| Patent | Date |
|---|
Epitaxy metrology in fin field effect transistors
Grant 11,455,715 - Chaudhary , et al. September 27, 2 | 2022-09-27 |
Detecting Defects In Semiconductor Specimens Using Weak Labeling
App 20220301151 - PELEG; Irad ; et al. | 2022-09-22 |
Image Generation For Examination Of A Semiconductor Specimen
App 20220301196 - ULIEL; David ; et al. | 2022-09-22 |
Generating training data usable for examination of a semiconductor specimen
Grant 11,449,977 - Steiman , et al. September 20, 2 | 2022-09-20 |
Method and system for obtaining information from a sample
Grant 11,448,601 - Golberg , et al. September 20, 2 | 2022-09-20 |
Machine learning-based defect detection of a specimen
Grant 11,449,711 - Badanes , et al. September 20, 2 | 2022-09-20 |
Measuring a pattern
Grant 11,449,979 - Kaplan , et al. September 20, 2 | 2022-09-20 |
Method Of Examining Specimens And System Thereof
App 20220291138 - Sofer; Yotam ; et al. | 2022-09-15 |
Optical Metrology Models For In-line Film Thickness Measurements
App 20220290974 - Ng; Eric Chin Hong ; et al. | 2022-09-15 |
Milling a multi-layered object
Grant 11,440,151 - Zur September 13, 2 | 2022-09-13 |
Generating a metrology recipe usable for examination of a semiconductor specimen
Grant 11,443,420 - Kris , et al. September 13, 2 | 2022-09-13 |
Resource verification for an application
Grant 11,429,516 - Levi , et al. August 30, 2 | 2022-08-30 |
Determination of defect location for examination of a specimen
Grant 11,423,529 - Girmonsky , et al. August 23, 2 | 2022-08-23 |
Epitaxy Metrology In Fin Field Effect Transistors
App 20220261979 - CHAUDHARY; Jitendra Pradipkumar ; et al. | 2022-08-18 |
Mask Inspection Of A Semiconductor Specimen
App 20220254000 - SHKALIM; Ariel ; et al. | 2022-08-11 |
High-resolution X-ray Spectroscopy Surface Material Analysis
App 20220254598 - Zur; Yehuda | 2022-08-11 |
High-resolution x-ray spectroscopy surface material analysis
Grant 11,404,244 - Zur August 2, 2 | 2022-08-02 |
Methods And Systems For Analysis Of Wafer Scan Data
App 20220237758 - SHWARTZ; Guy ; et al. | 2022-07-28 |
Machine Learning-based Classification Of Defects In A Semiconductor Specimen
App 20220222806 - SHAUBI; Ohad ; et al. | 2022-07-14 |
Determination Of Defects And/or Edge Roughness In A Specimen Based On A Reference Image
App 20220222797 - ELKAYAM; Shalom ; et al. | 2022-07-14 |
Detecting defects in a semiconductor specimen
Grant 11,386,539 - Cohen , et al. July 12, 2 | 2022-07-12 |
System and method for defect detection using multi-spot scanning
Grant 11,385,188 - Shoham , et al. July 12, 2 | 2022-07-12 |
Method for focusing an electron beam on a wafer having a transparent substrate
Grant 11,378,531 - Bader , et al. July 5, 2 | 2022-07-05 |
Detecting defects in semiconductor specimens using weak labeling
Grant 11,379,972 - Peleg , et al. July 5, 2 | 2022-07-05 |
Generating A Metrology Recipe Usable For Examination Of A Semiconductor Specimen
App 20220207681 - KRIS; Roman ; et al. | 2022-06-30 |
Automatic Optimization Of An Examination Recipe
App 20220205928 - BAR; Amir | 2022-06-30 |
Inspection Of A Semiconductor Specimen
App 20220207682 - KORONEL; Dan ; et al. | 2022-06-30 |
Prediction Of Electrical Properties Of A Semiconductor Specimen
App 20220210525 - ADAN; Ofer | 2022-06-30 |
Reactive Particles Supply System
App 20220199370 - Gutman; Asaf ; et al. | 2022-06-23 |
Determining A Critical Dimension Variation Of A Pattern
App 20220198639 - Vereschagin; Vadim ; et al. | 2022-06-23 |
Detecting backscattered electrons in a multibeam charged particle column
Grant 11,366,072 - Levin , et al. June 21, 2 | 2022-06-21 |
Selecting a coreset of potential defects for estimating expected defects of interest
Grant 11,360,030 - Sofer , et al. June 14, 2 | 2022-06-14 |
Evaluating A Contact Between A Wafer And An Electrostatic Chuck
App 20220181115 - Faust; Adam ; et al. | 2022-06-09 |
Sensor for electron detection
Grant 11,355,309 - Assulin , et al. June 7, 2 | 2022-06-07 |
Method of deep learning-based examination of a semiconductor specimen and system thereof
Grant 11,348,001 - Karlinsky , et al. May 31, 2 | 2022-05-31 |
Mask inspection of a semiconductor specimen
Grant 11,348,224 - Shkalim , et al. May 31, 2 | 2022-05-31 |
Sensing Unit Having Photon To Electron Converter And A Method
App 20220136894 - Margulis; Pavel | 2022-05-05 |
Determining three dimensional information
