| Patent | Date |
|---|
Variable depth edge ring for etch uniformity control
Grant 11,342,163 - Angelov , et al. May 24, 2 | 2022-05-24 |
Substrate processing chamber including multiple gas injection points and dual injector
Grant 10,825,659 - Treadwell , et al. November 3, 2 | 2020-11-03 |
Variable Depth Edge Ring For Etch Uniformity Control
App 20200273671 - ANGELOV; Ivelin ; et al. | 2020-08-27 |
Systems and methods for selectively etching film
Grant 10,727,089 - Caron , et al. | 2020-07-28 |
Chamber member of a plasma source and pedestal with radially outward positioned lift pins for translation of a substrate c-ring
Grant 10,699,878 - Caron , et al. | 2020-06-30 |
Variable depth edge ring for etch uniformity control
Grant 10,651,015 - Angelov , et al. | 2020-05-12 |
Wafer lift ring system for wafer transfer
Grant 10,438,833 - Severson , et al. O | 2019-10-08 |
System and method for increasing electron density levels in a plasma of a substrate processing system
Grant 10,147,588 - Eason , et al. De | 2018-12-04 |
Ultrahigh Selective Nitride Etch To Form Finfet Devices
App 20180269070 - Eason; Kwame ; et al. | 2018-09-20 |
Control Of The Incidence Angle Of An Ion Beam On A Substrate
App 20170330788 - Angelov; Ivelin ; et al. | 2017-11-16 |
Control of the incidence angle of an ion beam on a substrate
Grant 9,812,349 - Angelov , et al. November 7, 2 | 2017-11-07 |
Method And Apparatus For Controlling Process Within Wafer Uniformity
App 20170278679 - Angelov; Ivelin ; et al. | 2017-09-28 |
System And Method For Increasing Electron Density Levels In A Plasma Of A Substrate Processing System
App 20170236694 - Eason; Kwame ; et al. | 2017-08-17 |
Systems And Methods For Selectively Etching Film
App 20170236731 - Caron; James Eugene ; et al. | 2017-08-17 |
Chamber Memeber Of A Plasma Source And Pedestal With Radially Outward Positioned Lift Pins For Translation Of A Substrate C-ring
App 20170236688 - Caron; James Eugene ; et al. | 2017-08-17 |
Wafer Lift Ring System For Wafer Transfer
App 20170236743 - Severson; Brian ; et al. | 2017-08-17 |
Variable Depth Edge Ring For Etch Uniformity Control
App 20170236741 - Angelov; Ivelin ; et al. | 2017-08-17 |
Substrate Processing Chamber Including Multiple Gas Injection Points And Dual Injector
App 20170200586 - Treadwell; Jason Lee ; et al. | 2017-07-13 |
Gas distribution device with actively cooled grid
Grant 9,679,749 - Angelov , et al. June 13, 2 | 2017-06-13 |
Control Of The Incidence Angle Of An Ion Beam On A Substrate
App 20170154804 - Angelov; Ivelin ; et al. | 2017-06-01 |
Selective Nitride Etch
App 20160181116 - Berry, III; Ivan L. ; et al. | 2016-06-23 |
Gas Distribution Device With Actively Cooled Grid
App 20160093472 - Angelov; Ivelin ; et al. | 2016-03-31 |
Pedestal covers
Grant 8,851,463 - Angelov , et al. October 7, 2 | 2014-10-07 |
Pedestal Covers
App 20130122431 - Angelov; Ivelin ; et al. | 2013-05-16 |
Pedestal covers
Grant 8,371,567 - Angelov , et al. February 12, 2 | 2013-02-12 |
Pedestal cover
Grant D671,901 - Angelov , et al. December 4, 2 | 2012-12-04 |
Pedestal Covers
App 20120264051 - Angelov; Ivelin ; et al. | 2012-10-18 |
Partial Contact Wafer Retaining Ring Apparatus
App 20100120335 - Fang; Haoquan ; et al. | 2010-05-13 |
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