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Patent applications and USPTO patent grants for AMIKURA; Manabu.The latest application filed is for "substrate processing device".
Patent | Date |
---|---|
Substrate Processing Device App 20210035823 - ASAKAWA; Yuji ;   et al. | 2021-02-04 |
Film forming apparatus Grant 10,526,702 - Toriya , et al. J | 2020-01-07 |
Substrate Processing Apparatus App 20190006207 - AMIKURA; Manabu ;   et al. | 2019-01-03 |
Substrate processing apparatus Grant 10,096,495 - Amikura , et al. October 9, 2 | 2018-10-09 |
Film forming apparatus Grant 10,094,019 - Toriya , et al. October 9, 2 | 2018-10-09 |
Film Forming Apparatus App 20160355928 - TORIYA; Daisuke ;   et al. | 2016-12-08 |
Substrate Processing Apparatus App 20160189987 - AMIKURA; Manabu ;   et al. | 2016-06-30 |
Film Forming Apparatus App 20140130743 - TORIYA; Daisuke ;   et al. | 2014-05-15 |
Plane heater Grant 8,143,557 - Shibata , et al. March 27, 2 | 2012-03-27 |
Film Forming Apparatus And Gas Injection Member App 20110283942 - IWATA; Teruo ;   et al. | 2011-11-24 |
Shower head and film-forming device using the same Grant 7,931,749 - Amikura , et al. April 26, 2 | 2011-04-26 |
Plane Heater App 20100224620 - Shibata; Kazuo ;   et al. | 2010-09-09 |
Loading table and heat treating apparatus having the loading table Grant 7,718,930 - Kawasaki , et al. May 18, 2 | 2010-05-18 |
Processing apparatus Grant 7,651,584 - Amikura January 26, 2 | 2010-01-26 |
Shower Head and Film-Forming Device Using the Same App 20070272154 - Amikura; Manabu ;   et al. | 2007-11-29 |
Processing apparatus App 20070158026 - Amikura; Manabu | 2007-07-12 |
Loading table and heat treating apparatus having the loading table App 20060199131 - Kawasaki; Hiroo ;   et al. | 2006-09-07 |
Film forming apparatus App 20050223987 - Iwata, Teruo ;   et al. | 2005-10-13 |
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