Akkermans; Johannes Antonius Gerardus
Patent Applications and Registrations
Patent applications and USPTO patent grants for Akkermans; Johannes Antonius Gerardus.The latest application filed is for "metrology sensor, lithographic apparatus and method for manufacturing devices".
- Akkermans; Johannes Antonius Gerardus - Waalre NL
- Akkermans; Johannes Antonius Gerardus - Veldhoven NL
- Akkermans; Johannes Antonius Gerardus - Eindhoven NL
| Patent | Date |
|---|---|
| Position sensor Grant 11,333,985 - Goorden , et al. May 17, 2 | 2022-05-17 |
| Metrology sensor, lithographic apparatus and method for manufacturing devices Grant 11,181,835 - Goorden , et al. November 23, 2 | 2021-11-23 |
| Metrology Sensor, Lithographic Apparatus and Method for Manufacturing Devices App 20210157248 - GOORDEN; Sebastianus Adrianus ; et al. | 2021-05-27 |
| Position Sensor App 20210124276 - Goorden; Sebastianus Adrianus ; et al. | 2021-04-29 |
| Lithographic method Grant 10,437,154 - Nikipelov , et al. O | 2019-10-08 |
| Free electron laser Grant 10,381,796 - Smorenburg , et al. A | 2019-08-13 |
| Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator Grant 10,372,045 - Akkermans , et al. | 2019-08-06 |
| Free Electron Laser App 20180366899 - SMORENBURG; Petrus Wilhelmus ; et al. | 2018-12-20 |
| Radiation Beam Apparatus App 20180314164 - DEKKERS; Jeroen ; et al. | 2018-11-01 |
| Electron injector and free electron laser Grant 10,103,508 - Nikipelov , et al. October 16, 2 | 2018-10-16 |
| Sensor, object positioning system, lithographic apparatus and device manufacturing method Grant 10,061,213 - Akkermans , et al. August 28, 2 | 2018-08-28 |
| Undulator Grant 9,952,513 - Nikipelov , et al. April 24, 2 | 2018-04-24 |
| Lithographic Method App 20180081278 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2018-03-22 |
| Lithographic method Grant 9,823,572 - Nikipelov , et al. November 21, 2 | 2017-11-21 |
| Sensor, Object Positioning System, Lithographic Apparatus And Device Manufacturing Method App 20170277042 - AKKERMANS; Johannes Antonius Gerardus ; et al. | 2017-09-28 |
| Electron Injector and Free Electron Laser App 20170264071 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2017-09-14 |
| Electron injector and free electron laser Grant 9,728,931 - Nikipelov , et al. August 8, 2 | 2017-08-08 |
| An Undulator App 20170184975 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2017-06-29 |
| Electron Injector And Free Electron Laser App 20160301180 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2016-10-13 |
| Lithographic Method App 20160147161 - NIKIPELOV; Andrey Alexandrovich ; et al. | 2016-05-26 |
| Lithographic apparatus and method Grant 9,141,004 - Vermeulen , et al. September 22, 2 | 2015-09-22 |
| Method of Calibrating a Reluctance Actuator Assembly, Reluctance Actuator and Lithographic Apparatus Comprising Such Reluctance Actuator App 20150234297 - Akkermans; Johannes Antonius Gerardus ; et al. | 2015-08-20 |
| Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method Grant 9,081,307 - Hol , et al. July 14, 2 | 2015-07-14 |
| Electrostatic Clamp Apparatus And Lithographic Apparatus App 20140002805 - Banine; Vadim Yevgenyevich ; et al. | 2014-01-02 |
| Stage apparatus and lithographic apparatus comprising such stage apparatus Grant 8,587,769 - Akkermans , et al. November 19, 2 | 2013-11-19 |
| Lithographic Apparatus And Method App 20120249987 - Vermeulen; Johannes Petrus Martinus Bernardus ; et al. | 2012-10-04 |
| Variable Reluctance Device, Stage Apparatus, Lithographic Apparatus and Device Manufacturing Method App 20120019794 - HOL; Sven Antoin Johan ; et al. | 2012-01-26 |
| Stage Apparatus And Lithographic Apparatus Comprising Such Stage Apparatus App 20110299057 - AKKERMANS; Johannes Antonius Gerardus ; et al. | 2011-12-08 |
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