Antonelli; George Andrew
Patent Applications and Registrations
Patent applications and USPTO patent grants for Antonelli; George Andrew.The latest application filed is for "vacuum-integrated hardmask processes and apparatus".
Company Profile
11.37.36
- Antonelli; George Andrew - Portland OR
Patent Activity
| Patent | Date |
|---|---|
| Vacuum-integrated Hardmask Processes And Apparatus App 20220075260 - Marks; Jeffrey ; et al. | 2022-03-10 |
| Vacuum-integrated hardmask processes and apparatus Grant 11,209,729 - Marks , et al. December 28, 2 | 2021-12-28 |
| Optical metrology device using numerical aperture reduction Grant 11,162,897 - Antonelli , et al. November 2, 2 | 2021-11-02 |
| Target For Optical Measurement Of Trenches App 20210325317 - KELLER; Nicholas JAMES ; et al. | 2021-10-21 |
| Optical metrology system using infrared wavelengths Grant 10,901,241 - Antonelli , et al. January 26, 2 | 2021-01-26 |
| Optical Metrology Device Using Numerical Aperture Reduction App 20200363332 - Antonelli; George Andrew ; et al. | 2020-11-19 |
| Vacuum-integrated hardmask processes and apparatus Grant 10,831,096 - Marks , et al. November 10, 2 | 2020-11-10 |
| Light source failure identification in an optical metrology device Grant 10,775,149 - Antonelli , et al. September 15, 2 | 2020-09-15 |
| Vacuum-integrated Hardmask Processes And Apparatus App 20200089104 - Marks; Jeffrey ; et al. | 2020-03-19 |
| Vacuum-integrated hardmask processes and apparatus Grant 10,514,598 - Marks , et al. Dec | 2019-12-24 |
| Pecvd Apparatus For In-situ Deposition Of Film Stacks App 20190376186 - Haverkamp; Jason Dirk ; et al. | 2019-12-12 |
| Scanning white-light interferometry system for characterization of patterned semiconductor features Grant 10,288,408 - Smith , et al. | 2019-05-14 |
| Vacuum-integrated Hardmask Processes And Apparatus App 20190094685 - Marks; Jeffrey ; et al. | 2019-03-28 |
| Clean resistant windows for ultraviolet thermal processing Grant 10,240,236 - Lee , et al. | 2019-03-26 |
| PECVD apparatus for in-situ deposition of film stacks Grant 10,214,816 - Haverkamp , et al. Feb | 2019-02-26 |
| Method And Apparatus For Remote Plasma Treatment For Reducing Metal Oxides On A Metal Seed Layer App 20180350670 - Spurlin; Tighe A. ; et al. | 2018-12-06 |
| Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursor Grant 10,049,921 - Draeger , et al. August 14, 2 | 2018-08-14 |
| Scanning White-light Interferometry System For Characterization Of Patterned Semiconductor Features App 20180156597 - Smith; Nigel P. ; et al. | 2018-06-07 |
| Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layer Grant 9,865,501 - Spurlin , et al. January 9, 2 | 2018-01-09 |
| Vacuum-integrated Hardmask Processes And Apparatus App 20180004083 - Marks; Jeffrey ; et al. | 2018-01-04 |
| Vacuum-integrated hardmask processes and apparatus Grant 9,778,561 - Marks , et al. October 3, 2 | 2017-10-03 |
| Low-k damage repair and pore sealing agents with photosensitive end groups Grant 9,502,255 - Antonelli , et al. November 22, 2 | 2016-11-22 |
| Clean Resistant Windows For Ultraviolet Thermal Processing App 20160258057 - Lee; James ; et al. | 2016-09-08 |
| Reactive Ultraviolet Thermal Processing Of Low Dielectric Constant Materials App 20160138160 - Lambert; Darcy E. ; et al. | 2016-05-19 |
| Oxygen-containing ceramic hard masks and associated wet-cleans Grant 9,337,068 - Antonelli , et al. May 10, 2 | 2016-05-10 |
| Low-k Damage Repair And Pore Sealing Agents With Photosensitive End Groups App 20160111288 - Antonelli; George Andrew ; et al. | 2016-04-21 |
| Flowable Dielectric For Selective Ultra Low-k Pore Sealing App 20160056071 - Draeger; Nerissa Sue ; et al. | 2016-02-25 |
| Low-k Dielectric Film Formation App 20160042943 - Ribaudo; Troy Daniel ; et al. | 2016-02-11 |
| Low-K oxide deposition by hydrolysis and condensation Grant 9,245,739 - Ndiege , et al. January 26, 2 | 2016-01-26 |
| Cleaning Of Carbon-based Contaminants In Metal Interconnects For Interconnect Capping Applications App 20150380296 - Antonelli; George Andrew ; et al. | 2015-12-31 |