Grant 11,321,835 - Levant , et al. May 3, 2 | 2022-05-03 |
Method of classifying defects in a specimen semiconductor examination and system thereof
Grant 11,321,633 - Asbag , et al. May 3, 2 | 2022-05-03 |
Segmenting An Image Using A Neural Network
App 20220129708 - Gamzo; Elran ; et al. | 2022-04-28 |
Adaptive geometry for optimal focused ion beam etching
Grant 11,315,754 - Blayvas , et al. April 26, 2 | 2022-04-26 |
Automatic optimization of an examination recipe
Grant 11,307,150 - Bar April 19, 2 | 2022-04-19 |
Measuring A Pattern
App 20220114721 - Kaplan; Vladislav ; et al. | 2022-04-14 |
Depth Profiling Of Semiconductor Structures Using Picosecond Ultrasonics
App 20220113129 - GOLANI; Ori ; et al. | 2022-04-14 |
Measuring height difference in patterns on semiconductor wafers
Grant 11,301,983 - Schwarzband , et al. April 12, 2 | 2022-04-12 |
Determining locations of suspected defects
Grant 11,301,987 - Greenberg , et al. April 12, 2 | 2022-04-12 |
Detection of an electric arc hazard related to a wafer
Grant 11,293,993 - Basson , et al. April 5, 2 | 2022-04-05 |
Integrated system and method
Grant 11,294,164 - April 5, 2 | 2022-04-05 |
Image Acquisition By An Electron Beam Examination Tool For Metrology Measurement
App 20220099592 - SKARIA; Bobin Mathew ; et al. | 2022-03-31 |
Testing a code using real time analysis
Grant 11,288,174 - Levi , et al. March 29, 2 | 2022-03-29 |
Holes tilt angle measurement using FIB diagonal cut
Grant 11,280,749 - Zur , et al. March 22, 2 | 2022-03-22 |
High-gain stable avalanche photo-diode formed within a first semiconductor epitaxial layer of a highly thermally conductive and electrically insulating substrate
Grant 11,282,971 - Margulis March 22, 2 | 2022-03-22 |
Three-dimensional Reconstruction Of A Semiconductor Specimen
App 20220082376 - BISTRITZER; Rafael ; et al. | 2022-03-17 |
Determining a critical dimension variation of a pattern
Grant 11,276,160 - Vereschagin , et al. March 15, 2 | 2022-03-15 |
Forming a vertical surface
Grant 11,276,557 - Zur March 15, 2 | 2022-03-15 |
Compensating for an electromagnetic interference induced deviation of an electron beam
Grant 11,276,545 - Basson , et al. March 15, 2 | 2022-03-15 |
Inspection of a three dimensional structure of a sample using a phase shift mask
Grant 11,270,432 - Feldman , et al. March 8, 2 | 2022-03-08 |
Sensing unit having photon to electron converter and a method
Grant 11,268,849 - Margulis March 8, 2 | 2022-03-08 |
Determination Of A Simulated Image Of A Specimen
App 20220067918 - PELEG; Irad | 2022-03-03 |
Generating three dimensional information regarding structural elements of a specimen
Grant 11,264,202 - Chirko , et al. March 1, 2 | 2022-03-01 |
System and methods of generating comparable regions of a lithographic mask
Grant 11,263,741 - Cohen , et al. March 1, 2 | 2022-03-01 |
Reducing a temperature difference between a sample and a chuck of an electron beam tool
Grant 11,264,203 - Brontvein , et al. March 1, 2 | 2022-03-01 |
Objective lens arrangement
Grant 11,264,198 - Petrov , et al. March 1, 2 | 2022-03-01 |
Detection circuit having reduced noise
Grant 11,265,085 - Margulis March 1, 2 | 2022-03-01 |
Inspection Of A Three Dimensional Structure Of A Sample Using A Phase Shift Mask
App 20220058784 - Feldman; Haim ; et al. | 2022-02-24 |
Reducing A Temperature Difference Between A Sample And A Chuck Of An Electron Beam Tool
App 20220051867 - Brontvein; Genadi Gabi ; et al. | 2022-02-17 |
Methods And Systems For Generating Calibration Data For Wafer Analysis
App 20220050060 - Simovitch; Yariv | 2022-02-17 |
Automatic Optimization Of An Examination Recipe
App 20220050061 - BAR; Amir | 2022-02-17 |
Methods and systems for expediting multi-perspective wafer analysis
Grant 11,250,560 - Korngut , et al. February 15, 2 | 2022-02-15 |
Generating Training Data Usable For Examination Of A Semiconductor Specimen
App 20220036538 - STEIMAN; Matan ; et al. | 2022-02-03 |
Generating a training set usable for examination of a semiconductor specimen
Grant 11,232,550 - Ben Baruch , et al. January 25, 2 | 2022-01-25 |
Method for noise reduction and a detection circuit
Grant 11,226,230 - Margulis January 18, 2 | 2022-01-18 |
Identification Of An Array In A Semiconductor Specimen
App 20220012861 - COHEN; Yehuda ; et al. | 2022-01-13 |
Methods And Systems For Expediting Multi-perspective Wafer Analysis
App 20220012862 - Korngut; Doron ; et al. | 2022-01-13 |
