loadpatents
name:-0.068717002868652
name:-0.065860986709595
name:-0.0014920234680176
Aoki; Hidemitsu Patent Filings

Aoki; Hidemitsu

Patent Applications and Registrations

Patent applications and USPTO patent grants for Aoki; Hidemitsu.The latest application filed is for "etching and cleaning methods and etching and cleaning apparatuses used therefor".

Company Profile
0.58.50
  • Aoki; Hidemitsu - Tokyo N/A JP
  • Aoki; Hidemitsu - Kanagawa JP
  • Aoki; Hidemitsu - Kawasaki JP
  • Aoki; Hidemitsu - Minato-ku JP
  • Aoki, Hidemitsu - Kawasaki-shi JP
  • Aoki, Hidemitsu - Nakahara-ku JP
  • Aoki; Hidemitsu - Toyko JP
*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.
Patent Activity
PatentDate
Etching and cleaning methods and etching and cleaning apparatuses used therefor
Grant 8,420,549 - Yamasaki , et al. April 16, 2
2013-04-16
Method for manufacturing semiconductor device and semiconductor device
Grant 8,129,287 - Suzuki , et al. March 6, 2
2012-03-06
Etching And Cleaning Methods And Etching And Cleaning Apparatuses Used Therefor
App 20110130010 - YAMASAKI; Shinya ;   et al.
2011-06-02
Manufacturing method for semiconductor device
Grant 7,943,516 - Aoki , et al. May 17, 2
2011-05-17
Etching and cleaning methods and etching and cleaning apparatuses used therefor
Grant 7,862,658 - Yamasaki , et al. January 4, 2
2011-01-04
Method of forming a high-k film on a semiconductor device
Grant 7,718,532 - Tomimori , et al. May 18, 2
2010-05-18
Semiconductor device and method for manufacturing same
Grant 7,687,918 - Kunimune , et al. March 30, 2
2010-03-30
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device
Grant 7,592,266 - Aoki , et al. September 22, 2
2009-09-22
Process for making a semiconductor device having a roughened surface
Grant 7,560,372 - Tomimori , et al. July 14, 2
2009-07-14
Method for removing contamination and method for fabricating semiconductor device
Grant 7,442,652 - Aoki , et al. October 28, 2
2008-10-28
Method For Manufacturing Semiconductor Device And Semiconductor Device
App 20080248651 - Suzuki; Tatsuya ;   et al.
2008-10-09
Cleaning solution and manufacturing method for semiconductor device
App 20080214002 - Aoki; Hidemitsu ;   et al.
2008-09-04
Method for manufacturing semiconductor device and semiconductor device
Grant 7,402,530 - Suzuki , et al. July 22, 2
2008-07-22
Cleaning solution and manufacturing method for semiconductor device
Grant 7,368,064 - Aoki , et al. May 6, 2
2008-05-06
Method of forming a high-k film on a semiconductor device
App 20080081445 - Tomimori; Hiroaki ;   et al.
2008-04-03
Tungsten metal removing solution and method for removing tungsten metal by use thereof
Grant 7,351,354 - Shimizu , et al. April 1, 2
2008-04-01
Removing Solution, Cleaning Method For Semiconductor Substrate, And Process For Production Of Semiconductor Device
App 20080066779 - AOKI; Hidemitsu ;   et al.
2008-03-20
Cleaning solution for semiconductor substrate
Grant 7,312,186 - Takashima , et al. December 25, 2
2007-12-25
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device
Grant 7,312,160 - Aoki , et al. December 25, 2
2007-12-25
Manufacturing method of semiconductor device
Grant 7,268,087 - Aoki , et al. September 11, 2
2007-09-11
Method of forming a high-k film on a semiconductor device
Grant 7,192,835 - Tomimori , et al. March 20, 2
2007-03-20
Anticorrosive treating concentrate
Grant 7,186,354 - Aoki , et al. March 6, 2
2007-03-06
Semiconductor device having a roughened surface
Grant 7,170,172 - Tomimori , et al. January 30, 2
2007-01-30
Process or making a semiconductor device having a roughened surface
App 20070015351 - Tomimori; Hiroaki ;   et al.
2007-01-18
Semiconductor washing solution and method of producing semiconductor device using the same
Grant 7,141,121 - Aoki November 28, 2
2006-11-28
Washing liquid composition for semiconductor substrate
Grant 7,138,362 - Abe , et al. November 21, 2
2006-11-21
Method for manufacturing semiconductor device and semiconductor device
App 20060234513 - Suzuki; Tatsuya ;   et al.
2006-10-19
Post-CMP washing liquid composition
Grant 7,087,562 - Abe , et al. August 8, 2
2006-08-08
Method for manufacturing semiconductor device and semiconductor device
Grant 7,087,494 - Suzuki , et al. August 8, 2
2006-08-08
Substrate processing apparatus
App 20060081180 - Aoki; Hidemitsu ;   et al.
2006-04-20
Cleaning method, method for fabricating semiconductor device and cleaning solution
Grant 6,998,352 - Aoki , et al. February 14, 2
2006-02-14
Stripping agent composition and method of stripping
