Anella; Steven

Patent Applications and Registrations

Patent applications and USPTO patent grants for Anella; Steven.The latest application filed is for "system and apparatus for enhanced substrate heating and rapid substrate cooling".

Company Profile

3.4.12

Anella; Steven - West Newbury MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
System And Apparatus For Enhanced Substrate Heating And Rapid Substrate Cooling App 20200381271 - Sun; Dawei ; et al.	2020-12-03
Method And Apparatus For Calibration Of Substrate Temperature Using Pyrometer App 20200378832 - Wilson; Eric D. ; et al.	2020-12-03
Enhanced Substrate Temperature Measurement Apparatus, System And Method App 20200378837 - Sun; Dawei ; et al.	2020-12-03
Platen support structure Grant 10,032,601 - Fish , et al. July 24, 2	2018-07-24
Linkage conduit for vacuum chamber applications Grant 9,484,183 - Hermanson , et al. November 1, 2	2016-11-01
Heated platen with improved temperature uniformity Grant 9,338,829 - Fish , et al. May 10, 2	2016-05-10
Linkage Conduit For Vacuum Chamber Applications App 20160071686 - Hermanson; Eric D. ; et al.	2016-03-10
Platen Support Structure App 20150243470 - Fish; Roger B. ; et al.	2015-08-27
Heated Platen With Improved Temperature Uniformity App 20150237677 - Fish; Roger B. ; et al.	2015-08-20
Integrated Shadow Mask/carrier For Pattern Ion Implantation App 20120244692 - Bateman; Nicholas ; et al.	2012-09-27
Integrated shadow mask/carrier for patterned ion implantation Grant 8,216,923 - Bateman , et al. July 10, 2	2012-07-10
Integrated Shadow Mask/Carrier for Pattern Ion Implantation App 20120083102 - Bateman; Nicholas ; et al.	2012-04-05
Thermal Control of a Proximity Mask and Wafer During Ion Implantation App 20110320030 - Riordon; Benjamin ; et al.	2011-12-29
Techniques For Manufacturing Solar Cells App 20100059362 - Anella; Steven	2010-03-11
Implanting A Solar Cell Substrate Using A Mask App 20100062589 - Anella; Steven ; et al.	2010-03-11
Methods and apparatus for enabling multiple process steps on a single substrate App 20060258128 - Nunan; Peter ; et al.	2006-11-16

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