Reconstruction Of A Distorted Image Of An Array Of Structural Elements Of A Specimen
App 20220012852 - COHEN; Yehuda ; et al. | 2022-01-13 |
Uniform Milling Of Adjacent Materials Using Parallel Scanning Fib
App 20220005670 - Zur; Yehuda | 2022-01-06 |
Segmentation Of An Image Of A Semiconductor Specimen
App 20210407093 - BEN BARUCH; Elad ; et al. | 2021-12-30 |
Generating A Training Set Usable For Examination Of A Semiconductor Specimen
App 20210407072 - BEN BARUCH; Elad ; et al. | 2021-12-30 |
Method of deep learning-based examination of a semiconductor specimen and system thereof
Grant 11,205,119 - Karlinsky , et al. December 21, 2 | 2021-12-21 |
Generating a training set usable for examination of a semiconductor specimen
Grant 11,199,506 - Shaubi , et al. December 14, 2 | 2021-12-14 |
End-point detection for similar adjacent materials
Grant 11,199,401 - Zur December 14, 2 | 2021-12-14 |
Detecting Defects In Semiconductor Specimens Using Weak Labeling
App 20210383530 - PELEG; Irad ; et al. | 2021-12-09 |
Method, System And Computer Program Product For 3d-nand Cdsem Metrology
App 20210383529 - KRIS; Roman ; et al. | 2021-12-09 |
Multi-perspective wafer analysis using an acousto-optic deflector
Grant 11,195,267 - Ilan , et al. December 7, 2 | 2021-12-07 |
Method And System For Obtaining Information From A Sample
App 20210372936 - Golberg; Boris ; et al. | 2021-12-02 |
System And Method For Detecting Rare Stochastic Defects
App 20210373441 - Cohen; Guy | 2021-12-02 |
Evaluating An Inspection Algorithm For Inspecting A Semiconductor Specimen
App 20210374935 - Blayvas; Ilya | 2021-12-02 |
Charged particle beam source and a method for assembling a charged particle beam source
Grant 11,189,451 - Asulin , et al. November 30, 2 | 2021-11-30 |
Generating Three Dimensional Information Regarding Structural Elements Of A Specimen
App 20210358712 - Chirko; Konstantin ; et al. | 2021-11-18 |
Detection circuit and method for amplifying a photosensor output current
Grant 11,177,775 - Margulis November 16, 2 | 2021-11-16 |
Method and system for evaluating objects
Grant 11,177,048 - November 16, 2 | 2021-11-16 |
Optimizing Signal-to-noise Ratio In Optical Imaging Of Defects On Unpatterned Wafers
App 20210349019 - Kapoano; Yechiel ; et al. | 2021-11-11 |
Detecting Backscattered Electrons In A Multi-beam Charged Particle Column
App 20210341398 - Levin; Jacob ; et al. | 2021-11-04 |
Automatic Selection Of Algorithmic Modules For Examination Of A Specimen
App 20210343000 - SCHLEYEN; Ran ; et al. | 2021-11-04 |
Test Of An Examination Tool
App 20210341559 - NARANG; Gagandeep | 2021-11-04 |
Increasing Signal-to-noise Ratio In Optical Imaging Of Defects On Unpatterned Wafers
App 20210333719 - Kapoano; Yechiel ; et al. | 2021-10-28 |
Scanning Electron Microscope And A Method For Overlay Monitoring
App 20210335569 - Asulin; Itay ; et al. | 2021-10-28 |
Adaptive Geometry For Optimal Focused Ion Beam Etching
App 20210335571 - Blayvas; Ilya ; et al. | 2021-10-28 |
Automatic selection of algorithmic modules for examination of a specimen
Grant 11,151,710 - Schleyen , et al. October 19, 2 | 2021-10-19 |
Sensor For Electron Detection
App 20210319976 - Assulin; Itay ; et al. | 2021-10-14 |
System, method and computer program product for classifying a multiplicity of items
Grant 11,138,507 - Asbag , et al. October 5, 2 | 2021-10-05 |
Determining Three Dimensional Information
App 20210295499 - Levant; Anna ; et al. | 2021-09-23 |
Determining Locations Of Suspected Defects
App 20210279848 - Greenberg; Ofir ; et al. | 2021-09-09 |
Optical inspection
Grant 11,105,740 - Shoham , et al. August 31, 2 | 2021-08-31 |
Detecting targeted locations in a semiconductor specimen
Grant 11,107,207 - Cohen , et al. August 31, 2 | 2021-08-31 |
Noise reduction of a high voltage supply voltage
Grant 11,101,105 - Mets August 24, 2 | 2021-08-24 |
Determination Of Defect Location For Examination Of A Specimen
App 20210256687 - GIRMONSKY; Doron ; et al. | 2021-08-19 |
Testing A Code Using Real Time Analysis
App 20210255946 - Levi; Elad ; et al. | 2021-08-19 |
High-gain Stable Avalanche Photo-diode
App 20210249543 - Margulis; Pavel | 2021-08-12 |
Method Of Examining Specimens And System Thereof
App 20210239623 - SOFER; Yotam ; et al. | 2021-08-05 |
System And Methods Of Generating Comparable Regions Of A Lithographic Mask
App 20210233220 - Cohen; Boaz ; et al. | 2021-07-29 |
