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Slurry, polishing-solution set, polishing solution, substrate polishing method, and substrate Grant 10,557,059 - Iwano , et al. Feb | 2020-02-11 |
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Abrasive, Abrasive Set, And Method For Polishing Substrate App 20180320024 - MINAMI; Hisataka ;   et al. | 2018-11-08 |
Polishing Liquid, Polishing Liquid Set, And Substrate Polishing Method App 20180258319 - AKUTSU; Toshiaki ;   et al. | 2018-09-13 |
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Slurry, polishing-solution set, polishing solution, substrate polishing method, and substrate Grant 9,932,497 - Iwano , et al. April 3, 2 | 2018-04-03 |
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Slurry, polishing-solution set, polishing solution, substrate polishing method, and substrate Grant 9,346,978 - Iwano , et al. May 24, 2 | 2016-05-24 |
Polishing Liquid For Cmp, And Polishing Method App 20160137881 - OOTA; Munehiro ;   et al. | 2016-05-19 |
Abrasive, Abrasive Set, And Method For Abrading Substrate App 20160040041 - MINAMI; Hisataka ;   et al. | 2016-02-11 |
Polishing agent, polishing agent set and method for polishing base Grant 9,163,162 - Akutsu , et al. October 20, 2 | 2015-10-20 |
Polishing Agent, Polishing Agent Set And Method For Polishing Base App 20150232704 - Akutsu; Toshiaki ;   et al. | 2015-08-20 |
Slurry, Polishing-solution Set, Polishing Solution, Substrate Polishing Method, And Substrate App 20150140904 - Iwano; Tomohiro ;   et al. | 2015-05-21 |
Slurry, Polishing-solution Set, Polishing Solution, Substrate Polishing Method, And Substrate App 20150139885 - Iwano; Tomohiro ;   et al. | 2015-05-21 |
Abrasive Grains, Slurry, Polishing Solution, And Manufacturing Methods Therefor App 20150129796 - Iwano; Tomohiro ;   et al. | 2015-05-14 |
Slurry, Polishing-solution Set, Polishing Solution, Substrate Polishing Method, And Substrate App 20150132208 - Iwano; Tomohiro ;   et al. | 2015-05-14 |
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Abrasive, Abrasive Set, And Method For Abrading Substrate App 20150024596 - Minami; Hisataka ;   et al. | 2015-01-22 |
Polishing Agent, Polishing Agent Set, And Substrate Polishing Method App 20150017806 - Akutsu; Toshiaki ;   et al. | 2015-01-15 |
CMP polishing slurry and method of polishing substrate Grant 8,900,335 - Fukasawa , et al. December 2, 2 | 2014-12-02 |
Cmp Polishing Liquid, Method For Polishing Substrate, And Electronic Component App 20130059439 - Shinoda; Takashi ;   et al. | 2013-03-07 |
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Chemical-mechanical Polishing Liquid, And Semiconductor Substrate Manufacturing Method And Polishing Method Using Said Polishing Liquid App 20120214307 - Yoshikawa; Shigeru ;   et al. | 2012-08-23 |
Cmp Polishing Slurry And Method Of Polishing Substrate App 20100210109 - Fukasawa; Masato ;   et al. | 2010-08-19 |
Cmp Polishing Slurry, Additive Liquid For Cmp Polishing Slurry, And Substrate-polishing Processes Using The Same App 20100015806 - Fukasawa; Masato ;   et al. | 2010-01-21 |
Cmp Polishing Slurry and Method of Polishing Substrate App 20080254717 - Fukasawa; Masato ;   et al. | 2008-10-16 |
Cmp Polishing Slurry and Method of Polishing Substrate App 20080003925 - Fukasawa; Masato ;   et al. | 2008-01-03 |
Polishing slurry for silicon oxide, additive liquid and polishing method App 20070175104 - Nishiyama; Masaya ;   et al. | 2007-08-02 |