Patent | Date |
---|
Etching liquid composition Grant 8,545,716 - Tago , et al. October 1, 2 | 2013-10-01 |
Etching Liquid Composition App 20100230631 - Tago; Tsuguhiro ;   et al. | 2010-09-16 |
Anisotropic Silicon Etchant Composition App 20090218542 - Isami; Kenji ;   et al. | 2009-09-03 |
Aqueous fluoride compositions for cleaning semiconductor devices App 20090099051 - Aoyama; Tetsuo ;   et al. | 2009-04-16 |
Aqueous fluoride compositions for cleaning semiconductor devices Grant 7,399,365 - Aoyama , et al. July 15, 2 | 2008-07-15 |
Separation-material composition for photo-resist and manufacturing method of semiconductor device Grant 7,341,827 - Muramatsu , et al. March 11, 2 | 2008-03-11 |
Cleaning composition for removing resists and method of manufacturing semiconductor device Grant 7,250,391 - Kanno , et al. July 31, 2 | 2007-07-31 |
Cleaning agent and cleaning method Grant 6,875,288 - Gotoh , et al. April 5, 2 | 2005-04-05 |
Aqueous fluoride compositions for cleaning semiconductor devices App 20050014667 - Aoyama, Tetsuo ;   et al. | 2005-01-20 |
Cleaning composition for removing resists and method of manufacturing semiconductor device App 20040106531 - Kanno, Itaru ;   et al. | 2004-06-03 |
Photoresist stripper composition App 20040081922 - Ikemoto, Kazuto ;   et al. | 2004-04-29 |
Separation-material composition for photo-resist and manufacturing method of semiconductor device App 20040038154 - Muramatsu, Masafumi ;   et al. | 2004-02-26 |
Cleaning agent and cleaning process using the same Grant 6,686,322 - Nohara , et al. February 3, 2 | 2004-02-03 |
Resist stripping agent and process of producing semiconductor devices using the same Grant 6,638,694 - Ikemoto , et al. October 28, 2 | 2003-10-28 |
Resist Stripping Agent And Process Of Producing Semiconductor Devices Using The Same App 20030186175 - Ikemoto, Kazuto ;   et al. | 2003-10-02 |
Cleaning method using an oxidizing agent, chelating agent and fluorine compound Grant 6,514,352 - Gotoh , et al. February 4, 2 | 2003-02-04 |
Photoresist stripping composition and process for stripping photoresist Grant 6,458,517 - Nohara , et al. October 1, 2 | 2002-10-01 |
Photoresist removing composition Grant 6,440,326 - Maruyama , et al. August 27, 2 | 2002-08-27 |
Cleaning method App 20020066465 - Gotoh, Hideto ;   et al. | 2002-06-06 |
Cleaning agent and cleaning method App 20020064963 - Gotoh, Hideto ;   et al. | 2002-05-30 |
Resist stripping composition Grant 6,372,410 - Ikemoto , et al. April 16, 2 | 2002-04-16 |
Photoresist stripping composition and process for stripping photoresist App 20020009674 - Nohara, Masahiro ;   et al. | 2002-01-24 |
Resist Film Removing Composition And Method For Manufacturing Thin Film Circuit Element Using The Composition App 20010013502 - NOHARA, MASAHIRO ;   et al. | 2001-08-16 |
Cleaning agent for use in producing semiconductor devices and process for producing semiconductor devices using the same Grant 6,265,309 - Gotoh , et al. July 24, 2 | 2001-07-24 |
Method and apparatus for manufacturing semiconductor device Grant 6,199,567 - Kanno , et al. March 13, 2 | 2001-03-13 |
Cleaning liquid for semiconductor devices Grant 5,972,862 - Torii , et al. October 26, 1 | 1999-10-26 |
Cleaning liquid for semiconductor devices Grant 5,962,385 - Maruyama , et al. October 5, 1 | 1999-10-05 |
Removing agent composition for a photoresist and process for producing a semiconductor integrated circuit Grant 5,846,695 - Iwata , et al. December 8, 1 | 1998-12-08 |
Stripping and cleaning agent for removing dry-etching and photoresist residues from a semiconductor substrate, and a method for forming a line pattern using the stripping and cleaning agent Grant 5,630,904 - Aoyama , et al. May 20, 1 | 1997-05-20 |
Active carbon materials, process for the preparation thereof and the use thereof Grant 5,338,462 - Abe , et al. August 16, 1 | 1994-08-16 |
Active carbon materials, process for the preparation thereof and the use thereof Grant 5,242,879 - Abe , et al. September 7, 1 | 1993-09-07 |
Positive type photoresist developer Grant 5,175,078 - Aoyama , et al. December 29, 1 | 1992-12-29 |
Surface treating agent for aluminum line pattern substrate Grant 5,174,816 - Aoyama , et al. December 29, 1 | 1992-12-29 |
Process for production of quaternary ammonium hydroxides Grant 4,776,929 - Aoyama , et al. October 11, 1 | 1988-10-11 |
Process for preparation of tertiary olefins Grant 4,521,638 - Kida , et al. June 4, 1 | 1985-06-04 |
Process for preparing hydroperoxide Grant 4,013,725 - Yonemitsu , et al. March 22, 1 | 1977-03-22 |