Patent | Date |
---|
Substrate processing apparatus and substrate processing method Grant 11,437,252 - Namba , et al. September 6, 2 | 2022-09-06 |
Component of a liquid discharge nozzle for semiconductor substrate processing apparatus Grant D934,991 - Amano , et al. November 2, 2 | 2021-11-02 |
Liquid discharge nozzle for semiconductor substrate processing apparatus Grant D930,796 - Amano , et al. September 14, 2 | 2021-09-14 |
Liquid discharge nozzle for semiconductor substrate processing apparatus Grant D929,534 - Amano , et al. August 31, 2 | 2021-08-31 |
Substrate Processing System App 20210257236 - Amano; Yoshifumi ;   et al. | 2021-08-19 |
Substrate processing system Grant 11,069,546 - Amano July 20, 2 | 2021-07-20 |
Substrate processing system Grant 11,018,035 - Amano , et al. May 25, 2 | 2021-05-25 |
Substrate processing apparatus, control method of substrate processing apparatus and substrate processing system Grant 11,011,436 - Amano , et al. May 18, 2 | 2021-05-18 |
Processing Liquid Ejection Nozzle, Nozzle Arm, Substrate Processing Apparatus, And Substrate Processing Method App 20210020463 - AMANO; Yoshifumi ;   et al. | 2021-01-21 |
Substrate Processing Apparatus App 20200388511 - AMANO; Yoshifumi ;   et al. | 2020-12-10 |
Substrate Processing Apparatus And Substrate Processing Method App 20200365422 - Amano; Yoshifumi ;   et al. | 2020-11-19 |
Substrate Processing Apparatus App 20200337118 - Amano; Yoshifumi ;   et al. | 2020-10-22 |
Substrate Processing Apparatus And Substrate Processing Method App 20200328095 - NAMBA; Hiromitsu ;   et al. | 2020-10-15 |
Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium Grant 10,713,772 - Amano , et al. | 2020-07-14 |
Substrate processing apparatus and substrate processing method Grant 10,707,102 - Namba , et al. | 2020-07-07 |
Substrate cleaning apparatus Grant 10,643,865 - Amano , et al. | 2020-05-05 |
Substrate processing apparatus and processing method of substrate processing apparatus Grant 10,217,628 - Amano , et al. Feb | 2019-02-26 |
Substrate Processing System App 20190043742 - Amano; Yoshifumi ;   et al. | 2019-02-07 |
Management method of substrate processing apparatus and substrate processing system Grant 10,128,137 - Amano , et al. November 13, 2 | 2018-11-13 |
Liquid processing apparatus Grant 10,046,372 - Goda , et al. August 14, 2 | 2018-08-14 |
Substrate Processing Apparatus And Substrate Processing Method App 20180108544 - Namba; Hiromitsu ;   et al. | 2018-04-19 |
Substrate liquid processing apparatus, substrate liquid processing method and substrate processing apparatus Grant 9,895,711 - Zhang , et al. February 20, 2 | 2018-02-20 |
Substrate processing apparatus and substrate processing method Grant 9,859,136 - Namba , et al. January 2, 2 | 2018-01-02 |
Substrate processing apparatus and substrate processing method Grant 9,818,626 - Higashijima , et al. November 14, 2 | 2017-11-14 |
Substrate processing apparatus and substrate processing method Grant 9,793,142 - Higashijima , et al. October 17, 2 | 2017-10-17 |
Substrate processing system, method for controlling substrate processing system, and storage medium Grant 9,782,807 - Amano , et al. October 10, 2 | 2017-10-10 |
Substrate Processing Apparatus And Processing Method Of Substrate Processing Apparatus App 20170287703 - Amano; Yoshifumi ;   et al. | 2017-10-05 |
Substrate Processing Apparatus, Control Method Of Substrate Processing Apparatus And Substrate Processing System App 20170287704 - Amano; Yoshifumi ;   et al. | 2017-10-05 |
Management Method Of Substrate Processing Apparatus And Substrate Processing System App 20170287750 - Amano; Yoshifumi ;   et al. | 2017-10-05 |
Substrate Cleaning Apparatus App 20170278728 - Amano; Yoshifumi ;   et al. | 2017-09-28 |
Substrate processing apparatus Grant 9,623,434 - Amano April 18, 2 | 2017-04-18 |
Liquid processing apparatus and liquid processing method Grant 9,564,347 - Amano , et al. February 7, 2 | 2017-02-07 |
Liquid Processing Apparatus App 20170028450 - Goda; Kazuya ;   et al. | 2017-02-02 |
Substrate liquid processing apparatus Grant 9,536,761 - Amano , et al. January 3, 2 | 2017-01-03 |
Substrate Processing System App 20160300734 - Amano; Yoshifumi | 2016-10-13 |
Substrate Liquid Processing Apparatus, Substrate Liquid Processing Method And Substrate Processing Apparatus App 20160221046 - Zhang; Jian ;   et al. | 2016-08-04 |
Measurement Processing Device, Substrate Processing System, Measurement Jig, Measurement Processing Method, And Storage Medium App 20160148366 - Amano; Yoshifumi ;   et al. | 2016-05-26 |
Substrate processing apparatus, substrate processing method and storage medium Grant 9,308,559 - Amano April 12, 2 | 2016-04-12 |
Substrate Liquid Processing Apparatus App 20160064256 - Amano; Yoshifumi ;   et al. | 2016-03-03 |
Substrate processing and positioning apparatus, substrate processing and positioning method and storage medium recording program for processing and positioning a substrate Grant 9,257,313 - Amano February 9, 2 | 2016-02-09 |
