Patent | Date |
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Edge ring and heat treatment apparatus having the same Grant 11,450,551 - Kim , et al. September 20, 2 | 2022-09-20 |
Apparatus For Processing Substrate And Method For Measuring Temperature Of Substrate App 20220128484 - MOON; Yong Soo ;   et al. | 2022-04-28 |
Thin Film Manufacturing Apparatus App 20220122824 - Lee; Byoung Il ;   et al. | 2022-04-21 |
Gas spraying apparatus, substrate processing facility including the same, and method for processing substrate using substrate processing facility Grant 11,136,670 - Ji , et al. October 5, 2 | 2021-10-05 |
Substrate treatment method and substrate treatment apparatus Grant 10,985,040 - Ji , et al. April 20, 2 | 2021-04-20 |
Edge Ring And Heat Treatment Apparatus Having The Same App 20210082737 - KIM; Chang Kyo ;   et al. | 2021-03-18 |
Method of manufacturing shadow mask using hybrid processing and shadow mask manufactured thereby Grant 10,680,177 - Park , et al. | 2020-06-09 |
Emergency stop apparatus and method Grant 10,490,370 - Kim , et al. Nov | 2019-11-26 |
Method of manufacturing shadow mask using hybrid processing and shadow mask manufactured thereby Grant 10,428,415 - Park , et al. October 1, 2 | 2019-10-01 |
Door Apparatus And Glove Box App 20190201887 - HYUN; Jae Keun ;   et al. | 2019-07-04 |
Substrate Treatment Method And Substrate Treatment Apparatus App 20190103296 - JI; Sang Hyun ;   et al. | 2019-04-04 |
Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device using same Grant 10,106,914 - Jeong , et al. October 23, 2 | 2018-10-23 |
Gas Spraying Apparatus, Substrate Processing Facility Including The Same, And Method For Processing Substrate Using Substrate Processing Facility App 20180258534 - JI; Sang Hyun ;   et al. | 2018-09-13 |
Emergency Stop Apparatus And Method App 20180240623 - KIM; Kwang Soo ;   et al. | 2018-08-23 |
Method Of Manufacturing Shadow Mask Using Hybrid Processing And Shadow Mask Manufactured Thereby App 20180202035 - Park; Jong-Kab ;   et al. | 2018-07-19 |
Method Of Manufacturing Shadow Mask Using Hybrid Processing And Shadow Mask Manufactured Thereby App 20180205018 - PARK; Jong-Kab ;   et al. | 2018-07-19 |
Device For Feeding High-frequency Power And Substrate Processing Apparatus Having The Same App 20170071053 - LEE; Jae Seung ;   et al. | 2017-03-09 |
Apparatus for calibrating pyrometer Grant 9,568,372 - Ji February 14, 2 | 2017-02-14 |
Apparatus for calibrating pyrometer Grant 9,500,530 - Ji November 22, 2 | 2016-11-22 |
Apparatus and method of detecting temperature and apparatus for processing substrate Grant 9,470,581 - Ji October 18, 2 | 2016-10-18 |
Heater Block And Substrate Processing Apparatus App 20160284572 - JEONG; Pil Seong ;   et al. | 2016-09-29 |
Apparatus For Manufacturing Semiconductor Device And Method For Manufacturing Semiconductor Device Using Same App 20160284562 - JEONG; Pil Seong ;   et al. | 2016-09-29 |
Heater block and a substrate treatment apparatus Grant 9,431,279 - Kim , et al. August 30, 2 | 2016-08-30 |
Apparatus and method for cleaning photomask Grant 9,400,425 - Kwak , et al. July 26, 2 | 2016-07-26 |
Apparatus for substrate treatment and method for operating the same Grant 9,386,632 - Ji July 5, 2 | 2016-07-05 |
Apparatus for substrate treatment and heating apparatus Grant 9,318,359 - Lim , et al. April 19, 2 | 2016-04-19 |
Heater block and heat treatment apparatus having the same Grant 9,117,858 - Lim , et al. August 25, 2 | 2015-08-25 |
Apparatus For Substrate Treatment And Method For Operating The Same App 20150181649 - Ji; Sang-Hyun | 2015-06-25 |
Heater block for a rapid thermal processing apparatus Grant 8,913,884 - Kim , et al. December 16, 2 | 2014-12-16 |
Apparatus And Method For Cleaning Photomask App 20140345646 - Kwak; Sung Ho ;   et al. | 2014-11-27 |
Apparatus And Method Of Detecting Temperature And Apparatus For Processing Substrate App 20140284316 - JI; Sang Hyun | 2014-09-25 |
Apparatus For Calibrating Pyrometer App 20140219309 - JI; Sang Hyun | 2014-08-07 |
Apparatus For Calibrating Pyrometer App 20140219310 - Ji; Sang Hyun | 2014-08-07 |
Heater Block And A Substrate Treatment Apparatus App 20130308928 - KIM; Chang-Kyo ;   et al. | 2013-11-21 |
Apparatus For Substrate Treatment And Heating Apparatus App 20130294756 - LIM; Il-Hwan ;   et al. | 2013-11-07 |
Heater Block And Heat Treatment Apparatus Having The Same App 20130287376 - LIM; Il Hwan ;   et al. | 2013-10-31 |
Heater Block For A Rapid Thermal Processing Apparatus In Which A Cooling Water Flow Is Divided Into An Upper Layer And A Lower Layer App 20120213499 - Shim; Jang Woo ;   et al. | 2012-08-23 |
Heater Block For A Rapid Thermal Processing Apparatus App 20120207456 - Kim; Chang Kyo ;   et al. | 2012-08-16 |