Guided inspection of a semiconductor wafer based on spatial density analysis
Grant 11,060,981 - Hirszhorn , et al. July 13, 2 | 2021-07-13 |
Machine Learning-based Defect Detection Of A Specimen
App 20210209418 - BADANES; Ran ; et al. | 2021-07-08 |
Photodetector Configurations
App 20210208290 - Margulis; Pavel | 2021-07-08 |
Overlay monitoring
Grant 11,054,753 - Kaplan , et al. July 6, 2 | 2021-07-06 |
Evaluating a hole formed in an intermediate product
Grant 11,056,404 - Kris , et al. July 6, 2 | 2021-07-06 |
X-ray based metrology of a high aspect ratio hole
Grant 11,047,677 - Sender June 29, 2 | 2021-06-29 |
Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber
Grant 11,049,704 - Ruach-Nir , et al. June 29, 2 | 2021-06-29 |
Evaluating A Hole Formed In An Intermediate Product
App 20210193536 - Kris; Roman ; et al. | 2021-06-24 |
Supply unit and a method for driving an electrode of a charged particle beam column
Grant 11,043,357 - Margulis June 22, 2 | 2021-06-22 |
Detection Circuit And Method For Amplifying A Photosensor Output Current
App 20210184634 - Margulis; Pavel | 2021-06-17 |
X-ray Based Evaluation Of A Status Of A Structure Of A Substrate
App 20210181128 - Shemesh; Dror | 2021-06-17 |
Method of classifying defects in a semiconductor specimen and system thereof
Grant 11,037,286 - Asbag , et al. June 15, 2 | 2021-06-15 |
Multi-perspective examination of a specimen
Grant 11,035,803 - Almog , et al. June 15, 2 | 2021-06-15 |
Charged Particle Beam Source And A Method For Assembling A Charged Particle Beam Source
App 20210175040 - Asulin; Itay ; et al. | 2021-06-10 |
Computerized method for configuring an inspection system, computer program product and an inspection system
Grant 11,029,253 - Shoham , et al. June 8, 2 | 2021-06-08 |
Process monitoring
Grant 11,022,565 - Shemesh , et al. June 1, 2 | 2021-06-01 |
Examination of a semiconductor specimen
Grant 11,022,566 - Alumot , et al. June 1, 2 | 2021-06-01 |
X-ray Based Metrology Of A High Aspect Ratio Hole
App 20210156682 - Sender; Benzion | 2021-05-27 |
Method And System For Evaluating Objects
App 20210151214 - Krivts (Krayvitz); Igor ; et al. | 2021-05-20 |
Method of deep learning-based examination of a semiconductor specimen and system thereof
Grant 11,010,665 - Karlinsky , et al. May 18, 2 | 2021-05-18 |
Optical Inspection
App 20210116368 - Shoham; Amir ; et al. | 2021-04-22 |
System, Method And Computer Program Product For Object Examination
App 20210109029 - Shabtay; Saar ; et al. | 2021-04-15 |
Generating milled structural elements with a flat upper surface
Grant 10,971,618 - Davidescu , et al. April 6, 2 | 2021-04-06 |
Method For Curing Solid State Photosensors
App 20210098315 - Margulis; Pavel | 2021-04-01 |
Method, computer program product and system for detecting manufacturing process defects
Grant 10,957,567 - Amzaleg , et al. March 23, 2 | 2021-03-23 |
Method of examination of a specimen and system thereof
Grant 10,957,034 - Cohen , et al. March 23, 2 | 2021-03-23 |
Forming A Vertical Surface
App 20210082664 - Zur; Yehuda | 2021-03-18 |
Mask Inspection Of A Semiconductor Specimen
App 20210073963 - SHKALIM; Ariel ; et al. | 2021-03-11 |
Evaluating An Intermediate Product Related To A Three-dimensional Nand Memory Unit
App 20210066026 - Kris; Roman ; et al. | 2021-03-04 |
Detection Of An Electric Arc Hazard Related To A Wafer
App 20210063461 - Basson; Yosef ; et al. | 2021-03-04 |
Method of examining defects in a semiconductor specimen and system thereof
Grant 10,937,706 - Sofer , et al. March 2, 2 | 2021-03-02 |
X-ray based evaluation of a status of a structure of a substrate
Grant 10,928,336 - Shemesh February 23, 2 | 2021-02-23 |
Method of inspecting a specimen and system thereof
Grant 10,928,437 - Goren , et al. February 23, 2 | 2021-02-23 |
Method for detecting voids and an inspection system
Grant 10,922,809 - Shemesh , et al. February 16, 2 | 2021-02-16 |
System, method and computer program product for classifying defects
Grant 10,921,334 - Savchenko , et al. February 16, 2 | 2021-02-16 |
Adaptive regression testing
Grant 10,922,217 - Levi , et al. February 16, 2 | 2021-02-16 |
Detecting Targeted Locations In A Semiconductor Specimen
App 20210042905 - COHEN; Elad ; et al. | 2021-02-11 |
Method For Noise Reduction And A Detection Circuit
App 20210033456 - Margulis; Pavel | 2021-02-04 |
X-ray Based Evaluation Of A Status Of A Structure Of A Substrate
