Patent | Date |
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Method for manufacturing a thin filtering membrane and an acoustic transducer device including the filtering membrane Grant 11,317,219 - Perletti , et al. April 26, 2 | 2022-04-26 |
Microelectromechanical device with signal routing through a protective cap Grant 11,274,036 - Allegato , et al. March 15, 2 | 2022-03-15 |
Process For Manufacturing A Micro-electro-mechanical Device, And Mems Device App 20210363000 - ALLEGATO; Giorgio ;   et al. | 2021-11-25 |
Method for manufacturing a semiconductor die provided with a filtering module, semiconductor die including the filtering module, package housing the semiconductor die, and electronic system Grant 11,128,958 - Allegato , et al. September 21, 2 | 2021-09-21 |
Piezoelectric Micromachined Ultrasonic Transducer App 20210276044 - VERCESI; Federico ;   et al. | 2021-09-09 |
Semiconductor Device For Ambient Sensing Including A Cavity And A Mechanical Filtering Structure App 20210262884 - AZPEITIA URQUIA; Mikel ;   et al. | 2021-08-26 |
Piezoelectric Microelectromechanical Resonator Device And Corresponding Manufacturing Process App 20210099154 - VERCESI; Federico ;   et al. | 2021-04-01 |
MEMS device formed by at least two bonded structural layers and manufacturing process thereof Grant 10,954,121 - Allegato , et al. March 23, 2 | 2021-03-23 |
Microelectromechanical Device With Signal Routing Through A Protective Cap App 20200385260 - ALLEGATO; Giorgio ;   et al. | 2020-12-10 |
Ultrasonic Mems Acoustic Transducer With Reduced Stress Sensitivity And Manufacturing Process Thereof App 20200156114 - GATTERE; Gabriele ;   et al. | 2020-05-21 |
Mems Device Formed By At Least Two Bonded Structural Layers And Manufacturing Process Thereof App 20200123004 - ALLEGATO; Giorgio ;   et al. | 2020-04-23 |
Microelectromechanical device with signal routing through a protective cap Grant 10,611,629 - Allegato , et al. | 2020-04-07 |
Method For Manufacturing A Thin Filtering Membrane And An Acoustic Transducer Device Including The Filtering Membrane App 20200092659 - PERLETTI; Matteo ;   et al. | 2020-03-19 |
MEMS device formed by at least two bonded structural layers and manufacturing process thereof Grant 10,570,009 - Allegato , et al. Feb | 2020-02-25 |
Method for manufacturing a thin filtering membrane and an acoustic transducer device including the filtering membrane Grant 10,555,091 - Perletti , et al. Fe | 2020-02-04 |
Hermetically Sealed Mems Mirror And Method Of Manufacture App 20200033591 - ALLEGATO; Giorgio ;   et al. | 2020-01-30 |
Hermetically sealed MEMS mirror and method of manufacture Grant 10,473,920 - Allegato , et al. Nov | 2019-11-12 |
Method For Manufacturing A Semiconductor Die Provided With A Filtering Module, Semiconductor Die Including The Filtering Module, App 20190239000 - ALLEGATO; Giorgio ;   et al. | 2019-08-01 |
Encapsulated device of semiconductor material with reduced sensitivity to thermo-mechanical stresses Grant 10,329,141 - Tocchio , et al. | 2019-06-25 |
Mems Device Formed By At Least Two Bonded Structural Layers And Manufacturing Process Thereof App 20190185318 - Allegato; Giorgio ;   et al. | 2019-06-20 |
Method For Manufacturing A Thin Filtering Membrane And An Acoustic Transducer Device Including The Filtering Membrane App 20190090067 - PERLETTI; Matteo ;   et al. | 2019-03-21 |
MEMS device formed by at least two bonded structural layers and manufacturing process thereof Grant 10,227,233 - Allegato , et al. | 2019-03-12 |
Hermetically Sealed Mems Mirror And Method Of Manufacture App 20180059405 - Allegato; Giorgio ;   et al. | 2018-03-01 |
Mems Device Formed By At Least Two Bonded Structural Layers And Manufacturing Process Thereof App 20170369309 - ALLEGATO; Giorgio ;   et al. | 2017-12-28 |
Microelectromechanical Device With Signal Routing Through A Protective Cap App 20170297906 - ALLEGATO; Giorgio ;   et al. | 2017-10-19 |
Microelectromechanical device with signal routing through a protective cap Grant 9,718,675 - Allegato , et al. August 1, 2 | 2017-08-01 |
Encapsulated Device Of Semiconductor Material With Reduced Sensitivity To Thermo-mechanical Stresses App 20170088416 - TOCCHIO; Alessandro ;   et al. | 2017-03-30 |
Microelectromechanical device with signal routing through a protective cap Grant 9,452,922 - Allegato , et al. September 27, 2 | 2016-09-27 |
Microelectromechanical Device With Signal Routing Through A Protective Cap App 20160145096 - ALLEGATO; Giorgio ;   et al. | 2016-05-26 |
Method for manufacturing a die assembly having a small thickness and die assembly relating thereto Grant 9,327,964 - Allegato , et al. May 3, 2 | 2016-05-03 |
Method For Manufacturing A Die Assembly Having A Small Thickness And Die Assembly Relating Thereto App 20150115378 - Allegato; Giorgio ;   et al. | 2015-04-30 |
Oscillator device and manufacturing process of the same Grant 8,988,155 - Allegato , et al. March 24, 2 | 2015-03-24 |
Multilayer structure having a microfluidic channel and a system for detecting leakage from the microfluidic channel, and method of detecting leakage in a microfluidic device Grant 8,931,328 - Allegato , et al. January 13, 2 | 2015-01-13 |
Microelectromechanical Device With Signal Routing Through A Protective Cap App 20140230546 - Allegato; Giorgio ;   et al. | 2014-08-21 |
Oscillator Device And Manufacturing Process Of The Same App 20130135056 - Allegato; Giorgio ;   et al. | 2013-05-30 |
Multilayer Structure Having A Microfluidic Channel And A System For Detecting Leakage From The Microfluidic Channel, And Method Of Detecting Leakage In A Microfluidic Device App 20130000388 - Allegato; Giorgio ;   et al. | 2013-01-03 |