Alayavalli; Kaushik
Patent Applications and Registrations
Patent applications and USPTO patent grants for Alayavalli; Kaushik.The latest application filed is for "deposition of low-stress boron-containing layers".
- Alayavalli; Kaushik - Sunnyvale CA
- Alayavalli; Kaushik - Santa Clara CA
| Patent | Date |
|---|---|
| Deposition of low-stress carbon-containing layers Grant 11,404,263 - Wang , et al. August 2, 2 | 2022-08-02 |
| Deposition Of Low-stress Carbon-containing Layers App 20220044926 - Wang; Huiyuan ; et al. | 2022-02-10 |
| Deposition Of Low-stress Boron-containing Layers App 20220044927 - Wang; Huiyuan ; et al. | 2022-02-10 |
| Plasma Cleaning Methods For Processing Chambers App 20210384015 - WANG; Huiyuan ; et al. | 2021-12-09 |
| Shunt Door For Magnets In Plasma Process Chamber App 20210269919 - BERA; Kallol ; et al. | 2021-09-02 |
| Gas Delivery Systems And Methods App 20210143029 - Kedlaya; Diwakar ; et al. | 2021-05-13 |
| Horizontal heat choke faceplate design Grant 10,907,252 - Zhang , et al. February 2, 2 | 2021-02-02 |
| Heater pedestal assembly for wide range temperature control Grant 10,910,238 - Alayavalli , et al. February 2, 2 | 2021-02-02 |
| Faceplate with embedded heater Grant 10,889,894 - Hwung , et al. January 12, 2 | 2021-01-12 |
| Gas Distribution Assemblies And Operation Thereof App 20200098547 - DASH; Priyanka ; et al. | 2020-03-26 |
| System and method for substrate processing chambers Grant 10,600,624 - Ghosh , et al. | 2020-03-24 |
| Faceplate With Embedded Heater App 20200040452 - HWUNG; Daniel ; et al. | 2020-02-06 |
| High Temperature Faceplate With Thermal Choke And Cooling App 20190226088 - ZHANG; Yuxing ; et al. | 2019-07-25 |
| High Temperature Faceplate With Hybrid Material Design App 20190226089 - ZHANG; Yuxing ; et al. | 2019-07-25 |
| Heated Ceramic Faceplate App 20190226087 - ZHANG; Yuxing ; et al. | 2019-07-25 |
| Dual-channel showerhead for formation of film stacks Grant 10,276,353 - Alayavalli , et al. | 2019-04-30 |
| System And Method For Substrate Processing Chambers App 20190122872 - GHOSH; Kalyanjit ; et al. | 2019-04-25 |
| Horizontal Heat Choke Faceplate Design App 20190119816 - ZHANG; Yuxing ; et al. | 2019-04-25 |
| Heater Pedestal Assembly For Wide Range Temperature Control App 20180082866 - ALAYAVALLI; Kaushik ; et al. | 2018-03-22 |
| Dual-channel Showerhead For Formation Of Film Stacks App 20160322200 - ALAYAVALLI; Kaushik ; et al. | 2016-11-03 |
| Compensating Concentration Uncertainity App 20130284090 - BALASUBRAMANIAN; Ganesh ; et al. | 2013-10-31 |
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