Patent | Date |
---|
High-efficiency line-forming optical systems and methods using a serrated spatial filter Grant 11,415,809 - Anikitchev August 16, 2 | 2022-08-16 |
Laser annealing systems and methods with ultra-short dwell times Grant 10,847,381 - Hawryluk , et al. November 24, 2 | 2020-11-24 |
Laser-based systems and methods for melt-processing of metal layers in semiconductor manufacturing Grant 10,665,504 - Anikitchev , et al. | 2020-05-26 |
High-efficiency line-forming optical systems and methods using a serrated spatial filter Grant 10,353,208 - Anikitchev July 16, 2 | 2019-07-16 |
Laser-Based Systems and Methods for Melt-Processing of Metal Layers in Semiconductor Manufacturing App 20190035682 - Anikitchev; Serguei ;   et al. | 2019-01-31 |
Laser Annealing Systems and Methods With Ultra-Short Dwell Times App 20190006189 - Hawryluk; Andrew M. ;   et al. | 2019-01-03 |
Laser annealing systems and methods with ultra-short dwell times Grant 10,083,843 - Hawryluk , et al. September 25, 2 | 2018-09-25 |
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation Grant 9,711,361 - Hawryluk , et al. July 18, 2 | 2017-07-18 |
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation App 20170162392 - Hawryluk; Andrew M. ;   et al. | 2017-06-08 |
High-efficiency line-forming optical systems and methods Grant 9,638,922 - Anikitchev May 2, 2 | 2017-05-02 |
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation Grant 9,613,815 - Hawryluk , et al. April 4, 2 | 2017-04-04 |
High-efficiency line-forming optical systems and methods using a serrated spatial filter App 20170025287 - Anikitchev; Serguei | 2017-01-26 |
High-efficiency line-forming optical systems and methods App 20160306177 - Anikitchev; Serguei | 2016-10-20 |
Laser annealing systems and methods with ultra-short dwell times App 20160240407 - Hawryluk; Andrew M. ;   et al. | 2016-08-18 |
High-efficiency line-forming optical systems and methods Grant 9,411,163 - Anikitchev August 9, 2 | 2016-08-09 |
Laser annealing systems and methods with ultra-short dwell times App 20160181120 - Hawryluk; Andrew M. ;   et al. | 2016-06-23 |
High-efficiency line-forming optical systems and methods for defect annealing and dopant activation App 20160148810 - Hawryluk; Andrew M. ;   et al. | 2016-05-26 |
Laser spike annealing using fiber lasers Grant 9,343,307 - Anikitchev May 17, 2 | 2016-05-17 |
Laser annealing systems and methods with ultra-short dwell times App 20160086832 - Hawryluk; Andrew M. ;   et al. | 2016-03-24 |
High-efficiency line-forming optical systems and methods App 20160033773 - Anikitchev; Serguei | 2016-02-04 |
Laser spike annealing using fiber lasers App 20150179449 - Anikitchev; Serguei | 2015-06-25 |
Systems and methods for measuring high-intensity light beams Grant 8,988,674 - Anikitchev , et al. March 24, 2 | 2015-03-24 |
Laser annealing systems and methods with ultra-short dwell times Grant 8,865,603 - Hawryluk , et al. October 21, 2 | 2014-10-21 |
Systems and methods for forming a time-averaged line image Grant 8,822,353 - Anikitchev , et al. September 2, 2 | 2014-09-02 |
Laser annealing systems and methods with ultra-short dwell times App 20130330844 - Hawryluk; Andrew M. ;   et al. | 2013-12-12 |
Systems and methods for forming a time-averaged line image Grant 8,399,808 - Anikitchev , et al. March 19, 2 | 2013-03-19 |
Systems and methods for forming a time-averaged line image App 20120100640 - Anikitchev; Serguei ;   et al. | 2012-04-26 |
Systems and methods for forming a time-averaged line image App 20120100728 - Anikitchev; Serguei ;   et al. | 2012-04-26 |
Systems and methods for forming a time-averaged line image Grant 8,026,519 - Anikitchev , et al. September 27, 2 | 2011-09-27 |
Line imaging systems and methods for laser annealing Grant 8,014,427 - Anikitchev September 6, 2 | 2011-09-06 |
Wavelength-locked fiber-coupled diode-laser bar Grant 7,251,260 - Anikitchev , et al. July 31, 2 | 2007-07-31 |
Wavelength-locked fiber-coupled diode-laser bar App 20060045143 - Anikitchev; Serguei ;   et al. | 2006-03-02 |
Diode beam transformation Grant 6,600,605 - Anikitchev July 29, 2 | 2003-07-29 |