loadpatents
Patent applications and USPTO patent grants for Amemiya; Mitsuaki.The latest application filed is for "radiation detector and compton camera".
Patent | Date |
---|---|
Radiation detector and compton camera Grant 11,112,511 - Amemiya September 7, 2 | 2021-09-07 |
Radiation Detector And Compton Camera App 20200033487 - Amemiya; Mitsuaki | 2020-01-30 |
Radiation Detection Apparatus App 20160341833 - Watanabe; Ikuo ;   et al. | 2016-11-24 |
Target Device, Lithography Apparatus, And Article Manufacturing Method App 20150318139 - Amemiya; Mitsuaki | 2015-11-05 |
X-ray apparatus and its adjusting method Grant 9,036,789 - Masaki , et al. May 19, 2 | 2015-05-19 |
Radiation imaging apparatus Grant 9,020,098 - Tsukamoto , et al. April 28, 2 | 2015-04-28 |
X-ray optical apparatus Grant 9,020,102 - Amemiya , et al. April 28, 2 | 2015-04-28 |
X-ray optical apparatus and adjusting method thereof Grant 9,020,104 - Iizuka , et al. April 28, 2 | 2015-04-28 |
X-ray Optical Apparatus And Adjusting Method Thereof App 20130243164 - Iizuka; Naoya ;   et al. | 2013-09-19 |
X-ray Apparatus And Its Adjusting Method App 20130243163 - Masaki; Fumitaro ;   et al. | 2013-09-19 |
Radiation Imaging Apparatus App 20130243156 - Tsukamoto; Takeo ;   et al. | 2013-09-19 |
X-ray Optical Apparatus App 20130235980 - Amemiya; Mitsuaki ;   et al. | 2013-09-12 |
Filter exposure apparatus, and device manufacturing method Grant 7,633,598 - Amemiya December 15, 2 | 2009-12-15 |
Measuring method, exposure apparatus, and device manufacturing method Grant 7,465,936 - Amemiya December 16, 2 | 2008-12-16 |
Apparatus for evaluating EUV light source, and evaluation method using the same Grant 7,312,459 - Amemiya , et al. December 25, 2 | 2007-12-25 |
Alignment apparatus, exposure apparatus and device fabrication method Grant 7,271,875 - Amemiya , et al. September 18, 2 | 2007-09-18 |
Filter Exposure Apparatus, And Device Manufacturing Method App 20070015067 - AMEMIYA; Mitsuaki | 2007-01-18 |
Apparatus for evalulating EUV light source, and evaluation method using the same App 20070002474 - Amemiya; Mitsuaki ;   et al. | 2007-01-04 |
Measuring method, exposure apparatus, and device manufacturing method App 20060186352 - Amemiya; Mitsuaki | 2006-08-24 |
Apparatus and process for producing crystal article, and thermocouple used therein Grant 7,014,707 - Amemiya March 21, 2 | 2006-03-21 |
Alignment apparatus, exposure apparatus and device fabrication method App 20060044538 - Amemiya; Mitsuaki ;   et al. | 2006-03-02 |
Measuring apparatus, exposure apparatus having the same, and device manufacturing method App 20050270509 - Ogushi, Nobuaki ;   et al. | 2005-12-08 |
X-ray exposure apparatus Grant 6,647,086 - Amemiya , et al. November 11, 2 | 2003-11-11 |
Device manufacturing method Grant 6,645,707 - Amemiya , et al. November 11, 2 | 2003-11-11 |
Exposure method Grant 6,647,087 - Amemiya , et al. November 11, 2 | 2003-11-11 |
Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method Grant 6,642,528 - Amemiya , et al. November 4, 2 | 2003-11-04 |
Device Manufacturing Method App 20030143496 - Amemiya, Mitsuaki ;   et al. | 2003-07-31 |
Apparatus and process for producing crystal article, and thermocouple used therein App 20030131789 - Amemiya, Mitsuaki | 2003-07-17 |
Alignment mark detection method, and alignment method, exposure method and device, and device production method, making use of the alignment mark detection method App 20020079462 - Amemiya, Mitsuaki ;   et al. | 2002-06-27 |
Exposure method App 20020025019 - Amemiya, Mitsuaki ;   et al. | 2002-02-28 |
X-ray exposure apparatus App 20020009176 - Amemiya, Mitsuaki ;   et al. | 2002-01-24 |
X-ray exposure apparatus App 20010043666 - Watanabe, Yutaka ;   et al. | 2001-11-22 |
Alignment apparatus and SOR X-ray exposure apparatus having same Grant 5,822,389 - Uzawa , et al. October 13, 1 | 1998-10-13 |
Process for holding an object Grant 5,680,428 - Amemiya , et al. October 21, 1 | 1997-10-21 |
SOR exposure system and method of manufacturing semiconductor devices using same Grant 5,581,590 - Mori , et al. December 3, 1 | 1996-12-03 |
Length-measuring device and exposure apparatus Grant 5,440,394 - Nose , et al. August 8, 1 | 1995-08-08 |
Apparatus and process for vacuum-holding an object Grant 5,329,126 - Amemiya , et al. July 12, 1 | 1994-07-12 |
X-ray lithography apparatus including a dose detectable mask Grant 5,323,440 - Hara , et al. June 21, 1 | 1994-06-21 |
X-ray exposure apparatus Grant 5,267,292 - Tanaka , et al. November 30, 1 | 1993-11-30 |
Wafer table and exposure apparatus with the same Grant 5,231,291 - Amemiya , et al. July 27, 1 | 1993-07-27 |
X-ray exposure apparatus Grant 5,172,403 - Tanaka , et al. December 15, 1 | 1992-12-15 |
X-ray transmitting window and method of mounting the same Grant 5,159,621 - Watanabe , et al. October 27, 1 | 1992-10-27 |
Exposure apparatus for controlling intensity of exposure radiation Grant 5,157,700 - Kurosawa , et al. October 20, 1 | 1992-10-20 |
Exposure apparatus Grant 5,138,643 - Sakamoto , et al. August 11, 1 | 1992-08-11 |
Exposure method and apparatus Grant 5,131,022 - Terashima , et al. July 14, 1 | 1992-07-14 |
Exposure apparatus with a substrate holding mechanism Grant 5,093,579 - Amemiya , et al. March 3, 1 | 1992-03-03 |
X-ray exposure apparatus Grant 4,935,947 - Amemiya June 19, 1 | 1990-06-19 |
Mask repair system Grant 4,906,326 - Amemiya , et al. March 6, 1 | 1990-03-06 |
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