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Patent applications and USPTO patent grants for Anderson; Don E..The latest application filed is for "method and system for cleaning a semiconductor wafer".
Patent | Date |
---|---|
Drip manifold for uniform chemical delivery Grant 6,827,793 - Anderson , et al. December 7, 2 | 2004-12-07 |
Method and system for cleaning a semiconductor wafer App 20040216764 - Mikhaylich, Katrina A. ;   et al. | 2004-11-04 |
System for cleaning a semiconductor wafer Grant 6,711,775 - Mikhaylich , et al. March 30, 2 | 2004-03-30 |
Drip manifold for uniform chemical delivery Grant 6,622,335 - Anderson , et al. September 23, 2 | 2003-09-23 |
System For Cleaning A Semiconductor Wafer App 20020062842 - MIKHAYLICH, KATRINA A. ;   et al. | 2002-05-30 |
Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process Grant 6,361,414 - Ravkin , et al. March 26, 2 | 2002-03-26 |
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