Antaki; Robert
Patent Applications and Registrations
Patent applications and USPTO patent grants for Antaki; Robert.The latest application filed is for "fabrication of advanced silicon-based mems devices".
- Antaki; Robert - St-Luc CA
| Patent | Date |
|---|---|
| Method of fabricating silicon-based MEMS devices Grant 7,459,329 - Ouellet , et al. December 2, 2 | 2008-12-02 |
| Fabrication of advanced silicon-based MEMS devices Grant 7,160,752 - Ouellet , et al. January 9, 2 | 2007-01-09 |
| Method of fabricating silicon-based MEMS devices Grant 7,144,750 - Ouellet , et al. December 5, 2 | 2006-12-05 |
| Fabrication of advanced silicon-based MEMS devices App 20060166403 - Ouellet; Luc ; et al. | 2006-07-27 |
| Method of fabricating silicon-based MEMS devices App 20060110895 - Ouellet; Luc ; et al. | 2006-05-25 |
| Method Of Fabricating Silicon-based Mems Devices App 20050233492 - Ouellet, Luc ; et al. | 2005-10-20 |
| Fabrication of microstructures with vacuum-sealed cavity Grant 6,902,656 - Ouellet , et al. June 7, 2 | 2005-06-07 |
| Fabrication of advanced silicon-based MEMS devices App 20040157426 - Ouellet, Luc ; et al. | 2004-08-12 |
| Method of inspecting an anisotropic etch in a microstructure Grant 6,770,213 - Antaki , et al. August 3, 2 | 2004-08-03 |
| Method of aligning a photolithographic mask to a crystal plane Grant 6,686,214 - Antaki , et al. February 3, 2 | 2004-02-03 |
| Fabrication of microstructures with vacuum-sealed cavity App 20030217915 - Ouellet, Luc ; et al. | 2003-11-27 |
| Method of inspecting an anisotropic etch in a microstructure App 20020088769 - Antaki, Robert ; et al. | 2002-07-11 |
| Method of aligning a photolithographic mask to a crystal plane App 20020072193 - Antaki, Robert ; et al. | 2002-06-13 |
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