Anderl; Willi

Patent Applications and Registrations

Patent applications and USPTO patent grants for Anderl; Willi.The latest application filed is for "facet mirror for an illumination optical unit of a projection exposure apparatus".

Company Profile

4.9.13

Anderl; Willi - Huettlingen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Facet Mirror For An Illumination Optical Unit Of A Projection Exposure Apparatus App 20220206398 - Anderl; Willi ; et al.	2022-06-30
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element Grant 11,372,334 - Bauer , et al. June 28, 2	2022-06-28
Projection lighting system for semiconductor lithography with an improved heat transfer Grant 10,969,699 - Weber , et al. April 6, 2	2021-04-06
Beam reverser module and optical power amplifier having such a beam reverser module Grant 10,777,958 - Schall , et al. Sept	2020-09-15
Method For Producing A Reflective Optical Element, Reflective Optical Element, And Use Of A Reflective Optical Element App 20200096874 - Bauer; Markus ; et al.	2020-03-26
Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element Grant 10,534,269 - Bauer , et al. Ja	2020-01-14
Projection Lighting System For Semiconductor Lithography With An Improved Heat Transfer App 20190384187 - Weber; Ulrich ; et al.	2019-12-19
Cooler for use in a device in a vacuum Grant 10,303,067 - Anderl , et al.	2019-05-28
Beam Reverser Module and Optical Power Amplifier Having Such a Beam Reverser Module App 20180102620 - Schall; Michael ; et al.	2018-04-12
Beam reverser module and optical power amplifier having such a beam reverser module Grant 9,843,153 - Schall , et al. December 12, 2	2017-12-12
Method For Producing A Reflective Optical Element, Reflective Optical Element, And Use Of A Reflective Optical Element App 20170315453 - Bauer; Markus ; et al.	2017-11-02
Cooler For Use In A Device In A Vacuum App 20160299443 - Anderl; Willi ; et al.	2016-10-13
Beam Reverser Module and Optical Power Amplifier Having Such a Beam Reverser Module App 20150340829 - Schall; Michael ; et al.	2015-11-26
Cooler For Plasma Generation Chamber Of Euv Radiation Source App 20150083938 - Anderl; Willi ; et al.	2015-03-26
Euv Collector Mirror Shell Of An Euv Collector For Euv Lithography App 20130176614 - Anderl; Willi ; et al.	2013-07-11
Reflective optical element for use in an EUV system Grant 8,342,701 - Kierey , et al. January 1, 2	2013-01-01
Optical Component Having An Improved Transient Thermal Behavior And Method For Improving The Transient Thermal Behavior Of An Optical Component App 20110211180 - Egle; Wilhelm ; et al.	2011-09-01
Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component Grant 7,965,456 - Egle , et al. June 21, 2	2011-06-21
Reflective Optical Element For Use In An Euv System App 20110051267 - Kierey; Holger ; et al.	2011-03-03
Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component Grant 7,483,223 - Egle , et al. January 27, 2	2009-01-27
Optical Component Having an Improved Transient Thermal Behavior and Method for Improving the Transient Thermal Behavior of an Optical Component App 20090021950 - Egle; Wilhelm ; et al.	2009-01-22
Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component App 20060093253 - Egle; Wilhelm ; et al.	2006-05-04

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