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Patent applications and USPTO patent grants for Antley; Samuel S..The latest application filed is for "method and apparatus for measuring plasma density in processing reactors using a long dielectric tube".
Patent | Date |
---|---|
Temperature control of plasma density probe App 20070074812 - Mitrovic; Andrej ;   et al. | 2007-04-05 |
Method and apparatus for measuring plasma density in processing reactors using a long dielectric tube App 20070074811 - Moroz; Paul ;   et al. | 2007-04-05 |
Closed-drift hall effect plasma vacuum pump for process reactors Grant 6,899,527 - Quon , et al. May 31, 2 | 2005-05-31 |
Closed-drift hall effect plasma vacuum pump for process reactors App 20040151595 - Quon, Bill H. ;   et al. | 2004-08-05 |
Applied plasma duct system Grant 6,729,850 - Dandl , et al. May 4, 2 | 2004-05-04 |
Applied plasma duct system App 20030117080 - Dandl, Raphael A. ;   et al. | 2003-06-26 |
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