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Tape adhering method and tape adhering device Grant 8,440,040 - Kawashima , et al. May 14, 2 | 2013-05-14 |
Surface protection film peeling method and surface protection film peeling device Grant 8,151,856 - Kawashima , et al. April 10, 2 | 2012-04-10 |
Tape Adhering Method And Tape Adhering Device App 20110024020 - Kawashima; Isamu ;   et al. | 2011-02-03 |
Apparatus for attaching a peeling tape Grant 7,757,741 - Ametani July 20, 2 | 2010-07-20 |
Film separation method and film separation apparatus Grant 7,740,728 - Ametani June 22, 2 | 2010-06-22 |
Wafer processing apparatus Grant 7,563,643 - Ametani July 21, 2 | 2009-07-21 |
Method and apparatus for peeling surface protective film Grant 7,521,384 - Kanazawa , et al. April 21, 2 | 2009-04-21 |
Dicing tape attaching apparatus and dicing tape attaching method Grant 7,503,365 - Ametani March 17, 2 | 2009-03-17 |
Workpiece processing device Grant 7,490,650 - Kawashima , et al. February 17, 2 | 2009-02-17 |
Tape adhering method and tape adhering apparatus Grant 7,438,776 - Kobayashi , et al. October 21, 2 | 2008-10-21 |
Film peeling method and film peeling device Grant 7,383,869 - Ametani June 10, 2 | 2008-06-10 |
Peeling Tape Adhering Method And Peeling Tape Adhering Device App 20070284028 - Kawashima; Isamu ;   et al. | 2007-12-13 |
Workpiece Processing Device App 20070277934 - Kawashima; Isamu ;   et al. | 2007-12-06 |
Surface Protection Film Peeling Method And Surface Protection Film Peeling Device App 20070269962 - Kawashima; Isamu ;   et al. | 2007-11-22 |
Tape Adhering Method And Tape Adhering Device App 20070267132 - Kawashima; Isamu ;   et al. | 2007-11-22 |
Cassette Conveyance Method And Cassette Conveyance Apparatus App 20070262276 - Kawashima; Isamu ;   et al. | 2007-11-15 |
Surface Protective Film Peeling Method And Surface Protective Film Peeling Apparatus App 20070207629 - Ametani; Minoru | 2007-09-06 |
Wafer processing apparatus App 20070187036 - Ametani; Minoru | 2007-08-16 |
Dicing tape attaching apparatus and dicing tape attaching method App 20070123000 - Ametani; Minoru | 2007-05-31 |
Method and apparatus for attaching a peeling tape App 20070119543 - Ametani; Minoru | 2007-05-31 |
Method and apparatus for peeling surface protective film App 20070087475 - Kanazawa; Masaki ;   et al. | 2007-04-19 |
Film separation method and film separation apparatus App 20070026641 - Ametani; Minoru | 2007-02-01 |
Method and apparatus for removing unwanted substance from semiconductor wafer Grant 7,060,154 - Yamamoto , et al. June 13, 2 | 2006-06-13 |
Film sticking method and film sticking device App 20060068566 - Ametani; Minoru | 2006-03-30 |
Film peeling method and film peeling device App 20060011284 - Ametani; Minoru | 2006-01-19 |
Tape adhering method and tape adhering apparatus App 20050282362 - Kobayashi, Kazuo ;   et al. | 2005-12-22 |
Method and apparatus for removing unwanted substance from semiconductor wafer App 20030092288 - Yamamoto, Masayuki ;   et al. | 2003-05-15 |
Semiconductor wafer loading and unloading apparatus, and semiconductor wafer transport containers for use therewith Grant 5,759,006 - Miyamoto , et al. June 2, 1 | 1998-06-02 |
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