| Atmospheric Plasma Apparatus For Semiconductor Processing App 20150376792 - Spurlin; Tighe A. ; et al. | 2015-12-31 |
| Vacuum-integrated Hardmask Processes And Apparatus App 20150221519 - Marks; Jeffrey ; et al. | 2015-08-06 |
| Methods for reducing metal oxide surfaces to modified metal surfaces using a gaseous reducing environment Grant 9,070,750 - Spurlin , et al. June 30, 2 | 2015-06-30 |
| In-situ deposition of film stacks Grant 9,028,924 - Haverkamp , et al. May 12, 2 | 2015-05-12 |
| In-situ Deposition Of Film Stacks App 20150013607 - Haverkamp; Jason Dirk ; et al. | 2015-01-15 |
| Low-k Oxide Deposition By Hydrolysis And Condensation App 20150004806 - Ndiege; Nicholas Muga ; et al. | 2015-01-01 |
| Hardmask materials Grant 8,846,525 - Rangarajan , et al. September 30, 2 | 2014-09-30 |
| Method And Apparatus For Remote Plasma Treatment For Reducing Metal Oxides On A Metal Seed Layer App 20140256128 - Spurlin; Tighe A. ; et al. | 2014-09-11 |
| Oxygen-containing Ceramic Hard Masks And Associated Wet-cleans App 20140175617 - Antonelli; George Andrew ; et al. | 2014-06-26 |
| In-situ deposition of film stacks Grant 8,741,394 - Haverkamp , et al. June 3, 2 | 2014-06-03 |
| Smooth silicon-containing films Grant 8,709,551 - Fox , et al. April 29, 2 | 2014-04-29 |
| Hardmask Materials App 20130330932 - Rangarajan; Vishwanathan ; et al. | 2013-12-12 |
| PECVD flowable dielectric gap fill Grant 8,557,712 - Antonelli , et al. October 15, 2 | 2013-10-15 |
| Hardmask materials Grant 8,536,073 - Rangarajan , et al. September 17, 2 | 2013-09-17 |
| Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layer Grant 8,479,683 - Antonelli , et al. July 9, 2 | 2013-07-09 |
| In-situ Deposition Of Film Stacks App 20130171834 - Haverkamp; Jason ; et al. | 2013-07-04 |
| Silicon Nitride Films For Semiconductor Device Applications App 20130157466 - Fox; Keith ; et al. | 2013-06-20 |
| Depositing Conformal Boron Nitride Films App 20130008378 - Antonelli; George Andrew ; et al. | 2013-01-10 |
| Hardmask Materials App 20120276752 - RANGARAJAN; Vishwanathan ; et al. | 2012-11-01 |
| Depositing conformal boron nitride film by CVD without plasma Grant 8,288,292 - Antonelli , et al. October 16, 2 | 2012-10-16 |
| Interfacial capping layers for interconnects Grant 8,268,722 - Yu , et al. September 18, 2 | 2012-09-18 |
| Hardmask materials Grant 8,247,332 - Rangarajan , et al. August 21, 2 | 2012-08-21 |
| Remote plasma processing of interface surfaces Grant 8,217,513 - Antonelli , et al. July 10, 2 | 2012-07-10 |
| Hardmask materials Grant 8,178,443 - Rangarajan , et al. May 15, 2 | 2012-05-15 |
| Remote plasma processing of interface surfaces Grant 8,084,339 - Antonelli , et al. December 27, 2 | 2011-12-27 |
| Depositing Conformal Boron Nitride Films App 20110244694 - Antonelli; George Andrew ; et al. | 2011-10-06 |
| Smooth Silicon-Containing Films App 20110236600 - Fox; Keith ; et al. | 2011-09-29 |
| In-Situ Deposition of Film Stacks App 20110236594 - Haverkamp; Jason ; et al. | 2011-09-29 |
| Hardmask Materials App 20110135557 - Rangarajan; Vishwanathan ; et al. | 2011-06-09 |
| Remote Plasma Processing Of Interface Surfaces App 20110120377 - Antonelli; George Andrew ; et al. | 2011-05-26 |
| Interfacial layers for electromigration resistance improvement in damascene interconnects Grant 7,858,510 - Banerji , et al. December 28, 2 | 2010-12-28 |
| Remote Plasma Processing Of Interface Surfaces App 20100317178 - Antonelli; George Andrew ; et al. | 2010-12-16 |
| Remote Plasma Processing Of Interface Surfaces App 20100317198 - Antonelli; George Andrew ; et al. | 2010-12-16 |
| Interfacial Capping Layers For Interconnects App 20100308463 - Yu; Jengyi ; et al. | 2010-12-09 |
| Interfacial layers for electromigration resistance improvement in damascene interconnects Grant 7,799,671 - Banerji , et al. September 21, 2 | 2010-09-21 |
| Interfacial layers for electromigration resistance improvement in damascene interconnects Grant 7,648,899 - Banerji , et al. January 19, 2 | 2010-01-19 |
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