Substrate positioning apparatus, substrate processing apparatus, substrate positioning method, and computer readable medium having a program stored thereon Grant 9,008,817 - Amano April 14, 2 | 2015-04-14 |
Substrate Processing System, Method For Controlling Substrate Processing System, And Storage Medium App 20150013722 - Amano; Yoshifumi ;   et al. | 2015-01-15 |
Substrate Processing Apparatus And Substrate Processing Method App 20140374022 - Namba; Hiromitsu ;   et al. | 2014-12-25 |
Liquid processing apparatus, liquid processing method and storage medium Grant 8,887,741 - Higashijima , et al. November 18, 2 | 2014-11-18 |
Substrate Processing Apparatus And Substrate Processing Method App 20140251539 - Mizuno; Tsuyoshi ;   et al. | 2014-09-11 |
Substrate processing apparatus and substrate processing method Grant 8,828,183 - Namba , et al. September 9, 2 | 2014-09-09 |
Substrate Processing Apparatus And Substrate Processing Method App 20140116478 - Higashijima; Jiro ;   et al. | 2014-05-01 |
Substrate Processing Apparatus And Substrate Processing Method App 20140116480 - Higashijima; Jiro ;   et al. | 2014-05-01 |
Liquid processing apparatus for substrate and liquid processing method Grant 8,684,014 - Amano , et al. April 1, 2 | 2014-04-01 |
Liquid Processing Apparatus And Liquid Processing Method App 20140053882 - AMANO; Yoshifumi ;   et al. | 2014-02-27 |
Liquid processing apparatus and liquid processing method Grant 8,617,318 - Amano , et al. December 31, 2 | 2013-12-31 |
Positioning apparatus, a substrate processing apparatus and method for fixing a reference member Grant 8,550,470 - Amano , et al. October 8, 2 | 2013-10-08 |
Processing system Grant 8,480,847 - Amano July 9, 2 | 2013-07-09 |
Substrate Processing Apparatus And Substrate Processing Method App 20130171831 - NAMBA; Hiromitsu ;   et al. | 2013-07-04 |
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium App 20130152976 - Amano; Yoshifumi | 2013-06-20 |
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium App 20130156948 - Amano; Yoshifumi | 2013-06-20 |
Processing system, processing method, and storage medium Grant 8,136,538 - Amano March 20, 2 | 2012-03-20 |
Liquid Processing Apparatus, Liquid Processing Method and Storage Medium App 20120064256 - Higashijima; Jiro ;   et al. | 2012-03-15 |
Positioning Apparatus, A Substrate Processing Apparatus And Method For Fixing A Reference Member App 20110308067 - AMANO; Yoshifumi ;   et al. | 2011-12-22 |
Substrate Positioning Apparatus, Substrate Processing Apparatus, Substrate Positioning Method, And Computer Readable Medium Having A Program Stored Thereon App 20110282484 - AMANO; Yoshifumi | 2011-11-17 |
Substrate Processing Apparatus, Substrate Processing Method And Storage Medium Recording Program App 20110281376 - AMANO; Yoshifumi | 2011-11-17 |
Liquid Processing Apparatus And Liquid Processing Method App 20110048468 - Amano; Yoshifumi ;   et al. | 2011-03-03 |
Liquid Processing Apparatus For Substrate And Liquid Processing Method App 20110030737 - AMANO; Yoshifumi ;   et al. | 2011-02-10 |
Processing system, processing method, and storage medium App 20100154836 - Amano; Yoshifumi | 2010-06-24 |
Processing System App 20100000682 - Amano; Yoshifumi | 2010-01-07 |
Plasma Display Panel and Driving Method Thereof App 20070285013 - Amano; Yoshifumi | 2007-12-13 |
Structure of AC type PDP Grant 7,245,077 - Amano July 17, 2 | 2007-07-17 |
Structure of ac type pdp App 20050127838 - Amano, Yoshifumi | 2005-06-16 |
Plasma display discharge tube and method for driving the same Grant 6,900,780 - Amano May 31, 2 | 2005-05-31 |
Front side glass substrate for display and display device App 20030153233 - Amano, Yoshifumi | 2003-08-14 |
Planar discharge display device App 20030146702 - Amano, Yoshifumi | 2003-08-07 |
Single substrate type discharge display device,method of driving the discharge display device and color single substrate type discharge display device App 20020135310 - Amano, Yoshifumi | 2002-09-26 |
Discharge display apparatus with memory sheets and with a common display electrode Grant 5,744,909 - Amano April 28, 1 | 1998-04-28 |
Discharge tube for display device Grant 5,371,437 - Amano December 6, 1 | 1994-12-06 |
Plasma display panel Grant 4,562,434 - Amano December 31, 1 | 1985-12-31 |
Flat panel display apparatus Grant 4,516,053 - Amano May 7, 1 | 1985-05-07 |
Display apparatus Grant 4,403,831 - Amano September 13, 1 | 1983-09-13 |
Color video display system Grant 4,031,541 - Arisawa , et al. June 21, 1 | 1977-06-21 |
Video display system employing drive pulse of variable amplitude and width Grant 4,021,607 - Amano May 3, 1 | 1977-05-03 |
Flat panel display apparatus Grant 4,005,402 - Amano January 25, 1 | 1977-01-25 |
Video display system Grant 3,992,577 - Amano , et al. November 16, 1 | 1976-11-16 |
Flat panel display apparatus having electrodes aligned with isolating barrier ribs Grant 3,885,195 - Amano May 20, 1 | 1975-05-20 |