App 20210033550 - Shemesh; Dror | 2021-02-04 |
Detection Circuit Having Reduced Noise
App 20210036782 - Margulis; Pavel | 2021-02-04 |
Generating Milled Structural Elements With A Flat Upper Surface
App 20210036142 - Davidescu; Ron ; et al. | 2021-02-04 |
Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber
Grant 10,910,204 - Ruach-Nir , et al. February 2, 2 | 2021-02-02 |
Integrated System And Method
App 20210026123 - Krivts (Krayvitz); Igor ; et al. | 2021-01-28 |
Closed-loop automatic defect inspection and classification
Grant 10,901,402 - Greenberg , et al. January 26, 2 | 2021-01-26 |
Computerized system and method for obtaining information about a region of an object
Grant 10,902,582 - Feldman , et al. January 26, 2 | 2021-01-26 |
Filling empty structures with deposition under high-energy SEM for uniform DE layering
Grant 10,903,044 - Litman , et al. January 26, 2 | 2021-01-26 |
Registration between an image of an object and a description
Grant 10,902,620 - Cohen , et al. January 26, 2 | 2021-01-26 |
Charged particle beam source and a method for assembling a charged particle beam source
Grant 10,886,092 - Asulin , et al. January 5, 2 | 2021-01-05 |
Multi-perspective Wafer Analysis
App 20200400589 - FELDMAN; Haim ; et al. | 2020-12-24 |
System, method and computer program product for object examination
Grant 10,871,451 - Shabtay , et al. December 22, 2 | 2020-12-22 |
Milling A Multi-layered Object
App 20200384592 - Zur; Yehuda | 2020-12-10 |
Measuring Height Difference In Patterns On Semiconductor Wafers
App 20200380668 - Schwarzband; Ishai ; et al. | 2020-12-03 |
Method Of Defect Classification And System Thereof
App 20200372631 - ASBAG; Assaf ; et al. | 2020-11-26 |
Lubrication system and a method for lubricating a transmission system component
Grant 10,837,540 - Admoni , et al. November 17, 2 | 2020-11-17 |
Process Monitoring
App 20200355620 - Shemesh; Dror ; et al. | 2020-11-12 |
Method of generating a training set usable for examination of a semiconductor specimen and system thereof
Grant 10,832,092 - Shaubi , et al. November 10, 2 | 2020-11-10 |
Iterative defect filtering process
Grant 10,818,000 - Shabtay , et al. October 27, 2 | 2020-10-27 |
Sensing Unit Having Photon To Electron Converter And A Method
App 20200333180 - Margulis; Pavel | 2020-10-22 |
Method for evaluating a region of an object
Grant 10,811,219 - Shneyour , et al. October 20, 2 | 2020-10-20 |
Determining A Critical Dimension Variation Of A Pattern
App 20200327652 - VERESCHAGIN; Vadim ; et al. | 2020-10-15 |
System, method and computer program product for generating a training set for a classifier
Grant 10,803,575 - Shaubi , et al. October 13, 2 | 2020-10-13 |
Method Of Deep Learning-based Examination Of A Semiconductor Specimen And System Thereof
App 20200294224 - SHAUBI; Ohad ; et al. | 2020-09-17 |
Method of defect classification and system thereof
Grant 10,748,271 - Asbag , et al. A | 2020-08-18 |
Measuring height difference in patterns on semiconductor wafers
Grant 10,748,272 - Schwarzband , et al. A | 2020-08-18 |
Method for monitoring nanometric structures
Grant 10,731,979 - Levi , et al. | 2020-08-04 |
Objective Lens Arrangement Usable In Particle-optical Systems
App 20200243296A1 - | 2020-07-30 |
Multi-perspective Wafer Analysis
App 20200232934 - FELDMAN; Haim ; et al. | 2020-07-23 |
Computerized System And Method For Obtaining Information About A Region Of An Object
App 20200234418 - FELDMAN; Haim ; et al. | 2020-07-23 |
Charged Particle Beam Source And A Method For Assembling A Charged Particle Beam Source
App 20200234907 - Asulin; Itay ; et al. | 2020-07-23 |
Process window analysis
Grant 10,720,367 - Kaizerman , et al. | 2020-07-21 |
Method Of Generating A Training Set Usable For Examination Of A Semiconductor Specimen And System Thereof
App 20200226420 - SHAUBI; Ohad ; et al. | 2020-07-16 |
System, computer program product, and method for dissipation of an electrical charge
Grant 10,716,197 - Eytan , et al. | 2020-07-14 |
Measuring a height profile of a hole formed in non-conductive region
Grant 10,714,306 - Chirko , et al. | 2020-07-14 |
Retractable detector
Grant 10,714,305 - Litman , et al. | 2020-07-14 |
Method Of Classifying Defects In A Specimen Semiconductor Examination And System Thereof
App 20200202252 - ASBAG; Assaf ; et al. | 2020-06-25 |
Method of examining locations in a wafer with adjustable navigation accuracy and system thereof
