Patent | Date |
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Charged particle beam writing apparatus and charged particle beam writing method Grant RE47,707 - Kato , et al. No | 2019-11-05 |
Charged particle beam lithography apparatus, inspection apparatus and inspection method of pattern writing data Grant 9,164,044 - Hara , et al. October 20, 2 | 2015-10-20 |
Charged particle beam writing apparatus and irradiation time apportionment method of charged particle beams for multiple writing Grant 9,141,750 - Yashima , et al. September 22, 2 | 2015-09-22 |
Charged particle beam writing apparatus and charged particle beam writing method using a generated frame that surrounds a first data processing block Grant 9,006,691 - Yashima , et al. April 14, 2 | 2015-04-14 |
Charged particle beam writing apparatus and charged particle beam writing method Grant 8,872,141 - Kato , et al. October 28, 2 | 2014-10-28 |
Charged particle beam writing method and apparatus therefor Grant 8,755,924 - Anpo June 17, 2 | 2014-06-17 |
Charged Particle Beam Writing Apparatus And Irradiation Time Apportionment Method Of Charged Particle Beams For Multiple Writing App 20140017349 - Yashima; Jun ;   et al. | 2014-01-16 |
Charged particle beam writing apparatus Grant 8,563,952 - Yashima , et al. October 22, 2 | 2013-10-22 |
Charged Particle Beam Lithography Apparatus, Inspection Apparatus And Inspection Method Of Pattern Writing Data App 20130264478 - HARA; Shigehiro ;   et al. | 2013-10-10 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20130256519 - KATO; Yasuo ;   et al. | 2013-10-03 |
Charged particle beam pattern forming apparatus and charged particle beam pattern forming method Grant 8,502,175 - Nakayamada , et al. August 6, 2 | 2013-08-06 |
Charged particle beam writing method and apparatus therefor Grant 8,471,225 - Anpo June 25, 2 | 2013-06-25 |
Charged particle beam drawing apparatus and control method thereof Grant 8,466,440 - Yashima , et al. June 18, 2 | 2013-06-18 |
Charged Particle Beam Writing Apparatus And Charged Particle Beam Writing Method App 20120292536 - YASHIMA; Jun ;   et al. | 2012-11-22 |
Charged Particle Beam Writing Apparatus And Method Of Same App 20120292537 - YASHIMA; Jun ;   et al. | 2012-11-22 |
Write error verification method of writing apparatus and creation apparatus of write error verification data for writing apparatus Grant 8,307,314 - Anpo November 6, 2 | 2012-11-06 |
Charged particle beam drawing apparatus and proximity effect correction method thereof Grant 8,207,514 - Hara , et al. June 26, 2 | 2012-06-26 |
Charged particle beam drawing method and apparatus Grant 8,188,449 - Shibata , et al. May 29, 2 | 2012-05-29 |
Charged Particle Beam Pattern Forming Apparatus And Charged Particle Beam Pattern Forming Method App 20120007002 - NAKAYAMADA; Noriaki ;   et al. | 2012-01-12 |
Charged Particle Beam Drawing Apparatus And Control Method Thereof App 20120001097 - YASHIMA; Jun ;   et al. | 2012-01-05 |
Data verification method, charged particle beam writing apparatus, and computer-readable storage medium with program Grant 7,949,966 - Anpo , et al. May 24, 2 | 2011-05-24 |
Charged Particle Beam Drawing Apparatus And Proximity Effect Correction Method Thereof App 20110068281 - HARA; Shigehiro ;   et al. | 2011-03-24 |
Charged Particle Beam Writing Method And Apparatus Therefor App 20110066271 - Anpo; Akihito | 2011-03-17 |
Charged Particle Beam Writing Method And Apparatus Therefor App 20110066272 - ANPO; Akihito | 2011-03-17 |
Charged Particle Beam Drawing Method And Apparatus App 20110012031 - Shibata; Hayato ;   et al. | 2011-01-20 |
Write Error Verification Method Of Writing Apparatus And Creation Apparatus Of Write Error Verification Data For Writing Apparatus App 20100306721 - ANPO; Akihito | 2010-12-02 |
Charged particle beam lithography apparatus and charged particle beam lithography method Grant 7,750,324 - Oogi , et al. July 6, 2 | 2010-07-06 |
Writing error verification method of pattern writing apparatus and generation apparatus of writing error verification data for pattern writing apparatus Grant 7,698,682 - Anpo , et al. April 13, 2 | 2010-04-13 |
Creation method and conversion method of charged particle beam writing data, and writing method of charged particle beam Grant 7,592,611 - Kasahara , et al. September 22, 2 | 2009-09-22 |
Method of forming pattern writing data by using charged particle beam Grant 7,504,645 - Anpo , et al. March 17, 2 | 2009-03-17 |
Charged Particle Beam Lithography Apparatus And Charged Particle Beam Lithography Method App 20090057575 - OOGI; Susumu ;   et al. | 2009-03-05 |
Data Verification Method, Charged Particle Beam Writing Apparatus, And Computer-readable Storage Medium With Program App 20080221816 - Anpo; Akihito ;   et al. | 2008-09-11 |
Writing Error Verification Method Of Pattern Writing Apparatus And Generation Apparatus Of Writing Error Verification Data For Pattern Writing Apparatus App 20080046787 - ANPO; Akihito ;   et al. | 2008-02-21 |
Method Of Forming Pattern Writing Data By Using Charged Particle Beam App 20070226675 - ANPO; Akihito ;   et al. | 2007-09-27 |
Creation Method And Conversion Method Of Charged Particle Beam Writing Data, And Writing Method Of Charged Particle Beam App 20070053242 - Kasahara; Jun ;   et al. | 2007-03-08 |