Patent applications and USPTO patent grants for Applied EPI, Inc..The latest application filed is for "dual chamber integrated phase separator for ultra high vacuum system".
Patent | Date |
---|---|
Dual chamber cooling system with cryogenic and non-cryogenic chambers for ultra high vacuum system Grant 6,718,775 - Colombo , et al. April 13, 2 | 2004-04-13 |
Dual Chamber Integrated Phase Separator For Ultra High Vacuum System App 20040020219 - Colombo, Paul E. ;   et al. | 2004-02-05 |
Surface sealing showerhead for vapor deposition reactor having integrated flow diverters App 20020059904 - Doppelhammer, Robert | 2002-05-23 |
SEC | 0001124206 | APPLIED EPI INC of MINNESOTA |
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