Grant 10,663,407 - Kaizerman , et al. | 2020-05-26 |
Technique for inspecting semiconductor wafers
Grant 10,636,140 - Schwarzband , et al. | 2020-04-28 |
Method, Computer Program Product And System For Detecting Manufacturing Process Defects
App 20200118855 - Amzaleg; Moshe ; et al. | 2020-04-16 |
Objective Lens Arrangement
App 20200118785 - Petrov; Igor ; et al. | 2020-04-16 |
Objective lens arrangement usable in particle-optical systems
Grant 10,622,184 - Knippelmeyer , et al. | 2020-04-14 |
Guided inspection of a semiconductor wafer based on systematic defects
Grant 10,605,745 - Sofer , et al. | 2020-03-31 |
Method Of Examining Defects In A Semiconductor Specimen And System Thereof
App 20200075434 - SOFER; Yotam ; et al. | 2020-03-05 |
Method of performing metrology operations and system thereof
Grant 10,571,406 - Katzir , et al. Feb | 2020-02-25 |
Method For Evaluating A Region Of An Object
App 20200051777 - Shneyour; Ofer ; et al. | 2020-02-13 |
System, a method and a computer program product for size estimation
Grant 10,545,020 - Amzaleg , et al. Ja | 2020-01-28 |
Method of inspecting a specimen and system thereof
Grant 10,545,490 - Dalla-Torre , et al. Ja | 2020-01-28 |
Charged particle beam system and method of operating the same
Grant 10,541,112 - Schubert , et al. Ja | 2020-01-21 |
System and method for scanning an object with an electron beam using overlapping scans and electron beam counter-deflection
Grant 10,541,104 - Lev , et al. Ja | 2020-01-21 |
Method Of Inspecting A Specimen And System Thereof
App 20200018789 - GOREN; Zvi ; et al. | 2020-01-16 |
Cleanliness Monitor And A Method For Monitoring A Cleanliness Of A Vacuum Chamber
App 20200013603 - Ruach-Nir; Irit ; et al. | 2020-01-09 |
Guided Inspection Of A Semiconductor Wafer Based On Systematic Defects
App 20200003700 - Sofer; Yotam ; et al. | 2020-01-02 |
Method of operating a charged particle beam specimen inspection system
Grant 10522327 - | 2019-12-31 |
System, Method And Computer Program Product For Object Examination
App 20190391085 - SHABTAY; Saar ; et al. | 2019-12-26 |
Measuring A Height Profile Of A Hole Formed In Non-conductive Region
App 20190378683 - Chirko; Konstantin ; et al. | 2019-12-12 |
Method and system for generating a synthetic image of a region of an object
Grant 10504692 - | 2019-12-10 |
Particle-optical systems and arrangements and particle-optical components for such systems and arrangements
Grant 10504681 - | 2019-12-10 |
Signal separator for a multi-beam charged particle inspection apparatus
Grant 10504687 - | 2019-12-10 |
Evaluating an object
Grant 10504693 - | 2019-12-10 |
Method of examining defects in a semiconductor specimen and system thereof
Grant 10504805 - | 2019-12-10 |
Process Window Analysis
App 20190355628 - KAIZERMAN; Idan ; et al. | 2019-11-21 |
Asymmetrical magnification inspection system and illumination module
Grant 10481101 - | 2019-11-19 |
System, Method And Computer Program Product For Generating A Training Set For A Classifier
App 20190347785 - SHAUBI; Ohad ; et al. | 2019-11-14 |
Method Of Defect Classification And System Thereof
App 20190333208 - ASBAG; Assaf ; et al. | 2019-10-31 |
Method of defect detection and system thereof
Grant 10460434 - | 2019-10-29 |
Method for inspecting a specimen and charged particle multi-beam device
Grant 10453645 - | 2019-10-22 |
Chuck for supporting a wafer
Grant 10446434 - | 2019-10-15 |
Method of inspecting a specimen and system thereof
Grant 10444274 - | 2019-10-15 |
Method of detecting defects in an object
Grant 10430938 - | 2019-10-01 |
Guided Inspection Of A Semiconductor Wafer Based On Spatial Density Analysis
App 20190293569 - HIRSZHORN; Ariel ; et al. | 2019-09-26 |
System, Method And Computer Program Product For Classifying Defects
App 20190293669 - SAVCHENKO; Kirill ; et al. | 2019-09-26 |
System, method and computer program product for object examination
Grant 10408764 - | 2019-09-10 |
Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column
Grant 10395887 - | 2019-08-27 |
Signal separator for a multi-beam charged particle inspection apparatus
App 20190259564 - KRUIT; Pieter ; et al. | 2019-08-22 |
Apparatus and method for inspecting a surface of a sample, using a multi-beam charged particle column
App 20190259570 - KRUIT; Pieter ; et al. | 2019-08-22 |
Generating A Training Set Usable For Examination Of A Semiconductor Specimen
App 20190257767 - SHAUBI; Ohad ; et al. | 2019-08-22 |
