Patent | Date |
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Nanotube fuse structure Grant 7,598,127 - Whitefield , et al. October 6, 2 | 2009-10-06 |
Method for redirecting void diffusion away from vias in an integrated circuit design Grant 7,582,566 - Allman , et al. September 1, 2 | 2009-09-01 |
Method and apparatus for diverting void diffusion in integrated circuit conductors Grant 7,436,040 - Allman , et al. October 14, 2 | 2008-10-14 |
Integrated circuit with inductor having horizontal magnetic flux lines Grant 7,384,801 - Bhatt , et al. June 10, 2 | 2008-06-10 |
Method For Redirecting Void Diffusion Away From Vias In An Integrated Circuit Design App 20080132065 - Allman; Derryl D. J. ;   et al. | 2008-06-05 |
Method and apparatus for redirecting void diffusion away from vias in an integrated circuit design Grant 7,361,965 - Allman , et al. April 22, 2 | 2008-04-22 |
Method and apparatus for diverting void diffusion in integrated circuit conductors App 20070259518 - Allman; Derryl D.J. ;   et al. | 2007-11-08 |
Integrated circuit with inductor having horizontal magnetic flux lines App 20070254448 - Bhatt; Hemanshu D. ;   et al. | 2007-11-01 |
Integrated circuit with inductor having horizontal magnetic flux lines Grant 7,253,497 - Bhatt , et al. August 7, 2 | 2007-08-07 |
Method and apparatus for redirecting void diffusion away from vias in an integrated circuit design App 20070155160 - Allman; Derryl D. J. ;   et al. | 2007-07-05 |
Nanotube fuse structure App 20060258122 - Whitefield; Bruce J. ;   et al. | 2006-11-16 |
Method of forming a metal-insulator-metal capacitor in an interconnect cavity Grant 7,118,985 - Allman , et al. October 10, 2 | 2006-10-10 |
Local interconnect for integrated circuit Grant 7,081,379 - Hanson , et al. July 25, 2 | 2006-07-25 |
Bond pad design Grant 7,023,067 - Allman , et al. April 4, 2 | 2006-04-04 |
Extreme low-K interconnect structure and method App 20060006538 - Allman; Derryl D. J. ;   et al. | 2006-01-12 |
Capacitor with stoichiometrically adjusted dielectric and method of fabricating same Grant 6,951,787 - Allman , et al. October 4, 2 | 2005-10-04 |
Capacitor with stoichiometrically adjusted dielectric and method of fabricating same App 20050215005 - Allman, Derryl D. J. ;   et al. | 2005-09-29 |
Local interconnect Grant 6,927,494 - Allman , et al. August 9, 2 | 2005-08-09 |
Local interconnect for integrated circuit App 20050156196 - Hanson, Jeffrey F. ;   et al. | 2005-07-21 |
Plasma treatment system Grant 6,875,702 - Gu , et al. April 5, 2 | 2005-04-05 |
Local interconnect for integrated circuit Grant 6,872,612 - Hanson , et al. March 29, 2 | 2005-03-29 |
Integrated circuit with inductor having horizontal magnetic flux lines App 20050003562 - Bhatt, Hemanshu D. ;   et al. | 2005-01-06 |
On-chip graded index of refraction optical waveguide and damascene method of fabricating the same Grant 6,775,453 - Hornbeck , et al. August 10, 2 | 2004-08-10 |
Bond pad design App 20040135223 - Allman, Derryl D.J. ;   et al. | 2004-07-15 |
Bonding pad design App 20040089938 - Allman, Derryl D.J. ;   et al. | 2004-05-13 |
Method for forming a bonding pad on a substrate Grant 6,678,950 - Allman , et al. January 20, 2 | 2004-01-20 |
Thermal low k dielectrics Grant 6,654,226 - May , et al. November 25, 2 | 2003-11-25 |
Local interconnect App 20030186531 - Allman, Derryl D.J. ;   et al. | 2003-10-02 |
Thermal low k dielectrics App 20030170973 - May, Charles E. ;   et al. | 2003-09-11 |
Capacitor with stoichiometrically adjusted dielectric and method of fabricating same App 20030157765 - Allman, Derryl D.J. ;   et al. | 2003-08-21 |
Local interconnect for integrated circuit App 20030146456 - Hanson, Jeffrey F. ;   et al. | 2003-08-07 |
Capacitor with stoichiometrically adjusted dielectric and method of fabricating same Grant 6,566,186 - Allman , et al. May 20, 2 | 2003-05-20 |
Process for removal of resist mask over low k carbon-doped silicon oxide dielectric material of an integrated circuit structure, and removal of residues from via etch and resist mask removal Grant 6,562,700 - Gu , et al. May 13, 2 | 2003-05-13 |
Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flow App 20030068858 - Allman, Derryl D. J. ;   et al. | 2003-04-10 |
Apparatus and method for planarizing the surface of a semiconductor wafer Grant 6,541,383 - Allman , et al. April 1, 2 | 2003-04-01 |
Substrate planarization with a chemical mechanical polishing stop layer Grant 6,528,389 - Allman , et al. March 4, 2 | 2003-03-04 |
Interconnect-embedded metal-insulator-metal capacitor Grant 6,504,202 - Allman , et al. January 7, 2 | 2003-01-07 |
