Anglin; Kevin R.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Anglin; Kevin R..The latest application filed is for "temperature controlled/electrically biased wafer surround".
- Anglin; Kevin R. - Beverly MA
- Anglin; Kevin R. - Somerville MA
| Patent | Date |
|---|---|
| Temperature Controlled/Electrically Biased Wafer Surround App 20220246397 - Anglin; Kevin R. ; et al. | 2022-08-04 |
| Techniques And Apparatus For Elongation Patterning Using Angled Ion Beams App 20210375626 - Anglin; Kevin R. ; et al. | 2021-12-02 |
| Multi-Zone Platen Temperature Control App 20210343550 - Anglin; Kevin R. ; et al. | 2021-11-04 |
| Techniques and apparatus for elongation patterning using angled ion beams Grant 11,127,593 - Anglin , et al. September 21, 2 | 2021-09-21 |
| In-situ beam profile metrology Grant 10,665,421 - Chen , et al. | 2020-05-26 |
| In-situ Beam Profile Metrology App 20200118790 - Chen; Tsung-Liang ; et al. | 2020-04-16 |
| Techniques And Apparatus For Elongation Patterning Using Angled Ion Beams App 20190355581 - Anglin; Kevin R. ; et al. | 2019-11-21 |
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