loadpatents
Patent applications and USPTO patent grants for Arahori; Tadahisa.The latest application filed is for "sputtering target and method for producing the same".
Patent | Date |
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Sputtering target and method for producing the same Grant 10,504,706 - Okamoto , et al. Dec | 2019-12-10 |
Sputtering target and method for producing the same Grant 9,824,868 - Okamoto , et al. November 21, 2 | 2017-11-21 |
Sputtering Target And Method For Producing The Same App 20150122642 - Okamoto; Ken ;   et al. | 2015-05-07 |
Sputtering Target And Method For Producing The Same App 20140318956 - Okamoto; Ken ;   et al. | 2014-10-30 |
Surface-treated ceramic member, method for producing the same and vacuum processing apparatus Grant 8,231,967 - Nakano , et al. July 31, 2 | 2012-07-31 |
Yttria sintered body and component used for plasma processing apparatus Grant 8,158,544 - Okamoto , et al. April 17, 2 | 2012-04-17 |
Surface-treated Ceramic Member, Method For Producing The Same And Vacuum Processing Apparatus App 20110151237 - NAKANO; Katsuaki ;   et al. | 2011-06-23 |
Yttria Sintered Body And Component Used For Plasma Processing Apparatus App 20110129684 - Okamoto; Ken ;   et al. | 2011-06-02 |
Machinable ceramic Grant 7,160,825 - Etoh , et al. January 9, 2 | 2007-01-09 |
Low thermal expansion ceramic and member for exposure system Grant 7,112,549 - Yoshitomi , et al. September 26, 2 | 2006-09-26 |
Machinable ceramic App 20050130829 - Etoh, Shunichi ;   et al. | 2005-06-16 |
Low thermal expansion ceramic and member for exposure system App 20030100434 - Yoshitomi, Yasuki ;   et al. | 2003-05-29 |
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