Plasma treatment system App 20020187643 - Gu, Shiqun ;   et al. | 2002-12-12 |
Interconnect-integrated metal-insulator-metal capacitor and method of fabricating same Grant 6,342,734 - Allman , et al. January 29, 2 | 2002-01-29 |
Capacitor with multiple-component dielectric and method of fabricating same Grant 6,341,056 - Allman , et al. January 22, 2 | 2002-01-22 |
On-chip single layer horizontal deflecting waveguide and damascene method of fabricating the same App 20010041027 - Hornbeck, Verne C. ;   et al. | 2001-11-15 |
Apparatus and method of planarizing a semiconductor wafer that includes a first reflective substance and a second reflective substance Grant 6,316,276 - Gregory , et al. November 13, 2 | 2001-11-13 |
Method and apparatus for detecting a planarized outer layer of a semiconductor wafer with a confocal optical system App 20010021622 - Allman, Derryl D.J. ;   et al. | 2001-09-13 |
Semiconductor wafer having a layer-to-layer alignment mark and method for fabricating the same Grant 6,288,454 - Allman , et al. September 11, 2 | 2001-09-11 |
Integrated circuit device and method of making the same using chemical mechanical polishing to remove material in two layers following masking Grant 6,284,586 - Seliskar , et al. September 4, 2 | 2001-09-04 |
Method and apparatus for detecting a polishing endpoint based upon infrared signals Grant 6,241,847 - Allman , et al. June 5, 2 | 2001-06-05 |
Tunable dielectric constant oxide and method of manufacture Grant 6,211,096 - Allman , et al. April 3, 2 | 2001-04-03 |
Method and apparatus for detecting a planarized outer layer of a semiconductor wafer with a confocal optical system Grant 6,201,253 - Allman , et al. March 13, 2 | 2001-03-13 |
Fabrication of metal-insulator-metal capacitive structures Grant 6,177,305 - Hornback , et al. January 23, 2 | 2001-01-23 |
Semiconductor wafer having a layer-to-layer alignment mark and method for fabricating the same Grant 6,136,662 - Allman , et al. October 24, 2 | 2000-10-24 |
Apparatus and method of detecting a polishing endpoint layer of a semiconductor wafer which includes a metallic reporting substance Grant 6,121,147 - Daniel , et al. September 19, 2 | 2000-09-19 |
Integrated circuit device having a capacitor with the dielectric peripheral region being greater than the dielectric central region Grant 6,115,233 - Seliskar , et al. September 5, 2 | 2000-09-05 |
Method and apparatus for detecting a polishing endpoint based upon heat conducted through a semiconductor wafer Grant 6,077,783 - Allman , et al. June 20, 2 | 2000-06-20 |
Method for tungsten nucleation from WF.sub.6 using titanium as a reducing agent Grant 5,963,828 - Allman , et al. October 5, 1 | 1999-10-05 |
Subsonic to supersonic and ultrasonic conditioning of a polishing pad in a chemical mechanical polishing apparatus Grant 5,868,608 - Allman , et al. February 9, 1 | 1999-02-09 |
Polishing composition for CMP operations Grant 5,861,055 - Allman , et al. January 19, 1 | 1999-01-19 |
Spin-on conductor process for integrated circuits Grant 5,728,626 - Allman , et al. March 17, 1 | 1998-03-17 |
Electronic device with a spin-on glass dielectric layer Grant 5,665,845 - Allman September 9, 1 | 1997-09-09 |
Method for polishing a wafer Grant 5,645,736 - Allman July 8, 1 | 1997-07-08 |
Method for manufacturing a monitor element Grant 5,576,224 - Yakura , et al. November 19, 1 | 1996-11-19 |
Electronic device with a spin-on glass dielectric layer Grant 5,527,872 - Allman June 18, 1 | 1996-06-18 |
Coating solution for forming glassy layers Grant 5,472,488 - Allman December 5, 1 | 1995-12-05 |
Structure and method for remotely measuring process data Grant 5,466,614 - Yakura , et al. November 14, 1 | 1995-11-14 |
Method for forming a bipolar transistor using doped SOG Grant 5,340,752 - Allman , et al. August 23, 1 | 1994-08-23 |
Method of making a shallow junction by using first and second SOG layers Grant 5,340,770 - Allman , et al. August 23, 1 | 1994-08-23 |
Method for forming a bipolar emitter using doped SOG Grant 5,322,805 - Allman , et al. June 21, 1 | 1994-06-21 |
Global planarization using SOG and CMP Grant 5,312,512 - Allman , et al. May 17, 1 | 1994-05-17 |
Selective sidewall diffusion process using doped SOG Grant 5,308,790 - Allman , et al. May 3, 1 | 1994-05-03 |
Coating solution for forming glassy layers Grant 5,302,198 - Allman * April 12, 1 | 1994-04-12 |
Spin-on glass composition Grant 5,152,834 - Allman October 6, 1 | 1992-10-06 |
Silica-based anti-reflective planarizing layer Grant 5,100,503 - Allman , et al. March 31, 1 | 1992-03-31 |
Native oxide reduction for sealing nitride deposition Grant 4,855,258 - Allman , et al. August 8, 1 | 1989-08-08 |