Allen; Adolph M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Allen; Adolph M..The latest application filed is for "physical vapor deposition (pvd) chamber with in situ chamber cleaning capability".
- Allen; Adolph M. - Oakland CA
- ALLEN; ADOLPH M - OAKLAND CA
| Patent | Date |
|---|---|
| Physical vapor deposition (PVD) chamber with in situ chamber cleaning capability Grant 11,289,312 - Allen , et al. March 29, 2 | 2022-03-29 |
| Physical Vapor Deposition (pvd) Chamber With In Situ Chamber Cleaning Capability App 20200395198 - ALLEN; ADOLPH M. ; et al. | 2020-12-17 |
| High Power Impulse Magnetron Sputtering Physical Vapor Deposition Of Tungsten Films Having Improved Bottom Coverage App 20200048760 - KALATHIPARAMBIL; KISHOR ; et al. | 2020-02-13 |
| Treatment And Doping Of Barrier Layers App 20190385908 - Xie; Xiangjin ; et al. | 2019-12-19 |
| Process Kit Geometry For Particle Reduction In Pvd Processes App 20190237311 - ALLEN; ADOLPH M. ; et al. | 2019-08-01 |
| Physical Vapor Deposition With A Variable Capacitive Tuner and Feedback Circuit App 20110209995 - Rasheed; Muhammad M. ; et al. | 2011-09-01 |
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