System and method for defect detection using multi-spot scanning
Grant 10386311 - | 2019-08-20 |
Detection unit, scanning charged particle beam device and a method
Grant 10388490 - | 2019-08-20 |
Method Of Examining Locations In A Wafer With Adjustable Navigation Accuracy And System Thereof
App 20190234887 - KAIZERMAN; Idan ; et al. | 2019-08-01 |
System, method and computer program product for generating a training set for a classifier
Grant 10360669 - | 2019-07-23 |
Method For Monitoring Nanometric Structures
App 20190219390 - LEVI; Shimon ; et al. | 2019-07-18 |
Technique for measuring overlay between layers of a multilayer structure
Grant 10354376 - | 2019-07-16 |
Charged particle inspection method and charged particle system
Grant 10354831 - | 2019-07-16 |
Arc detector and a method for detecting arcs
Grant 10345359 - | 2019-07-09 |
Imaging of crystalline defects
Grant 10347462 - | 2019-07-09 |
Imaging an area that includes an upper surface and a hole
Grant 10340116 - | 2019-07-02 |
Retractable Detector
App 20190189391 - Litman; Alon ; et al. | 2019-06-20 |
Imaging Of Crystalline Defects
App 20190180975 - Shemesh; Dror ; et al. | 2019-06-13 |
Process window analysis
Grant 10312161 - | 2019-06-04 |
Method of performing metrology operations and system thereof
Grant 10296702 - | 2019-05-21 |
System and method for multiple mode inspection of a sample
Grant 10295476 - | 2019-05-21 |
System, a method and a computer program product for fitting based defect detection
Grant 10290092 - | 2019-05-14 |
Temperature sensitive location error compensation
Grant 10288409 - | 2019-05-14 |
Method of generating an examination recipe and system thereof
Grant 10290087 - | 2019-05-14 |
Method of detecting repeating defects and system thereof
Grant 10275872 - | 2019-04-30 |
Method Of Performing Metrology Operations And System Thereof
App 20190121933 - KATZIR; Ron ; et al. | 2019-04-25 |
Closed-loop Automatic Defect Inspection And Classification
App 20190121331 - Greenberg; Gadi ; et al. | 2019-04-25 |
Method Of Classifying Defects In A Semiconductor Specimen And System Thereof
App 20190096053 - ASBAG; Assaf ; et al. | 2019-03-28 |
System, Method And Computer Program Product For Classifying A Multiplicity Of Items
App 20190095800 - ASBAG; Assaf ; et al. | 2019-03-28 |
Lubrication System And A Method For Lubricating A Transmission System Component
App 20190085968 - Admoni; Erez ; et al. | 2019-03-21 |
Evaluating An Object
App 20190088444 - Attal; Shay ; et al. | 2019-03-21 |
System, Computer Program Product, And Method For Dissipation Of An Electrical Charge
App 20190090335 - Eytan; Guy ; et al. | 2019-03-21 |
Method Of Generating An Examination Recipe And System Thereof
App 20190080447 - SHKALIM; Ariel ; et al. | 2019-03-14 |
System, Method And Computer Program Product For Object Examination
App 20190079022 - SHABTAY; Saar ; et al. | 2019-03-14 |
System and method for design based inspection
Grant 10229241 - | 2019-03-12 |
Method Of Detecting Repeating Defects And System Thereof
App 20190066292 - Pomeranz; Karen ; et al. | 2019-02-28 |
Charged Particle Beam System And Method Of Operating The Same
App 20190066974 - SCHUBERT; Stefan ; et al. | 2019-02-28 |
Method Of Examining Defects In A Semiconductor Specimen And System Thereof
App 20190067134 - SOFER; Yotam ; et al. | 2019-02-28 |
Method Of Defect Detection And System Thereof
App 20190066291 - MARTIN; Limor ; et al. | 2019-02-28 |
System, Method And Computer Program Product For Generating A Training Set For A Classifier
App 20190066290 - SHAUBI; Ohad ; et al. | 2019-02-28 |
Cleanliness monitor and a method for monitoring a cleanliness of a vacuum chamber
Grant 10217621 - | 2019-02-26 |
Retractable detector
Grant 10211026 - | 2019-02-19 |
Method And System For Generating A Synthetic Image Of A Region Of An Object
App 20190043688 - Zohar; Zeev | 2019-02-07 |
Method For Detecting Voids And An Inspection System
App 20190043183 - Shemesh; Dror ; et al. | 2019-02-07 |
Light detector and a method for detecting light
Grant 10197441 - | 2019-02-05 |
Method for adaptive sampling in examining an object and system thereof
Grant 10190991 - | 2019-01-29 |
Method Of Detecting Defects In An Object
App 20190026879 - BATIKOFF; Amit ; et al. | 2019-01-24 |
Cleanliness Monitor And A Method For Monitoring A Cleanliness Of A Vacuum Chamber
App 20190027354 - RUACH-NIR; Irit ; et al. | 2019-01-24 |
