging head and method for manufacturing droplet discharging apparatus Grant 7,637,601 - Oya , et al. December 29, 2 | 2009-12-29 |
Electrostatic actuator, droplet discharge head and method for manufacturing the droplet discharge head, droplet discharge apparatus, and device Grant 7,581,824 - Fujii , et al. September 1, 2 | 2009-09-01 |
Method for manufacturing a droplet ejection head Grant 7,536,785 - Arakawa , et al. May 26, 2 | 2009-05-26 |
Nozzle Plate, Droplet Discharge Head, Method For Manufacturing The Same And Droplet Discharge Device App 20080309718 - Oya; Kazufumi ;   et al. | 2008-12-18 |
Droplet Discharging Head, Droplet Discharging Apparatus, Method For Manufacturing Droplet Discharging Head And Method For Manufacturing Droplet Discharging Apparatus App 20080043068 - OYA; Kazufumi ;   et al. | 2008-02-21 |
Method of manufacturing a nozzle plate Grant 7,306,744 - Matsuo , et al. December 11, 2 | 2007-12-11 |
Method for producing nozzle substrate, method for producing droplet-discharging head, head for discharging droplets, and apparatus for discharging droplets App 20070200877 - Arakawa; Katsuji | 2007-08-30 |
Method for surface treatment Grant 7,147,795 - Koeda , et al. December 12, 2 | 2006-12-12 |
Electrostatic actuator, liquid-jet head, liquid-jet apparatus, device including electrostatic actuator, method for manufacturing liquid-jet head App 20060232655 - Fujii; Masahiro ;   et al. | 2006-10-19 |
Electrostatic actuator, droplet discharge head and method for manufacturing the droplet discharge head, droplet discharge apparatus, and device App 20060125879 - Fujii; Masahiro ;   et al. | 2006-06-15 |
Method for manufacturing droplet ejection head, droplet ejection head, and droplet ejection apparatus App 20060118512 - Arakawa; Katsuji ;   et al. | 2006-06-08 |
Heat-generating element, heat-generating substrates, heat-generating substrate manufacturing method, microswitch, and flow sensor Grant 6,989,513 - Arakawa , et al. January 24, 2 | 2006-01-24 |
Method of manufacturing a nozzle plate App 20050269289 - Matsuo, Yoshihide ;   et al. | 2005-12-08 |
Surface treatment apparatus App 20050115679 - Kurosawa, Ryuichi ;   et al. | 2005-06-02 |
Method for surface treatment App 20050095811 - Koeda, Hiroshi ;   et al. | 2005-05-05 |
Heat-generating element, heat-generating substrates, heat-generating substrate manufacturing method, microswitch, and flow sensor App 20040256376 - Arakawa, Katsuji ;   et al. | 2004-12-23 |
Semiconductor chip, semiconductor device, circuit board and electronic equipment and production methods for them Grant 6,677,237 - Umetsu , et al. January 13, 2 | 2004-01-13 |
Method for machining work by laser beam Grant 6,563,079 - Umetsu , et al. May 13, 2 | 2003-05-13 |
Semiconductor chip, semiconductor device, circuit board and electronic equipment and production methods for them App 20020151169 - Umetsu, Kazushige ;   et al. | 2002-10-17 |