ALGOTS; J. Martin
Patent Applications and Registrations
Patent applications and USPTO patent grants for ALGOTS; J. Martin.The latest application filed is for "droplet generator steering system".
- ALGOTS; J. Martin - San Diego CA
| Patent | Date |
|---|---|
| Droplet Generator Steering System App 20160150626 - BAUMGART; Peter M. ; et al. | 2016-05-26 |
| Droplet generator steering system Grant 9,279,445 - Baumgart , et al. March 8, 2 | 2016-03-08 |
| 6 KHz and above gas discharge laser system Grant 8,855,166 - Ujazdowski , et al. October 7, 2 | 2014-10-07 |
| Droplet Generator Steering System App 20130153792 - Baumgart; Peter M. ; et al. | 2013-06-20 |
| 6 Khz And Above Gas Discharge Laser System App 20120120974 - Ujazdowski; Richard C. ; et al. | 2012-05-17 |
| Line narrowing module Grant 8,126,027 - Algots , et al. February 28, 2 | 2012-02-28 |
| Line Narrowing Module App 20110194580 - Algots; J. Martin ; et al. | 2011-08-11 |
| Method and apparatus for EUV plasma source target delivery Grant 7,838,854 - Algots , et al. November 23, 2 | 2010-11-23 |
| Line narrowing module App 20100097704 - Algots; J. Martin ; et al. | 2010-04-22 |
| LPP EUV plasma source material target delivery system Grant 7,589,337 - Bykanov , et al. September 15, 2 | 2009-09-15 |
| Method and apparatus for EUV plasma source target delivery App 20080283776 - Algots; J. Martin ; et al. | 2008-11-20 |
| LPP EUV plasma source material target delivery system App 20080179549 - Bykanov; Alexander N. ; et al. | 2008-07-31 |
| Method and apparatus for EUV plasma source target delivery Grant 7,405,416 - Algots , et al. July 29, 2 | 2008-07-29 |
| Line narrowing module App 20080151944 - Algots; J. Martin ; et al. | 2008-06-26 |
| LPP EUV plasma source material target delivery system Grant 7,372,056 - Bykanov , et al. May 13, 2 | 2008-05-13 |
| Line narrowing module Grant 7,366,219 - Algots , et al. April 29, 2 | 2008-04-29 |
| LPP EUV plasma source material target delivery system App 20070001130 - Bykanov; Alexander N. ; et al. | 2007-01-04 |
| Method and apparatus for EUV light source target material handling Grant 7,122,816 - Algots , et al. October 17, 2 | 2006-10-17 |
| 6 Khz and above gas discharge laser system App 20060222034 - Ujazdowski; Richard C. ; et al. | 2006-10-05 |
| Method and apparatus for EUV plasma source target delivery App 20060192154 - Algots; J. Martin ; et al. | 2006-08-31 |
| Method And Apparatus For Euv Light Source Target Material Handling App 20060192155 - Algots; J. Martin ; et al. | 2006-08-31 |
| Line narrowing module App 20060114957 - Algots; J. Martin ; et al. | 2006-06-01 |
| High power high pulse repetition rate gas discharge laser system bandwidth management App 20060114956 - Sandstrom; Richard L. ; et al. | 2006-06-01 |
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