Aoyagi; Paul
Patent Applications and Registrations
Patent applications and USPTO patent grants for Aoyagi; Paul.The latest application filed is for "measurement methodology of advanced nanostructures".
- Aoyagi; Paul - Sunnyvale CA
| Patent | Date |
|---|---|
| Measurement methodology of advanced nanostructures Grant 11,156,548 - Nguyen , et al. October 26, 2 | 2021-10-26 |
| Automatic determination of fourier harmonic order for computation of spectral information for diffraction structures Grant 10,481,088 - Backues , et al. Nov | 2019-11-19 |
| Measurement Methodology of Advanced Nanostructures App 20190178788 - Nguyen; Manh ; et al. | 2019-06-13 |
| Optical metrology with reduced sensitivity to grating anomalies Grant 9,470,639 - Zhuang , et al. October 18, 2 | 2016-10-18 |
| Techniques for optimized scatterometry Grant 9,127,927 - Iloreta , et al. September 8, 2 | 2015-09-08 |
| Automatic Determination Of Fourier Harmonic Order For Computation Of Spectral Information For Diffraction Structures App 20140358476 - Backues; Mark ; et al. | 2014-12-04 |
| Techniques For Optimized Scatterometry App 20130158948 - Iloreta; Jonathan ; et al. | 2013-06-20 |
| Film measurement Grant 7,760,358 - Aoyagi , et al. July 20, 2 | 2010-07-20 |
| Modal method modeling of binary gratings with improved eigenvalue computation Grant 7,375,828 - Aoyagi , et al. May 20, 2 | 2008-05-20 |
| Film measurement using reflectance computation Grant 7,362,686 - Aoyagi , et al. April 22, 2 | 2008-04-22 |
| Film measurement Grant 7,345,761 - Aoyagi , et al. March 18, 2 | 2008-03-18 |
| Film measurement Grant 7,190,453 - Aoyagi , et al. March 13, 2 | 2007-03-13 |
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