| Patent | Date |
|---|
Polishing Pad With Two-section Window Having Recess
App 20130231032 - Swedek; Boguslaw A. ; et al. | 2013-09-05 |
Retaining Ring And Articles For Carrier Head
App 20130157549 - Bennett; Doyle E. ; et al. | 2013-06-20 |
Semi-Quantitative Thickness Determination
App 20130059499 - Benvegnu; Dominic J. ; et al. | 2013-03-07 |
Method Of Assembly Of Retaining Ring For Cmp
App 20120325395 - Zuniga; Steven M. ; et al. | 2012-12-27 |
Retaining Ring And Articles For Carrier Head
App 20100144255 - Bennett; Doyle E. ; et al. | 2010-06-10 |
Carrier Head With Retaining Ring And Carrier Ring
App 20100136892 - Zuniga; Steven M. ; et al. | 2010-06-03 |
Methods for Forming a Silicon Oxide Layer Over a Substrate
App 20090104791 - Nemani; Srinivas D. ; et al. | 2009-04-23 |
Methods And Apparatus For Polishing Control
App 20080268643 - Birang; Manoocher ; et al. | 2008-10-30 |
Stress Measurements During Large-mismatch Epitaxial Processes
App 20080206902 - Bour; David ; et al. | 2008-08-28 |
Method And Apparatus For Measuring Object Thickness
App 20080186022 - Lei; Lawrence C. ; et al. | 2008-08-07 |
Multi-stage Curing Of Low K Nano-porous Films
App 20080099920 - Schmitt; Francimar ; et al. | 2008-05-01 |
CMOS S/D SiGe DEVICE MADE WITH ALTERNATIVE INTEGRATION PROCESS
App 20070284668 - Shen; Meihua ; et al. | 2007-12-13 |
ALTERNATIVE INTEGRATION SCHEME FOR CMOS S/D SiGe PROCESS
App 20070287244 - Shen; Meihua ; et al. | 2007-12-13 |
UV activation of NH3 for III-N deposition
App 20070256635 - Bour; David ; et al. | 2007-11-08 |
Composite heater and chill plate
App 20070251456 - Herchen; Harald ; et al. | 2007-11-01 |
Eddy current system for in-situ profile measurement
App 20070139043 - Miller; G. Laurie ; et al. | 2007-06-21 |
Enhanced magnetic shielding for plasma-based semiconductor processing tool
App 20070062449 - Mungekar; Hemant P. ; et al. | 2007-03-22 |
Method and device for critical dimension detection by molecular binding
App 20070042390 - Borden; Peter | 2007-02-22 |
Non-intrusive plasma monitoring system for arc detection and prevention for blanket CVD films
App 20070042131 - Soo; Jyr Hong ; et al. | 2007-02-22 |
Method and system for deposition tuning in an epitaxial film growth apparatus
App 20070010033 - Aderhold; Wolfgang R. ; et al. | 2007-01-11 |
Method to increase the compressive stress of PECVD silicon nitride films
App 20060269692 - Balseanu; Mihaela ; et al. | 2006-11-30 |
System and method for in-line metal profile measurement
App 20060246822 - Swedek; Boguslaw A. ; et al. | 2006-11-02 |
Electrostatic chuck for track thermal plates
App 20060238954 - Ishikawa; Tetsuya ; et al. | 2006-10-26 |
Polishing method and apparatus
App 20060228991 - Kitajima; Tomohiko ; et al. | 2006-10-12 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
App 20060194525 - Tolles; Robert D. ; et al. | 2006-08-31 |
High-throughput HDP-CVD processes for advanced gapfill applications
App 20060154494 - Qi; Bo ; et al. | 2006-07-13 |
Multilayer polishing pad and method of making
App 20060154568 - Tolles; Robert D. | 2006-07-13 |
Flexible membrane for multi-chamber carrier head
App 20060154580 - Chen; Hung Chih ; et al. | 2006-07-13 |
Vibration damping in chemical mechanical polishing system
App 20060148387 - Chen; Hung Chih ; et al. | 2006-07-06 |
Self-cooling gas delivery apparatus under high vacuum for high density plasma applications
App 20060130756 - Liang; Qiwei ; et al. | 2006-06-22 |
Coat/develop module with independent stations
App 20060134340 - Ishikawa; Tetsuya ; et al. | 2006-06-22 |
Silicon Oxide Gapfill Deposition Using Liquid Precursors
App 20060046508 - Nemani; Srinivas D. ; et al. | 2006-03-02 |
Gap-fill depositions introducing hydroxyl-containing precursors in the formation of silicon containing dielectric materials
