loadpatents
Patent applications and USPTO patent grants for Anada; Kazuki.The latest application filed is for "electrostatic chuck and wafer processing apparatus".
Patent | Date |
---|---|
Electrostatic chuck and wafer processing apparatus Grant 10,714,373 - Anada , et al. | 2020-07-14 |
Electrostatic chuck and wafer processing apparatus Grant 10,373,853 - Anada , et al. | 2019-08-06 |
Electrostatic Chuck And Wafer Processing Apparatus App 20180261486 - ANADA; Kazuki ;   et al. | 2018-09-13 |
Electrostatic chuck Grant 9,960,067 - Anada , et al. May 1, 2 | 2018-05-01 |
Electrostatic chuck Grant 9,905,449 - Yamaguchi , et al. February 27, 2 | 2018-02-27 |
Electrostatic Chuck And Wafer Processing Apparatus App 20180040499 - ANADA; Kazuki ;   et al. | 2018-02-08 |
Electrostatic Chuck App 20170178944 - YAMAGUCHI; Kosuke ;   et al. | 2017-06-22 |
Electrostatic chuck Grant 9,627,240 - Yamaguchi , et al. April 18, 2 | 2017-04-18 |
Electrostatic Chuck App 20160276198 - ANADA; Kazuki ;   et al. | 2016-09-22 |
Electrostatic chuck Grant 9,300,229 - Anada , et al. March 29, 2 | 2016-03-29 |
Electrostatic chuck Grant 9,252,040 - Anada , et al. February 2, 2 | 2016-02-02 |
Electrostatic chuck Grant 9,252,041 - Anada , et al. February 2, 2 | 2016-02-02 |
Electrostatic Chuck App 20150279714 - YAMAGUCHI; Kosuke ;   et al. | 2015-10-01 |
AC-driven electrostatic chuck Grant 9,093,488 - Anada , et al. July 28, 2 | 2015-07-28 |
Electrostatic chuck Grant 9,042,078 - Wada , et al. May 26, 2 | 2015-05-26 |
Electrostatic Chuck App 20140355170 - Wada; Takuma ;   et al. | 2014-12-04 |
Ac-driven Electrostatic Chuck App 20140340813 - Anada; Kazuki ;   et al. | 2014-11-20 |
Electrostatic chuck Grant 8,848,335 - Hori , et al. September 30, 2 | 2014-09-30 |
Electrostatic Chuck App 20140071582 - ANADA; Kazuki ;   et al. | 2014-03-13 |
Electrostatic Chuck App 20140063681 - ANADA; Kazuki ;   et al. | 2014-03-06 |
Electrostatic Chuck App 20140063682 - ANADA; Kazuki ;   et al. | 2014-03-06 |
Electrostatic Chuck App 20130026720 - Hori; Hiroaki ;   et al. | 2013-01-31 |
Electrostatic Chuck App 20130027838 - Hori; Hiroaki ;   et al. | 2013-01-31 |
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