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Etching and cleaning methods and etching and cleaning apparatuses used therefor Grant 8,420,549 - Yamasaki , et al. April 16, 2 | 2013-04-16 |
Method for manufacturing semiconductor device and semiconductor device Grant 8,129,287 - Suzuki , et al. March 6, 2 | 2012-03-06 |
Etching And Cleaning Methods And Etching And Cleaning Apparatuses Used Therefor App 20110130010 - YAMASAKI; Shinya ;   et al. | 2011-06-02 |
Manufacturing method for semiconductor device Grant 7,943,516 - Aoki , et al. May 17, 2 | 2011-05-17 |
Etching and cleaning methods and etching and cleaning apparatuses used therefor Grant 7,862,658 - Yamasaki , et al. January 4, 2 | 2011-01-04 |
Method of forming a high-k film on a semiconductor device Grant 7,718,532 - Tomimori , et al. May 18, 2 | 2010-05-18 |
Semiconductor device and method for manufacturing same Grant 7,687,918 - Kunimune , et al. March 30, 2 | 2010-03-30 |
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device Grant 7,592,266 - Aoki , et al. September 22, 2 | 2009-09-22 |
Process for making a semiconductor device having a roughened surface Grant 7,560,372 - Tomimori , et al. July 14, 2 | 2009-07-14 |
Method for removing contamination and method for fabricating semiconductor device Grant 7,442,652 - Aoki , et al. October 28, 2 | 2008-10-28 |
Method For Manufacturing Semiconductor Device And Semiconductor Device App 20080248651 - Suzuki; Tatsuya ;   et al. | 2008-10-09 |
Cleaning solution and manufacturing method for semiconductor device App 20080214002 - Aoki; Hidemitsu ;   et al. | 2008-09-04 |
Method for manufacturing semiconductor device and semiconductor device Grant 7,402,530 - Suzuki , et al. July 22, 2 | 2008-07-22 |
Cleaning solution and manufacturing method for semiconductor device Grant 7,368,064 - Aoki , et al. May 6, 2 | 2008-05-06 |
Method of forming a high-k film on a semiconductor device App 20080081445 - Tomimori; Hiroaki ;   et al. | 2008-04-03 |
Tungsten metal removing solution and method for removing tungsten metal by use thereof Grant 7,351,354 - Shimizu , et al. April 1, 2 | 2008-04-01 |
Removing Solution, Cleaning Method For Semiconductor Substrate, And Process For Production Of Semiconductor Device App 20080066779 - AOKI; Hidemitsu ;   et al. | 2008-03-20 |
Cleaning solution for semiconductor substrate Grant 7,312,186 - Takashima , et al. December 25, 2 | 2007-12-25 |
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device Grant 7,312,160 - Aoki , et al. December 25, 2 | 2007-12-25 |
Manufacturing method of semiconductor device Grant 7,268,087 - Aoki , et al. September 11, 2 | 2007-09-11 |
Method of forming a high-k film on a semiconductor device Grant 7,192,835 - Tomimori , et al. March 20, 2 | 2007-03-20 |
Anticorrosive treating concentrate Grant 7,186,354 - Aoki , et al. March 6, 2 | 2007-03-06 |
Semiconductor device having a roughened surface Grant 7,170,172 - Tomimori , et al. January 30, 2 | 2007-01-30 |
Process or making a semiconductor device having a roughened surface App 20070015351 - Tomimori; Hiroaki ;   et al. | 2007-01-18 |
Semiconductor washing solution and method of producing semiconductor device using the same Grant 7,141,121 - Aoki November 28, 2 | 2006-11-28 |
Washing liquid composition for semiconductor substrate Grant 7,138,362 - Abe , et al. November 21, 2 | 2006-11-21 |
Method for manufacturing semiconductor device and semiconductor device App 20060234513 - Suzuki; Tatsuya ;   et al. | 2006-10-19 |
Post-CMP washing liquid composition Grant 7,087,562 - Abe , et al. August 8, 2 | 2006-08-08 |
Method for manufacturing semiconductor device and semiconductor device Grant 7,087,494 - Suzuki , et al. August 8, 2 | 2006-08-08 |
Substrate processing apparatus App 20060081180 - Aoki; Hidemitsu ;   et al. | 2006-04-20 |
Cleaning method, method for fabricating semiconductor device and cleaning solution Grant 6,998,352 - Aoki , et al. February 14, 2 | 2006-02-14 |
Stripping agent composition and method of stripping Grant 6,992,050 - Koita , et al. January 31, 2 | 2006-01-31 |
Etching and cleaning methods and etching and cleaning apparatuses used therefor App 20050257889 - Yamasaki, Shinya ;   et al. | 2005-11-24 |
Etching and cleaning methods and etching and cleaning apparatuses used therefor Grant 6,964,724 - Yamasaki , et al. November 15, 2 | 2005-11-15 |