App 20060046427 - Ingle; Nitin K. ; et al. | 2006-03-02 |
Multi-step anneal of thin films for film densification and improved gap-fill
App 20060030165 - Ingle; Nitin K. ; et al. | 2006-02-09 |
Data processing for monitoring chemical mechanical polishing
App 20060009131 - Swedek; Boguslaw A. ; et al. | 2006-01-12 |
Oxygen plasma treatment for enhanced HDP-CVD gapfill
App 20050282398 - Mungekar, Hemant P. ; et al. | 2005-12-22 |
Hermetic cap layers formed on low-k films by plasma enhanced chemical vapor deposition
App 20050282404 - Nguyen, Vu Ngoc Tran ; et al. | 2005-12-22 |
Polishing pad with window
App 20050266771 - Wiswesser, Andreas Norbert | 2005-12-01 |
Method For Forming A Low Thermal Budget Spacer
App 20050266622 - Arghavani, Reza ; et al. | 2005-12-01 |
Method of inducing stresses in the channel region of a transistor
App 20050255667 - Arghavani, Reza ; et al. | 2005-11-17 |
HDP-CVD seasoning process for high power HDP-CVD gapfil to improve particle performance
App 20050250340 - Chen, Xiaolin ; et al. | 2005-11-10 |
Polishing system with in-line and in-situ metrology
App 20050245170 - Swedek, Boguslaw A. ; et al. | 2005-11-03 |
Method and system for control of processing conditions in plasma processing systems
App 20050220984 - Sun, Sheng ; et al. | 2005-10-06 |
Low-thermal-budget gapfill process
App 20050196929 - Yuan, Zheng ; et al. | 2005-09-08 |
Profile control platen
App 20050186892 - Chen, Hung Chih ; et al. | 2005-08-25 |
Methods and apparatuses promoting adhesion of dielectric barrier film to copper
App 20050186339 - Rajagopalan, Nagarajan ; et al. | 2005-08-25 |
HDP-CVD deposition process for filling high aspect ratio gaps
App 20050181632 - Tan, Zhengquan ; et al. | 2005-08-18 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
App 20050170751 - Birang, Manoocher ; et al. | 2005-08-04 |
Chemical mechanical polishing a substrate having a filler layer and a stop layer
App 20050153561 - Jin, Raymond R. ; et al. | 2005-07-14 |
Edge flow faceplate for improvement of CVD film properties
App 20050126484 - Zhao, Maosheng ; et al. | 2005-06-16 |
Method of forming a polishing pad for endpoint detection
App 20050124273 - Swedek, Boguslaw A. ; et al. | 2005-06-09 |
Gas distribution showerhead featuring exhaust apertures
App 20050103265 - Gianoulakis, Steven ; et al. | 2005-05-19 |
Ramp temperature techniques for improved mean wafer before clean
App 20050101155 - Bang, Won B. ; et al. | 2005-05-12 |
System and method for in-line metal profile measurement
App 20050048874 - Swedek, Boguslaw A. ; et al. | 2005-03-03 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion
App 20050048880 - Tolles, Robert D. ; et al. | 2005-03-03 |
Carrier head with a flexible membrane
App 20050037698 - Zuniga, Steven M. ; et al. | 2005-02-17 |
Sequential gas flow oxide deposition technique
App 20050019494 - Moghadam, Farhad K. ; et al. | 2005-01-27 |
Closed-loop control of wafer polishing in a chemical mechanical polishing system
App 20050020185 - Zuniga, Steven ; et al. | 2005-01-27 |
Methods for a multilayer retaining ring
App 20040209556 - Zuniga, Steven M. ; et al. | 2004-10-21 |
Polishing pad with a partial adhesive coating
App 20040198187 - Tolles, Robert D. | 2004-10-07 |
Vibration damping in a chemical mechanical polishing system
App 20040142646 - Chen, Hung Chih ; et al. | 2004-07-22 |
Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
App 20040116047 - Wiswesser, Andreas Norbert ; et al. | 2004-06-17 |
Polishing pad for in-situ endpoint detection
App 20040106357 - Birang, Manoocher ; et al. | 2004-06-03 |
Ionic additives for extreme low dielectric constant chemical formulations
App 20040087184 - Mandal, Robert P. ; et al. | 2004-05-06 |
