Akutsu; Kotaro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Akutsu; Kotaro.The latest application filed is for "substrate processing apparatus".
- Akutsu; Kotaro - Saitama JP
- Akutsu; Kotaro - Soka JP
- Akutsu; Kotaro - Soka-shi JP
- Akutsu; Kotaro - Sohka JP
- Akutsu; Kotaro - Machida JP
| Patent | Date |
|---|---|
| Exposure apparatus Grant 7,391,496 - Emoto , et al. June 24, 2 | 2008-06-24 |
| Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method Grant 7,207,720 - Sai , et al. April 24, 2 | 2007-04-24 |
| Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrate Grant 7,123,350 - Akutsu , et al. October 17, 2 | 2006-10-17 |
| Substrate processing apparatus App 20060158650 - Akutsu; Kotaro ; et al. | 2006-07-20 |
| Exposure apparatus Grant 7,057,193 - Akutsu June 6, 2 | 2006-06-06 |
| Exposure apparatus Grant 7,057,703 - Emoto , et al. June 6, 2 | 2006-06-06 |
| Exposure apparatus Grant 7,038,759 - Emoto , et al. May 2, 2 | 2006-05-02 |
| Stage system, exposure apparatus, and device manufacturing method App 20060082755 - Akutsu; Kotaro ; et al. | 2006-04-20 |
| Stage system, exposure apparatus, and device manufacturing method Grant 7,030,964 - Akutsu , et al. April 18, 2 | 2006-04-18 |
| Substrate processing apparatus Grant 7,012,690 - Akutsu , et al. March 14, 2 | 2006-03-14 |
| Exposure apparatus App 20060028629 - Emoto; Keiji ; et al. | 2006-02-09 |
| Stage system, exposure apparatus, and device manufacturing method Grant 6,989,888 - Akutsu January 24, 2 | 2006-01-24 |
| Exposure apparatus App 20050213062 - Emoto, Keiji ; et al. | 2005-09-29 |
| Electron beam exposure apparatus and semiconductor device manufacturing method Grant 6,930,756 - Akutsu , et al. August 16, 2 | 2005-08-16 |
| Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method App 20050129339 - Sai, Choshoku ; et al. | 2005-06-16 |
| Substrate processing apparatus App 20050099629 - Akutsu, Kotaro ; et al. | 2005-05-12 |
| Substrate processing apparatus Grant 6,879,382 - Akutsu , et al. April 12, 2 | 2005-04-12 |
| Substrate holding device, substrate processing apparatus using the same, and method for aligning and holding substrate App 20050018168 - Akutsu, Kotaro ; et al. | 2005-01-27 |
| Stage system, exposure apparatus, and device manufacturing method App 20050018165 - Akutsu, Kotaro | 2005-01-27 |
| Stage system, exposure apparatus, and device manufacturing method App 20050018166 - Akutsu, Kotaro ; et al. | 2005-01-27 |
| Hydrostatic bearing, alignment apparatus, exposure apparatus, and device manufacturing method App 20050008269 - Akutsu, Kotaro ; et al. | 2005-01-13 |
| Exposure apparatus App 20040041101 - Akutsu, Kotaro | 2004-03-04 |
| Electron beam exposure apparatus and semiconductor device manufacturing method App 20040012765 - Akutsu, Kotaro ; et al. | 2004-01-22 |
| Exposure apparatus App 20030007136 - Emoto, Keiji ; et al. | 2003-01-09 |
| Substrate processing apparatus App 20020132409 - Akutsu, Kotaro ; et al. | 2002-09-19 |
| Positioning device, exposure device, and device manufacturing method Grant 6,359,679 - Ito , et al. March 19, 2 | 2002-03-19 |
| Positioning system and position measuring method for use in exposure apparatus Grant 6,285,444 - Osanai , et al. September 4, 2 | 2001-09-04 |
| Positioning apparatus and exposure apparatus using the same Grant 6,028,376 - Osanai , et al. February 22, 2 | 2000-02-22 |
| Stage feeding device Grant 5,939,852 - Akutsu , et al. August 17, 1 | 1999-08-17 |
| Stage apparatus and exposure apparatus and device producing method using the same Grant 5,864,389 - Osanai , et al. January 26, 1 | 1999-01-26 |
| Positioning system and method and apparatus for device manufacture Grant 5,858,587 - Yamane , et al. January 12, 1 | 1999-01-12 |
| Moving stage apparatus and system using the same Grant 5,726,548 - Chiba , et al. March 10, 1 | 1998-03-10 |
| Static pressure bearing device Grant 5,382,095 - Akutsu January 17, 1 | 1995-01-17 |
| Device for positioning control Grant 5,184,055 - Ohishi , et al. February 2, 1 | 1993-02-02 |
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