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Patent applications and USPTO patent grants for Arai, Hatsuyuki.The latest application filed is for "reinforced cmp carrier bladders".
Patent | Date |
---|---|
Reinforced CMP carrier bladders App 20020077049 - Fruitman, Clinton O. ;   et al. | 2002-06-20 |
Carrier and polishing apparatus Grant 6,110,026 - Arai August 29, 2 | 2000-08-29 |
Surface polishing pad Grant 6,089,966 - Arai , et al. July 18, 2 | 2000-07-18 |
Polishing apparatus Grant 6,074,277 - Arai June 13, 2 | 2000-06-13 |
Workpiece surface processing apparatus Grant 6,068,545 - Arai May 30, 2 | 2000-05-30 |
Planarization method, workpiece measuring method, and surface planarization apparatus having a measuring device Grant 6,066,230 - Arai May 23, 2 | 2000-05-23 |
Carrier and CMP apparatus Grant 6,012,964 - Arai , et al. January 11, 2 | 2000-01-11 |
Polishing control method Grant 5,685,766 - Mattingly , et al. November 11, 1 | 1997-11-11 |
Flattening method and flattening apparatus of a semiconductor device Grant 5,605,499 - Sugiyama , et al. February 25, 1 | 1997-02-25 |
Flat lapping machine with sizing mechanism Grant 5,099,614 - Arai , et al. March 31, 1 | 1992-03-31 |
Flat lapping machine Grant 4,805,348 - Arai , et al. February 21, 1 | 1989-02-21 |
Upper plate driving system for surface lapping machine Grant 4,707,945 - Arai November 24, 1 | 1987-11-24 |
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