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Apelgren; Eric M. Patent Filings

Apelgren; Eric M.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Apelgren; Eric M..The latest application filed is for "locally increasing sidewall density by ion implantation".

Company Profile
0.4.3
  • Apelgren; Eric M. - Austin TX
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Resist trim process to define small openings in dielectric layers
Grant 7,737,021 - Dakshina-Murthy , et al. June 15, 2
2010-06-15
Locally increasing sidewall density by ion implantation
Grant 6,610,594 - Apelgren , et al. August 26, 2
2003-08-26
Locally increasing sidewall density by ion implantation
App 20030013296 - Apelgren, Eric M. ;   et al.
2003-01-16
Resist trim process to define small openings in dielectric layers
Grant 6,500,755 - Dakshina-Murthy , et al. December 31, 2
2002-12-31
Resist trim process to define small openings in dielectric layers
App 20020068436 - Dakshina-Murthy, Srikanteswara ;   et al.
2002-06-06
Dielectric formation to seal porosity of low dielectic constant (low k) materials after etch
App 20010051420 - Besser, Paul R. ;   et al.
2001-12-13
Photoresist removal using a polishing tool
Grant 6,315,637 - Apelgren , et al. November 13, 2
2001-11-13

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