Grant 6,992,050 - Koita , et al. January 31, 2
2006-01-31
Etching and cleaning methods and etching and cleaning apparatuses used therefor
App 20050257889 - Yamasaki, Shinya ;   et al.
2005-11-24
Etching and cleaning methods and etching and cleaning apparatuses used therefor
Grant 6,964,724 - Yamasaki , et al. November 15, 2
2005-11-15
Cleaning solution and manufacturing method for semiconductor device
App 20050236362 - Aoki, Hidemitsu ;   et al.
2005-10-27
Preparation process for semiconductor device
Grant 6,949,465 - Aoki , et al. September 27, 2
2005-09-27
Tungsten metal removing solution and method for removing tungsten metal by use thereof
App 20050156140 - Shimizu, Toshikazu ;   et al.
2005-07-21
Semiconductor wafer surface and method of treating a semiconductor wafer surface
Grant 6,897,150 - Aoki , et al. May 24, 2
2005-05-24
Method of manufacturing semiconductor device and apparatus for cleaning substrate
Grant 6,890,391 - Aoki , et al. May 10, 2
2005-05-10
Semiconductor device fabricating method and treating liquid
Grant 6,890,864 - Aoki , et al. May 10, 2
2005-05-10
Chemical solution treatment apparatus for semiconductor substrate
Grant 6,877,518 - Watanabe , et al. April 12, 2
2005-04-12
Stripping composition
Grant 6,869,921 - Koito , et al. March 22, 2
2005-03-22
Method of washing a semiconductor wafer
Grant 6,864,187 - Tomimori , et al. March 8, 2
2005-03-08
Manufacturing method of semiconductor device
App 20040266171 - Aoki, Hidemitsu ;   et al.
2004-12-30
Method and apparatus for storing a semiconductor wafer after its CMP polishing
Grant 6,833,109 - Aoki , et al. December 21, 2
2004-12-21
Method for manufacturing semiconductor device
App 20040248350 - Tomimori, Hiroaki ;   et al.
2004-12-09
Cleaning water for cleaning a wafer and method of cleaning a wafer
Grant 6,797,648 - Aoki , et al. September 28, 2
2004-09-28
Manufacturing method of semicondcutor device
Grant 6,787,480 - Aoki , et al. September 7, 2
2004-09-07
Photoresist residue remover composition
Grant 6,787,293 - Oowada , et al. September 7, 2
2004-09-07
Cleaning solution for semiconductor substrate
App 20040161933 - Takashima, Masayuki ;   et al.
2004-08-19
Method for cleaning semiconductor wafer after chemical mechanical polishing on copper wiring
Grant 6,767,409 - Aoki , et al. July 27, 2
2004-07-27
Semiconductor device and method for manufacturing same
App 20040130030 - Kunimune, Yorinobu ;   et al.
2004-07-08
Liquid composition for cleaning hydrophobic substrate and cleaning method therewith
App 20040116315 - Aoki, Hidemitsu ;   et al.
2004-06-17
Method for manufacturing semiconductor device and semiconductor device
App 20040082130 - Suzuki, Tatsuya ;   et al.
2004-04-29
Method of manufacturing semiconductor device and apparatus for cleaning substrate
App 20040074526 - Aoki, Hidemitsu ;   et al.
2004-04-22
Etching and cleaning methods and etching and cleaning apparatuses used therefor
App 20040053508 - Yamasaki, Shinya ;   et al.
2004-03-18
Semiconductor device washing apparatus and a method of washing a semiconductor device
Grant 6,695,683 - Aoki February 24, 2
2004-02-24
Stripping agent composition and method of stripping
App 20040029051 - Koita, Tatsuya ;   et al.
2004-02-12
Etching and cleaning methods and etching and cleaning apparatus used therefor
Grant 6,683,007 - Yamasaki , et al. January 27, 2
2004-01-27
Preparation process for semiconductor device
App 20040009658 - Aoki, Hidemitsu ;   et al.
2004-01-15
Photoresist residue remover composition
App 20040002020 - Oowada, Takuo ;   et al.
2004-01-01
Post-CMP washing liquid composition
App 20030216270 - Abe, Yumiko ;   et al.
2003-11-20
Semiconductor washing solution and method of producing semiconductor device using the same
App 20030205241 - Aoki, Hidemitsu
2003-11-06
Semiconductor device and method of manufacturing the same capable of reducing deterioration of low dielectric constant film
Grant 6,624,061 - Aoki September 23, 2
2003-09-23
Washing liquid composition for semiconductor substrate
App 20030171233 - Abe, Yumiko ;   et al.
2003-09-11
Chemical solution treatment apparatus for semiconductor substrate
App 20030168088 - Watanabe, Kaori ;   et al.
2003-09-11
Method for removing contamination and method for fabricating semiconductor device
App 20030148627 - Aoki, Hidemitsu ;   et al.
2003-08-07
Removing solution, cleaning method for semiconductor substrate, and process for production of semiconductor device
App 20030139045 - Aoki, Hidemitsu ;   et al.
2003-07-24
Semiconductor device fabricating method and treating liquid