Cleaning solution and manufacturing method for semiconductor device App 20050236362 - Aoki, Hidemitsu ;   et al. | 2005-10-27 |
Preparation process for semiconductor device Grant 6,949,465 - Aoki , et al. September 27, 2 | 2005-09-27 |
Tungsten metal removing solution and method for removing tungsten metal by use thereof App 20050156140 - Shimizu, Toshikazu ;   et al. | 2005-07-21 |
Semiconductor wafer surface and method of treating a semiconductor wafer surface Grant 6,897,150 - Aoki , et al. May 24, 2 | 2005-05-24 |
Method of manufacturing semiconductor device and apparatus for cleaning substrate Grant 6,890,391 - Aoki , et al. May 10, 2 | 2005-05-10 |
Semiconductor device fabricating method and treating liquid Grant 6,890,864 - Aoki , et al. May 10, 2 | 2005-05-10 |
Chemical solution treatment apparatus for semiconductor substrate Grant 6,877,518 - Watanabe , et al. April 12, 2 | 2005-04-12 |
Stripping composition Grant 6,869,921 - Koito , et al. March 22, 2 | 2005-03-22 |
Method of washing a semiconductor wafer Grant 6,864,187 - Tomimori , et al. March 8, 2 | 2005-03-08 |
Manufacturing method of semiconductor device App 20040266171 - Aoki, Hidemitsu ;   et al. | 2004-12-30 |
Method and apparatus for storing a semiconductor wafer after its CMP polishing Grant 6,833,109 - Aoki , et al. December 21, 2 | 2004-12-21 |
Method for manufacturing semiconductor device App 20040248350 - Tomimori, Hiroaki ;   et al. | 2004-12-09 |
Cleaning water for cleaning a wafer and method of cleaning a wafer Grant 6,797,648 - Aoki , et al. September 28, 2 | 2004-09-28 |
Manufacturing method of semicondcutor device Grant 6,787,480 - Aoki , et al. September 7, 2 | 2004-09-07 |
Photoresist residue remover composition Grant 6,787,293 - Oowada , et al. September 7, 2 | 2004-09-07 |
Cleaning solution for semiconductor substrate App 20040161933 - Takashima, Masayuki ;   et al. | 2004-08-19 |
Method for cleaning semiconductor wafer after chemical mechanical polishing on copper wiring Grant 6,767,409 - Aoki , et al. July 27, 2 | 2004-07-27 |
Semiconductor device and method for manufacturing same App 20040130030 - Kunimune, Yorinobu ;   et al. | 2004-07-08 |
Liquid composition for cleaning hydrophobic substrate and cleaning method therewith App 20040116315 - Aoki, Hidemitsu ;   et al. | 2004-06-17 |
Method for manufacturing semiconductor device and semiconductor device App 20040082130 - Suzuki, Tatsuya ;   et al. | 2004-04-29 |
Method of manufacturing semiconductor device and apparatus for cleaning substrate App 20040074526 - Aoki, Hidemitsu ;   et al. | 2004-04-22 |
Etching and cleaning methods and etching and cleaning apparatuses used therefor App 20040053508 - Yamasaki, Shinya ;   et al. | 2004-03-18 |
Semiconductor device washing apparatus and a method of washing a semiconductor device Grant 6,695,683 - Aoki February 24, 2 | 2004-02-24 |
Stripping agent composition and method of stripping App 20040029051 - Koita, Tatsuya ;   et al. | 2004-02-12 |
Etching and cleaning methods and etching and cleaning apparatus used therefor Grant 6,683,007 - Yamasaki , et al. January 27, 2 | 2004-01-27 |
Preparation process for semiconductor device App 20040009658 - Aoki, Hidemitsu ;   et al. | 2004-01-15 |
Photoresist residue remover composition App 20040002020 - Oowada, Takuo ;   et al. | 2004-01-01 |
Post-CMP washing liquid composition App 20030216270 - Abe, Yumiko ;   et al. | 2003-11-20 |
Semiconductor washing solution and method of producing semiconductor device using the same App 20030205241 - Aoki, Hidemitsu | 2003-11-06 |
Semiconductor device and method of manufacturing the same capable of reducing deterioration of low dielectric constant film Grant 6,624,061 - Aoki September 23, 2 | 2003-09-23 |
Washing liquid composition for semiconductor substrate App 20030171233 - Abe, Yumiko ;   et al. | 2003-09-11 |
Chemical solution treatment apparatus for semiconductor substrate App 20030168088 - Watanabe, Kaori ;   et al. | 2003-09-11 |
Method for removing contamination and method for fabricating semiconductor device App 20030148627 - Aoki, Hidemitsu ;   et al. | 2003-08-07 |
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device App 20030139045 - Aoki, Hidemitsu ;   et al. | 2003-07-24 |
Semiconductor device fabricating method and treating liquid App 20030134507 - Aoki, Hidemitsu ;   et al. | 2003-07-17 |
Method of forming a semiconductor device by simultaneously cleaning both sides of a wafer using different cleaning solutions Grant 6,592,677 - Tomimori , et al. July 15, 2 | 2003-07-15 |
