loadpatents
Patent applications and USPTO patent grants for Akiyama; Hiroteru.The latest application filed is for "pattern inspection apparatus and pattern inspection method".
Patent | Date |
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Pattern inspection apparatus and pattern inspection method Grant 11,145,050 - Inoue , et al. October 12, 2 | 2021-10-12 |
Pattern Inspection Apparatus And Pattern Inspection Method App 20200160496 - INOUE; Takafumi ;   et al. | 2020-05-21 |
Inspection apparatus and method for detecting false defects Grant 10,578,560 - Akiyama , et al. | 2020-03-03 |
Inspection method and inspection apparatus Grant 10,540,561 - Yabe , et al. Ja | 2020-01-21 |
Inspection Method And Inspection Apparatus App 20190095740 - YABE; Makoto ;   et al. | 2019-03-28 |
Inspection method, inspection apparatus, and inspection system Grant 9,922,415 - Inoue , et al. March 20, 2 | 2018-03-20 |
Inspection Method, Inspection Apparatus, And Inspection System App 20160292839 - INOUE; Takafumi ;   et al. | 2016-10-06 |
Inspection method Grant 9,165,355 - Tsuchiya , et al. October 20, 2 | 2015-10-20 |
Inspection Method App 20150279024 - TSUCHIYA; Hideo ;   et al. | 2015-10-01 |
Review apparatus and inspection system Grant 8,755,599 - Akiyama June 17, 2 | 2014-06-17 |
Inspection Apparatus And Method App 20120307043 - AKIYAMA; Hiroteru ;   et al. | 2012-12-06 |
Review Apparatus And Inspection System App 20110091099 - AKIYAMA; Hiroteru | 2011-04-21 |
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