App 20030134507 - Aoki, Hidemitsu ;   et al.
2003-07-17
Method of forming a semiconductor device by simultaneously cleaning both sides of a wafer using different cleaning solutions
Grant 6,592,677 - Tomimori , et al. July 15, 2
2003-07-15
Stripping composition
App 20030130147 - Koito, Tatsuya ;   et al.
2003-07-10
Semiconductor device and method for producing the same
App 20030111731 - Tomimori, Hiroaki ;   et al.
2003-06-19
Wash water or immersion water used during semiconductor manufacturing
App 20030094610 - Aoki, Hidemitsu ;   et al.
2003-05-22
Cleaning method, method for fabricating semiconductor device and cleaning solution
App 20030087524 - Aoki, Hidemitsu ;   et al.
2003-05-08
Semiconductor device fabricating method and treating liquid
App 20030027418 - Aoki, Hidemitsu ;   et al.
2003-02-06
Method of washing a semiconductor wafer
App 20030013310 - Tomimori, Hiroaki ;   et al.
2003-01-16
Cleaning water for cleaning a wafer and method of cleaning a wafer
App 20020189639 - Aoki, Hidemitsu ;   et al.
2002-12-19
Manufacturing method of semiconductor device
App 20020155702 - Aoki, Hidemitsu ;   et al.
2002-10-24
Method for removing dry-etching residue in a semiconductor device fabricating process
Grant 6,465,352 - Aoki October 15, 2
2002-10-15
Composition of photoresist remover effective against etching residue without damage to corrodible metal layer and process using the same
App 20020146647 - Aoki, Hidemitsu ;   et al.
2002-10-10
Method for cleaning semiconductor wafer after chemical mechanical polishing on copper wiring
App 20020144710 - Aoki, Hidemitsu ;   et al.
2002-10-10
Substrate-cleaning method and substrate-cleaning solution
Grant 6,444,583 - Aoki September 3, 2
2002-09-03
Manufacturing method of semiconductor device
App 20020072191 - Aoki, Hidemitsu ;   et al.
2002-06-13
Semiconductor Device And Method Of Manufacturing The Same Capable Of Reducing Deterioration Of Low Dielectric Constant Film
App 20020066941 - AOKI, HIDEMITSU
2002-06-06
Method for cleaning semiconductor wafer after chemical mechanical polishing on copper wiring
Grant 6,387,190 - Aoki , et al. May 14, 2
2002-05-14
Method Of Manufacturing A Semiconductor Device
App 20020034874 - AOKI, HIDEMITSU
2002-03-21
Cleaning liquid
App 20010056052 - Aoki, Hidemitsu ;   et al.
2001-12-27
Method for cleaning a substrate and cleaning solution
Grant 6,319,801 - Wake , et al. November 20, 2
2001-11-20
Anticorrosive treating concentrate
App 20010030315 - Aoki, Hidemitsu ;   et al.
2001-10-18
Substrate-cleaning method and substrate-cleaning solution
App 20010029104 - Aoki, Hidemitsu
2001-10-11
Process for manufacturing a semiconductor device
App 20010024852 - Aoki, Hidemitsu ;   et al.
2001-09-27
Remover for a ruthenium containing metal and use thereof
App 20010023701 - Aoki, Hidemitsu ;   et al.
2001-09-27
Semiconductor device washing apparatus and a method of washing a semiconductor device
App 20010021623 - Aoki, Hidemitsu
2001-09-13
Stripper composition and stripping method
App 20010014534 - Aoki, Hidemitsu ;   et al.
2001-08-16
Anticorrosive agent
App 20010011515 - Aoki, Hidemitsu ;   et al.
2001-08-09
Method of supplying a chemical mechanical polishing liquid and apparatus therefor
Grant 6,183,351 - Aoki February 6, 2
2001-02-06
Method for manufacturing semiconductor device
Grant 6,136,708 - Aoki October 24, 2
2000-10-24
Cleaning solution for cleaning substrates to which a metallic wiring has been applied
Grant 6,080,709 - Ishikawa , et al. June 27, 2
2000-06-27
Method for collecting a metallic contaminants from a wafer
Grant 5,994,142 - Yamasaki , et al. November 30, 1
1999-11-30
Method and system for generating electrolyzed water
Grant 5,833,831 - Kitajima , et al. November 10, 1
1998-11-10
Method for producing electrolyzed water
Grant 5,762,779 - Shiramizu , et al. June 9, 1
1998-06-09
Method for wet processing of a semiconductor substrate
Grant 5,676,760 - Aoki , et al. October 14, 1
1997-10-14
Method and apparatus for cleaning electronic parts
Grant 5,635,053 - Aoki , et al. June 3, 1
1997-06-03
Electrolytic ionized water producing apparatus
Grant 5,616,221 - Aoki , et al. April 1, 1
1997-04-01
Method for producing electrolyzed water
Grant 5,599,438 - Shiramizu , et al. February 4, 1
1997-02-04
Method and apparatus for wet treatment of solid surfaces
Grant 5,578,193 - Aoki , et al. November 26, 1
1996-11-26
Method for producing electrolyzed water
Grant 5,543,030 - Shiramizu , et al. August 6, 1
1996-08-06

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