Stripping composition App 20030130147 - Koito, Tatsuya ;   et al. | 2003-07-10 |
Semiconductor device and method for producing the same App 20030111731 - Tomimori, Hiroaki ;   et al. | 2003-06-19 |
Wash water or immersion water used during semiconductor manufacturing App 20030094610 - Aoki, Hidemitsu ;   et al. | 2003-05-22 |
Cleaning method, method for fabricating semiconductor device and cleaning solution App 20030087524 - Aoki, Hidemitsu ;   et al. | 2003-05-08 |
Semiconductor device fabricating method and treating liquid App 20030027418 - Aoki, Hidemitsu ;   et al. | 2003-02-06 |
Method of washing a semiconductor wafer App 20030013310 - Tomimori, Hiroaki ;   et al. | 2003-01-16 |
Cleaning water for cleaning a wafer and method of cleaning a wafer App 20020189639 - Aoki, Hidemitsu ;   et al. | 2002-12-19 |
Manufacturing method of semiconductor device App 20020155702 - Aoki, Hidemitsu ;   et al. | 2002-10-24 |
Method for removing dry-etching residue in a semiconductor device fabricating process Grant 6,465,352 - Aoki October 15, 2 | 2002-10-15 |
Composition of photoresist remover effective against etching residue without damage to corrodible metal layer and process using the same App 20020146647 - Aoki, Hidemitsu ;   et al. | 2002-10-10 |
Method for cleaning semiconductor wafer after chemical mechanical polishing on copper wiring App 20020144710 - Aoki, Hidemitsu ;   et al. | 2002-10-10 |
Substrate-cleaning method and substrate-cleaning solution Grant 6,444,583 - Aoki September 3, 2 | 2002-09-03 |
Manufacturing method of semiconductor device App 20020072191 - Aoki, Hidemitsu ;   et al. | 2002-06-13 |
Semiconductor Device And Method Of Manufacturing The Same Capable Of Reducing Deterioration Of Low Dielectric Constant Film App 20020066941 - AOKI, HIDEMITSU | 2002-06-06 |
Method for cleaning semiconductor wafer after chemical mechanical polishing on copper wiring Grant 6,387,190 - Aoki , et al. May 14, 2 | 2002-05-14 |
Method Of Manufacturing A Semiconductor Device App 20020034874 - AOKI, HIDEMITSU | 2002-03-21 |
Cleaning liquid App 20010056052 - Aoki, Hidemitsu ;   et al. | 2001-12-27 |
Method for cleaning a substrate and cleaning solution Grant 6,319,801 - Wake , et al. November 20, 2 | 2001-11-20 |
Anticorrosive treating concentrate App 20010030315 - Aoki, Hidemitsu ;   et al. | 2001-10-18 |
Substrate-cleaning method and substrate-cleaning solution App 20010029104 - Aoki, Hidemitsu | 2001-10-11 |
Process for manufacturing a semiconductor device App 20010024852 - Aoki, Hidemitsu ;   et al. | 2001-09-27 |
Remover for a ruthenium containing metal and use thereof App 20010023701 - Aoki, Hidemitsu ;   et al. | 2001-09-27 |
Semiconductor device washing apparatus and a method of washing a semiconductor device App 20010021623 - Aoki, Hidemitsu | 2001-09-13 |
Stripper composition and stripping method App 20010014534 - Aoki, Hidemitsu ;   et al. | 2001-08-16 |
Anticorrosive agent App 20010011515 - Aoki, Hidemitsu ;   et al. | 2001-08-09 |
Method of supplying a chemical mechanical polishing liquid and apparatus therefor Grant 6,183,351 - Aoki February 6, 2 | 2001-02-06 |
Method for manufacturing semiconductor device Grant 6,136,708 - Aoki October 24, 2 | 2000-10-24 |
Cleaning solution for cleaning substrates to which a metallic wiring has been applied Grant 6,080,709 - Ishikawa , et al. June 27, 2 | 2000-06-27 |
Method for collecting a metallic contaminants from a wafer Grant 5,994,142 - Yamasaki , et al. November 30, 1 | 1999-11-30 |
Method and system for generating electrolyzed water Grant 5,833,831 - Kitajima , et al. November 10, 1 | 1998-11-10 |
Method for producing electrolyzed water Grant 5,762,779 - Shiramizu , et al. June 9, 1 | 1998-06-09 |
Method for wet processing of a semiconductor substrate Grant 5,676,760 - Aoki , et al. October 14, 1 | 1997-10-14 |
Method and apparatus for cleaning electronic parts Grant 5,635,053 - Aoki , et al. June 3, 1 | 1997-06-03 |
Electrolytic ionized water producing apparatus Grant 5,616,221 - Aoki , et al. April 1, 1 | 1997-04-01 |
Method for producing electrolyzed water Grant 5,599,438 - Shiramizu , et al. February 4, 1 | 1997-02-04 |
Method and apparatus for wet treatment of solid surfaces Grant 5,578,193 - Aoki , et al. November 26, 1 | 1996-11-26 |
Method for producing electrolyzed water Grant 5,543,030 - Shiramizu , et al. August 6, 1 | 1996-08-06 |