Albrecht; Hans-Stephan
Patent Applications and Registrations
Patent applications and USPTO patent grants for Albrecht; Hans-Stephan.The latest application filed is for "bandwidth-limited and long pulse master oscillator power oscillator laser systems".
- Albrecht; Hans-Stephan - Goettingen DE
- Albrecht; Hans-Stephan - Gottingen DE
| Patent | Date |
|---|---|
| Bandwidth-limited and long pulse master oscillator power oscillator laser systems Grant 7,760,788 - Govorkov , et al. July 20, 2 | 2010-07-20 |
| Bandwidth-limited And Long Pulse Master Oscillator Power Oscillator Laser Systems App 20080291962 - Govorkov; Sergei V. ; et al. | 2008-11-27 |
| Bandwidth-limited and long pulse master oscillator power oscillator laser systems Grant 7,418,022 - Govorkov , et al. August 26, 2 | 2008-08-26 |
| Laser gas replenishment method Grant 7,266,137 - Albrecht , et al. September 4, 2 | 2007-09-04 |
| Double-pass imaging pulse-stretcher App 20060216037 - Wiessner; Alexander O. ; et al. | 2006-09-28 |
| Bandwidth-limited and long pulse master oscillator power oscillator laser systems App 20060007978 - Govorkov; Sergei V. ; et al. | 2006-01-12 |
| Excimer laser system with stable beam output App 20050271110 - Paetzel, Rainer ; et al. | 2005-12-08 |
| Laser gas replenishment method Grant 6,965,624 - Albrecht , et al. November 15, 2 | 2005-11-15 |
| Laser gas replenishment method App 20040252740 - Albrecht, Hans-Stephan ; et al. | 2004-12-16 |
| Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser Grant 6,822,977 - Stamm , et al. November 23, 2 | 2004-11-23 |
| Precise monitor etalon calibration technique Grant 6,807,205 - Albrecht , et al. October 19, 2 | 2004-10-19 |
| Fast linear motor for wavelength variation for lithography lasers App 20040190577 - Albrecht, Hans-Stephan ; et al. | 2004-09-30 |
| Monitoring of spectral purity and advanced spectral characteristics of a narrow bandwidth excimer laser App 20040141182 - Schroder, Thomas ; et al. | 2004-07-22 |
| Chirp compensation method and apparatus Grant 6,735,225 - Albrecht , et al. May 11, 2 | 2004-05-11 |
| Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser Grant 6,618,403 - Stamm , et al. September 9, 2 | 2003-09-09 |
| Chirp compensation method and apparatus App 20030016708 - Albrecht, Hans-Stephan ; et al. | 2003-01-23 |
| Laser gas replenishment method Grant 6,504,861 - Albrecht , et al. January 7, 2 | 2003-01-07 |
| Laser gas replenishment method Grant 6,493,370 - Albrecht , et al. December 10, 2 | 2002-12-10 |
| Laser resonator for improving narrow band emission of an excimer laser App 20020131468 - Albrecht, Hans-Stephan ; et al. | 2002-09-19 |
| Laser gas replenishment method App 20020110174 - Albrecht, Hans-Stephan ; et al. | 2002-08-15 |
| Laser gas replenishment method App 20020101901 - Albrecht, Hans-Stephan ; et al. | 2002-08-01 |
| Laser gas replenishment method App 20020101902 - Albrecht, Hans-Stephan ; et al. | 2002-08-01 |
| Laser gas replenishment method Grant 6,389,052 - Albrecht , et al. May 14, 2 | 2002-05-14 |
| Laser resonator for improving narrow band emission of an excimer laser App 20020031161 - Albrecht, Hans-Stephan ; et al. | 2002-03-14 |
| Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser App 20010042840 - Stamm, Uwe ; et al. | 2001-11-22 |
| Detector with frequency converting coating App 20010040905 - Stamm, Uwe ; et al. | 2001-11-15 |
| Laser gas replenishment method App 20010012309 - Albrecht, Hans-Stephan ; et al. | 2001-08-09 |
| Wavelength calibration tool for narrow band excimer lasers Grant 6,160,831 - Kleinschmidt , et al. December 12, 2 | 2000-12-12 |
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