Akrion, LLC
Patent Applications and Registrations
Patent applications and USPTO patent grants for Akrion, LLC.The latest application filed is for "substrate process tank with acoustical source transmission and method of processing substrates".
- Akrion, LLC - Allentown PA
| Patent | Date |
|---|---|
| Substrate process tank with acoustical source transmission and method of processing substrates Grant 6,955,727 - Korbler , et al. October 18, 2 | 2005-10-18 |
| Membrane dryer Grant 6,928,750 - Kashkoush , et al. August 16, 2 | 2005-08-16 |
| Capillary drying of substrates Grant 6,907,890 - Myland June 21, 2 | 2005-06-21 |
| Low profile wafer carrier Grant 6,871,657 - Bottos , et al. March 29, 2 | 2005-03-29 |
| Method for removal of photoresist using sparger Grant 6,863,836 - Novak , et al. March 8, 2 | 2005-03-08 |
| Membrane dryer Grant 6,842,998 - Kashkoush , et al. January 18, 2 | 2005-01-18 |
| Nextgen wet process tank Grant 6,840,250 - Kashkoush , et al. January 11, 2 | 2005-01-11 |
| Cleaning and drying method and apparatus Grant 6,837,944 - Kashkoush , et al. January 4, 2 | 2005-01-04 |
| Process and apparatus for removal of photoresist from semiconductor wafers using spray nozzles Grant 6,818,563 - Novak , et al. November 16, 2 | 2004-11-16 |
| Chemical concentration control device Grant 6,766,818 - Kashkoush , et al. July 27, 2 | 2004-07-27 |
| Method and system for chemical injection in silicon wafer processing Grant 6,767,877 - Kuo , et al. July 27, 2 | 2004-07-27 |
| Particle barrier drain Grant 6,732,749 - Myland May 11, 2 | 2004-05-11 |
| Drying vapor generation Grant 6,722,056 - Myland April 20, 2 | 2004-04-20 |
| System for removal of photoresist using sparger Grant 6,649,018 - Novak , et al. November 18, 2 | 2003-11-18 |
| Method of processing substrates using pressurized mist generation Grant 6,626,189 - Kashkoush , et al. September 30, 2 | 2003-09-30 |
| Process tank with pressurized mist generation Grant 6,532,974 - Kashkoush , et al. March 18, 2 | 2003-03-18 |
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