Gas distribution showerhead
App 20040060514 - Janakiraman, Karthik ; et al. | 2004-04-01 |
Method of detecting a substrate in a carrier head
App 20040033762 - Chen, Hung Chih ; et al. | 2004-02-19 |
Carrier head with a flexible membrane for a chemical mechanical polishing system
App 20040033769 - Zuniga, Steven M. ; et al. | 2004-02-19 |
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
App 20040014395 - Birang, Manoocher ; et al. | 2004-01-22 |
Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
App 20030190867 - Birang, Manoocher ; et al. | 2003-10-09 |
Chemical mechanical polishing with multiple polishing pads
App 20030190865 - Somekh, Sasson | 2003-10-09 |
Linear polishing sheet with window
App 20030181137 - Redeker, Fred C. ; et al. | 2003-09-25 |
Chemical mechanical polishing of a metal layer with polishing rate monitoring
App 20030176081 - Redeker, Fred C. ; et al. | 2003-09-18 |
Process for forming silicon oxide material
App 20030161951 - Yuan, Zheng ; et al. | 2003-08-28 |
In situ application of etch back for improved deposition into high-aspect-ratio features
App 20030136332 - Krishnaraj, Padmanabhan ; et al. | 2003-07-24 |
Carrier head with a substrate detection mechanism for a chemical mechanical polishing system
App 20030139123 - Somekh, Sasson | 2003-07-24 |
Method of manufacturing an optical core
App 20030110808 - M'Saad, Hichem ; et al. | 2003-06-19 |
HDP-CVD film for uppercladding application in optical waveguides
App 20030113085 - M'Saad, Hichem | 2003-06-19 |
Optical Monitoring In A Two-step Chemical Mechanical Polishing Process
App 20030104760 - Adams, Bret W. ; et al. | 2003-06-05 |
Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing
App 20030104761 - Wiswesser, Andreas Norbert ; et al. | 2003-06-05 |
Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus
App 20030092371 - Osterheld, Thomas H. ; et al. | 2003-05-15 |
Deposition chamber and method for depositing low dielectric constant films
App 20030056900 - Li, Shijian ; et al. | 2003-03-27 |
Multistep remote plasma clean process
App 20030029475 - Hua, Zhong Qiang ; et al. | 2003-02-13 |
Carrier head with a flexible membrane to form multiple chambers
App 20030022609 - Perlov, Ilya ; et al. | 2003-01-30 |
Substrate retainer
App 20020179251 - Zuniga, Steven M. ; et al. | 2002-12-05 |
Method and apparatus for conditioning a polishing pad
App 20020164928 - Tolles, Robert D. | 2002-11-07 |
Carrier head with a compressible film
App 20020164938 - Chen, Hung Chih ; et al. | 2002-11-07 |
Polishing pad having a grooved pattern for use in chemical mechanical polishing apparatus
App 20020137450 - Osterheld, Thomas H. ; et al. | 2002-09-26 |
Substrate polishing article
App 20020086619 - Tolles, Robert D. | 2002-07-04 |
Carrier head with a flexible membrane for a chemical mechanical polishing system
App 20020086624 - Zuniga, Steven M. ; et al. | 2002-07-04 |
Carrier head with local pressure control for a chemical mechanical polishing apparatus
App 20020072313 - Zuniga, Steven M. ; et al. | 2002-06-13 |
In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization
App 20020013058 - Tang, Wallace T. Y. | 2002-01-31 |
Carrier head with a flexible membrane for a chemical mechanical polishing system
App 20010041526 - Perlov, Ilya ; et al. | 2001-11-15 |
Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
App 20010036793 - Wiswesser, Andreas Norbert ; et al. | 2001-11-01 |
Forming a transparent window in a polishing pad for a chemical mehcanical polishing apparatus
App 20010036805 - Birang, Manoocher M.B. ; et al. | 2001-11-01 |
Chemical mechanical polishing with multiple polishing pads
App 20010001756 - Somekh, Sasson | 2001-05-24 |
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