Iterative Defect Filtering Process
App 20190012781 - Shabtay; Saar ; et al. | 2019-01-10 |
System for inspecting and reviewing a sample
Grant 10177048 - | 2019-01-08 |
On-axis illumination and alignment for charge control during charged particle beam inspection
Grant 10168614 - | 2019-01-01 |
On-axis Illumination And Alignment For Charge Control During Charged Particle Beam Inspection
App 20180364564 - Goldenshtein; Alex ; et al. | 2018-12-20 |
System And Method For Design Based Inspection
App 20180357357 - Parizat; Ziv ; et al. | 2018-12-13 |
Technique For Inspecting Semiconductor Wafers
App 20180336671 - SCHWARZBAND; Ishai ; et al. | 2018-11-22 |
Measuring Height Difference In Patterns On Semiconductor Wafers
App 20180336675 - SCHWARZBAND; Ishai ; et al. | 2018-11-22 |
Method Of Inspecting A Specimen And System Thereof
App 20180321299 - GOREN; Zvi ; et al. | 2018-11-08 |
Method For Adaptive Sampling In Examining An Object And System Thereof
App 20180306728 - SOFER; Yotam ; et al. | 2018-10-25 |
Computerized Method For Configuring An Inspection System, Computer Program Product And An Inspection System
App 20180284031 - Shoham; Amir ; et al. | 2018-10-04 |
Technique For Measuring Overlay Between Layers Of A Multilayer Structure
App 20180268539 - WEINBERG; Yakov ; et al. | 2018-09-20 |
Method Of Performing Metrology Operations And System Thereof
App 20180268099 - KATZIR; Ron ; et al. | 2018-09-20 |
Method Of Performing Metrology Operations And System Thereof
App 20180268098 - KATZIR; Ron ; et al. | 2018-09-20 |
Asymmetrical Magnification Inspection System And Illumination Module
App 20180209915 - Feldman; Haim ; et al. | 2018-07-26 |
Method For Inspecting A Specimen And Charged Particle Multi-beam Device
App 20180158642 - Frosien; Jurgen ; et al. | 2018-06-07 |
Scanning System And Method For Scanning An Object
App 20180081166 - Naftail; Ron ; et al. | 2018-03-22 |
Multi Mode System With A Dispersion X-ray Detector
App 20180012728 - Litman; Alon ; et al. | 2018-01-11 |
Method Of Deep Learning-based Examination Of A Semiconductor Specimen And System Thereof
App 20170364798 - KARLINSKY; Leonid ; et al. | 2017-12-21 |
Method Of Deep Learining-based Examination Of A Semiconductor Specimen And System Thereof
App 20170357895 - KARLINSKY; Leonid ; et al. | 2017-12-14 |
Inspection System And Method For Inspecting A Sample By Using A Plurality Of Spaced Apart Beams
App 20170307539 - Golberg; Boris ; et al. | 2017-10-26 |
Chuck For Supporting A Wafer
App 20170309511 - Korngut; Doron ; et al. | 2017-10-26 |
High Voltage Electron Beam System And Method
App 20170309442 - Basson; Yosef | 2017-10-26 |
Detection Module, Inspection System And A Method For Obtaining Multipe Sensing Results
App 20170309444 - Kuzniz; Tal | 2017-10-26 |
Method And System For Scanning An Object
App 20170309439 - Margulis; Pavel | 2017-10-26 |
Objective Lens Arrangement Usable In Particle-optical Systems
App 20170294287 - KNIPPELMEYER; Rainer ; et al. | 2017-10-12 |
Particle-optical Systems And Arrangements And Particle-optical Components For Such Systems And Arrangements
App 20170287674 - KNIPPELMEYER; Rainer ; et al. | 2017-10-05 |
System And Method For Design Based Inspection
App 20170270232 - PARIZAT; Ziv ; et al. | 2017-09-21 |
Optical Module And A Detection Method
App 20170261713 - Kuzniz; Tal | 2017-09-14 |
System And Method For Multi-location Zapping
App 20170263485 - Biber; Tuvia ; et al. | 2017-09-14 |
Arc Detector And A Method For Detecting Arcs
App 20170254847 - Biber; Tuvia ; et al. | 2017-09-07 |
System For Discharging An Area That Is Scanned By An Electron Beam
App 20170250052 - GOLDENSHTEIN; Alex | 2017-08-31 |
Technique For Measuring Overlay Between Layers Of A Multilayer Structure
App 20170243343 - WEINBERG; Yakov ; et al. | 2017-08-24 |
Multi Mode Systems With Retractable Detectors
App 20170213696 - Litman; Alon ; et al. | 2017-07-27 |
Multi Mode System With A Dispersion X-ray Detector
App 20170213697 - Litman; Alon ; et al. | 2017-07-27 |
Inspection System and a Method for Evaluating an Exit Pupil of an Inspection System
App 20170205359 - Ilan; Harel ; et al. | 2017-07-20 |
System And Method For Selective Zapping
App 20170200627 - Biber; Tuvia ; et al. | 2017-07-13 |
Photo-detector device and a method for biasing a photomultiplier tube having a current source for setting a sequence of voltage follower elements
Grant 08921756 - | 2014-12-30 |
| 